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Faculty of Electrical Engineering and Information Technology

Institute of Micro- and Nanotechnologies

Rand

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29 departments and junior research groups from different faculties outline the scientific Institute for Micro- and Nanotechnologies (IMN) which is formed with the aim to collaboratively perform research and training in an interdisciplinary manner in the sectors of materials research, the patterning
of micro- and nanostructures, up to the realization of complete devices and systems for industrial applications.

The IMN is taking advantage of the Center for Micro- and Nanotechnologies (ZMN), a central facility of the university, and benefits
of the scientific infrastructure provided within.

Main Research focus:
- micro, nano, and pico systems for fluidics
- MEMS and NEMS structures for sensors
- LTCC-ceramics for RF-devices
- solid state electronics
- smart materials
- nanostructured materials
- nanoanalytics and nanodiagnostics
- nanopositioning
- micro optics 

 
Last update: July 18, 2007   Print page   © 2004-2012 Technische Universität Ilmenau