http://www.tu-ilmenau.de

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Institute of Micro- and Nanotechnologies


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Contact Person

Prof. Dr. Martin Hoffmann

Phone +49 3677 69-3402

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MME 2012 - Save the date

We would be delighted to welcome you at the 23rd Micromechanics and Microsystems Europe Workshop, 9 to 12 September 2012 at the Ilmenau University of Technology, Germany. The workshop covers scientific areas of materials, processing technology and devices. The organizing committee invites papers in any subject related to micromachining, micromechanics and microsystems, including, but not restricted to: 

  • Fabrication technologies and processes
  • Materials 
  • Design and simulation tools 
  • Microcomponent packaging and solutions 
  • Device and process characterization 
  • Sensing and actuation applications 
  • Microfluidic components and systems 
  • System integration of MEMS, NEMS, RF MEMS and MOEMS 
  • BioMEMS 
  • Micro-Nano Integration 

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IMN MacroNano®

A Partner in Research and Development

The Institute for Micro- and Nanotechnologies of the TU Ilmenau – the IMN MacroNano® - brings together the know-how and resources of the cross-application ­disciplines of Microsystems Technology and Nanotechnology for the following ranges of application

  • Life Sciences
  • Energy Efficiency
  • Photonics 

One outstanding feature of the IMN MacroNano® is its interdisciplinary and cross-faculty orientation, which encompasses both the narrowly-focused disciplines of microsystems ­technology and nanotechnology and the range of practical applications in the three areas mentioned above. Thanks to close co-operation within the institute, it is possible to attain complex objectives in systems engineering whose successful implementation requires comprehensive know-how from every department in the institute, including:

  • Experts in application (for instance, in medical engineering) in order to adequately take into account the constraints and requirements of the range of application,
  • Experts in microsystems technology and nanotechnology to implement the miniaturised paradigm – the technological core of the institute -  and
  • Experts in measuring techniques and analytics to support the technological results in theory and practice – while making comprehensive use of the institute’s technological base.