http://www.tu-ilmenau.de

Logo TU Ilmenau


Faculty of Mechanical Engineering Graduate Research School Optical Microsystems Technology

TU Ilmenau (Homelink)

INHALTE

Research

The graduate and research school optical microsystem technology, has been established in addition to the research project „Optical Microsystems“ (OPTIMI) which is funded by the German Federal Ministry of Education and Research (grant number 16SV3701). Research projects within the graduate school will be strongly related to the key issues of OPTIMI. Our main goal within this interdisciplinary project is the combination of optical, mechanical, fluidic, and electronic functionality in a single integrated device. The focus is on dynamic systems, especially micro-fluidic and highly dynamic mechanical components, and their application in integrated micro optical systems. We are working on the following four research topics:

 

Multifunctional Silicon-based Detectors

Detectors - or rather, complex opto-sensors - are important key components of optical microsystems which help determine the functionality of the overall system through their characteristics in connection with an effective access to electronic signal pre-processing (SPP). The strategic action field of the partners is the process-compatible combination of nano and micro optical elements, layers and layer systems respectively with the Si-technology of the CiS Research Institute.

The project is focused thematically on two research areas:

  • The integration of interlayer connection (“Through Silicon Vias “- TSV) into the technology of silicon opto-sensors as a prerequisite for hybrid 3D micro systems.
  • Increased functionality of silicon detectors on the one hand by technological integration of nano-optical structures and on the other hand by novel concepts for highly-sensitive Siphotomultipliers.

Moreover, in the context of the platform project a library for SPP-circuits is developed, which are realized as CMOS ICs in a semiconductor foundry. Subsequently, all electronic components are processed by appropriate assembly and packaging techniques with different detectors for hybrid 3D opto-sensors.

As a result of these research projects prototypes of compact silicon opto-sensors will be created, whose properties will also be the subject of work in several key projects.

The project team interacts continuously with all key partners, in order to be able to react promptly to all their requirements.

Specific topics of the key projects are:

  • Development of a pupil dilation sensor (key project „Micro optical Accommodation System“)
  • Development of a Si-detector system for a micro-interferometer (key project „Green Manufacturing“)
  • Development of a compact opacity sensor and a fluorescence sensor for micro fluidic applications (key project „Optoflutronics“).

Partners and Associated Institutions

  • CiS Research Institute for Micro Sensors and Photovoltaics GmbH
  • Friedrich Schiller University Jena, Institute of Applied Physics
  • X-FAB Semiconductor Foundries AG
  • Institute for Microelectronic and Mechatronic Systems gGmbH
  • Institute of Micro- and Nanotechnologies MacroNano® at Ilmenau University of Technology

Microoptical Accommodation Systems

For an artificial and intelligent implant to restore the accommodative capacity of the human eye, active optical components for an intraocular refraction power change as well as a sensor to detect the required accommodative demand have to be developed and integrated into a bio-compatible housing. The aim of this project is to demonstrate appropriate solutions at a scale of 2:1.

The vision of an autartikic and long-term stable artificial accommodation system for the treatment of aging or disease-caused limitations of the accommodation capacity of the human eye can only be realized by a consequent application of micro system-technologies. Scientific preliminary studies carried out by the Karlsruhe Institute of Technology (KIT) in collaboration with the University of Rostock have shown that a fully integrated system must contain components for the active refraction change at an aperture of approx. 5 mm, a sensor for the detection of accommodative need in the range of approx. 5 diopters as well as energy supplying and communication components. Within the framework of the project the following technological challenges have to be solved:

  • Development of compact active-optical subsystems to change the refractivity under utilization of fixed optical interfaces, which are integrated in the housing of the implant. Investigated are Alvarez-Humphrey and Triple-optics schemes, whereby refractive and diffractive interfaces should be combined.
  • Development of a sensor line (CiS GmbH) to determine the required of accommodation changes taking advantage of the pupillary-near reflex. Investigations on test persons are completed at the ophthalmic clinic of the University Tübingen.
  • A hermetically sealed body for the Accommodation System, manufactured by artificial glass molding (blank pressing). The body consists of two-pieces and a bio-compatible glass enclosure that will be joined by soldering or welding after the system integration has been done.

The evaluation of the developed components takes place a demonstrator of the scale 2:1 available at the KIT.

Partners and Associated Institutions

  • Friedrich Schiller University Jena, Institute of Applied Physics
  • CiS Research Institute for Micro Sensors and Photovoltaics GmbH
  • Karlruhe Institute of Technology, Campus North (KIT), Institute for Applied Computer Science
  • University Tübingen, Centre for Ophthalmology
Artificial Accommodation System with functions to be integrated during OptiMi-project

Green Manufacturing - Laser Material Processing

Active optical micro systems offer many ways for optimizing precision systems in the field of production technology, because they are small and due to large numbers of similar items, economically and energy-efficient. This kind of micro system technology is especially efficient- if several small systems operate in a network. It allows high accuracies, which can be realized otherwise only by an expensive- and relatively large macro system.

Exemplarily, two micro optical systems are being developed for precision machining in the project: a multi tracker system for toolposition controlling and correction and a deformable mirror for the optimal beam shaping of the laser. The linking of both systems results
in completely new application opportunities: while up till now, the mirror could compensate thermally induced errors predominantly, movements and deformation of the workpiece can now also be compensated.

The laser tracker system allows non-contact, highly dynamic and precise positioning measurement of a point in three dimensional space. It consists of a distance measuring device and a beam deflection system. In the project extremely compact optical trackers are designed on the principle of trilateration which all can be placed around the working room, e.g. of a robot without influencing the working robot by its size. With the help of optical micro system technology and a superimposed analysis such highly flexible and cost- effective tracking systems can be reached. This new idea of design can support the
accuracy and enables more efficient handling.

The wave front is corrected by the use of a highly dynamic mirror. Its surface is deformed and thus it modulates the reflection of the incident laser. Low temperature cofired ceramics (LTCC) are used for the mirror frame manufacturing. This technology enables the
combination of sensor elements with piezoelectric actuators of the same technological level. Integrated passive temperature and strain sensors are used to capture the mirror deformation state. They deliver the information for an optimized control algorithm, which actuates heater elements and cooling channels to control the local thermal tension of the mirror and thus its local deformation. The combination of sensor elements with 3-D fluid channels in one substrate and the application of the active piezoelectric layer results in a smart electromechanical package and poses a challenge for the LTCC technology and the
system integration. This design enables the application at the highest laser power.

Partners and Associated Institutions

  • Institute of Micro- and Nanotechnologies MacroNano® at Ilmenau University of Technology
  • Friedrich Schiller University Jena, Institute of Applied Physics
  • CiS Research Institute for Micro Sensors and Photovoltaics GmbH
  • Fraunhofer-Institute for Ceramic Technologies and Systems Dresden / Hermsdorf
Highly efficient laser (micro) machining using an active mirror and a micro-tracking system

Optoflutronics – MST-Toolbox for Multi Parameter Screening

In medical technology, biotechnology and pharmaceutical research, the application of optical methods is already a part of everyday life. Currently, however, only very discrete parameter can be analyzed. The complex mapping of the effects of active or toxic substances in complex cell culture systems or micro-organisms is not possible. This, in particular, limits the development of new drugs in the pharmaceutical industry. Thus, unwanted side effects that were not produced by the drug itself but by its metabolites cannot be determined.

The aim of the project “Optoflutronics - MST-toolbox for multi parameter screening” is to demonstrate the performance of highly integrated optical micro systems for the determination of substances with a large spectrum of activity with little effort. This requires a new approach for an efficient, fast and visually determination of various metabolic or cellular characteristics for various relevant organisms. The investigated micro systems offer potentials for solving existing problems with in vitro assays. This technological approach has huge potential in various application areas:

  • Selection of appropriate test organisms and 3D-cultivation of differentiated functional human tissue cells and multi-cellular systems.
  • Investigation of material mixtures, also within low concentration ranges.
  • Advancement of ecotoxicological test batteries up to the explantation of mechanical harmful effects.

To achieve these ambitious goals, miniaturized opto-fluidic systems based on micro bioreactors and micro fluid segments are necessary. These allow on the one hand the observation of the complex response behaviour of 3D cellular aggregates. On the other hand, separate cultivation of cells in larger series and the determination of the dose-dependent response behaviour of cells to toxic substances and substance combinations of drugs and xenobiotics is generally possible. The combination of micro fluidics, -optics and -mechanics to complete systems includes new applications and innovative system concepts for existing applications in the fields “Health” and “Environment” with expected high value-added potential.

Partners and Associated Institutions

  • Institute of Micro- and Nanotechnologies MacroNano® at Ilmenau University of Technology
  • CiS Research Institute for Micro Sensors and Photovoltaics GmbH
  • Martin Luther University Halle-Wittenberg, Institute for Toxicology
Example of a circuit with different analysis modules. The main module is a micro-bioreactor with AlGaN-sensors and optical manipulation

Research facilities

 At the Ilmenau University of Technology, the Center for Micro- and Nanotechnologies (ZMN) provides a platform of technologies for basic and for applied research in the field of micro and nano systems. The ZMN holds a total area of about 2,000m², with about 680m² of clean room facilities of different classes. For further information and a technology overview please visit the ZMN homepage:

http://www.tu-ilmenau.de/zmn-start/
Research facilities at the Friedrich Schiller University Jena