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Micromechanics and Microsystems Europe Workshop 2012


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Conference Articles

Download Proceedings MME 2012

Proceedings part one           (PDF, 48 MB)

Proceedings part two           (PDF, 39 MB)

Topics

Session A

  • Fabrication technologies and processes

  • Industrial presentations

 Session B

  • Sensing and actuation applications

 Session C

  • Microcomponent packaging and solutions

  • Device and process characterization

  • Microfluidic components and systems

 Session D

  • Design and simulation tools

  • BioMEMS

  • Micro-Nano integration

  • Materials

  • System integration of MEMS, NEMS, RF-MEMS and MOEMS

Session A

Session A


Fabrication technologies and processes

A 01         (PDF, 706 KB)
Fabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystems
R. P. Rocha, J. P. Carmo, J. H. Correia

University of Minho, School of Engineering, Department of Industrial Electronics, Guimarães, Portugal

A 02          (PDF, 384 KB)
High precision high rate silicon etching process for nano-fabrication
Z. Sanaee, M. Poudineh, S. Mohajerzadeh

Thin Film and Nano-Electronic Lab, University of Tehran, Tehran, Iran

A 02*          (PDF, 1,81 MB)
Improved dicing method for the microflown particle velocity sensor
O. Pjetri, R. J. Wiegerink, H. V. Jansen, G. J. M. Krijnen

Transducers Science and Technology, MESA+ Institute for Nanotechnology,
University of Twente, Enschede, The Netherlands

A 03          (PDF, 376 KB)
Fabrication and modeling of silicon micro-needles suitable for inclination sensing
Z. Sanaee, M. Mehran, S. Mohajerzadeh

Nanoelectronic Center of Excellence, Thin Film and Nano-Electronic Laboratory, School of Electrical & Computer Engineering, University of Tehran, Tehran, Iran

A 03*          (PDF, 3,16 MB)
Integrated wafer-through fluidic connections for surface channel technology
J. Groenesteijn1, M. J. de Boer1, T. S .J. Lammerink1, J. C. Lötters1,2, R. J. Wiegerink1

1 MESA+ Institute for Nanotechnology, University of Twente, The Netherlands

2 Bronkhorst High-Tech BV, Ruurlo, The Netherlands

A 04          (PDF, 410 KB)
Veils-free dry (ICP) etching of gold films with a vertical sharp sidewall

S. Keskin1, A. Aydemir1, T. Akin1, 2

1 METU-MEMS Research and Applications Center, Middle East Technical University,
   Ankara, Turkey

2 Middle East Technical University, Dept. of Electrical and Electronics Engineering,
   Ankara, Turkey

A 05          (PDF, 4,38 MB)
Micro structured electrochromic device based on poly (3,4-Ethylenedioxythiophene) (PEDOT)
T. Deutschmann, S. Roth, E. Oesterschulze

Physics and Technology of Nanostructures, University of Kaiserslautern, Kaiserslautern, Germany

Nano Structuring Center, Department of Physics, University of Kaiserslautern, Kaiserslautern, Germany

A 06          (PDF, 959 KB)
Controlled silicon grass generation using optical plasma emission spectroscopy
S. Leopold, C. Kremin, M. Hoffmann

Micromechanical Systems Group, IMN MacroNano®, Ilmenau University of Technology, Germany

A 07          (PDF, 163 KB)
Invasive neural electrodes structure fabrication based on aluminum wafers
A. C. Peixoto1, A. F. Silva2, N. S. Dias3,4, J. H. Correia1

1 Department of Industrial Electronics, University of Minho, Guimarães, Portugal

2 MIT Portugal Program, School of Engineering, University of Minho, Guimarães, Portugal

3 Life and Health Sciences Research Institute (ICVS), University of Minho, Braga, Portugal

4 DIGARC, Polytechnic Institute of Cávado and the Ave, Barcelos, Portugal

A 08          (PDF, 2,6 MB)
Fabrication of thick copper lines by film transfer method applied to PDMS structural layers
M. Couty1,2,3, S. Nazeer1,2, T. H. N. Dinh1,2,4, E. Martincic1,2, M. Woytasik1,2, M. Tatoulian3, E. Dufour-Gergam1,2

1 Univ. Paris-Sud, Laboratoire IEF, UMR-8622, Orsay, France

2 CNRS, Orsay, France

3 Laboratoire du Génie des Procédés Plasmas et Traitements de Surface (LGPPTS),
   Chimie ParisTech, Paris, France

4 KFM Technology, Villebon Sur Yvette, France

A 09          (PDF, 1,29 MB)
On the influence of laser cutting manufacturing tolerances on the spring rate of machined tubular springs

R. Hebel1, L. Dittrich2, M. Hoffmann2

1 LLT Applikation GmbH, Ilmenau, Germany

2 Micromechanical Systems Group, IMN MacroNano®, Ilmenau University of Technology,
   Germany

A 10          (PDF, 715 KB)
Large area and broadband semi-reflective bragg mirror membrane manufactured by PECVD
H. Bertin1, A. Bosseboeuf1, J. Moulin1, M. Pealat2, N. Roux2

1 Institut d’Electronique Fondamentale, Université Paris Sud, CNRS, Orsay Cedex, France2 Sagem, Groupe Safran, Massy, France

A 11          (PDF, 850 KB)
Development of ultra-small thin film diaphragms for pressure sensor applications

T. Süss, C. Hierold

Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, Zurich, Switzerland

A 12          (PDF, 735 KB)
Micro hot embossing and micro laser welding technologies for fluidic applications

M. Baum1, J. Besser1, B. John2, B. Keiper2, J. Hänel2, M. Wiemer1, T. Gessner1,3

1 Fraunhofer ENAS, Chemnitz, Germany

2 3D-Micromac AG, Chemnitz, Germany

3 Center for Microtechnologies at Chemnitz University of Technology, Germany

A 13          (PDF, 1,64 MB)
Full silicon-nitride probes with corner lithography wireframes for scanning hall probe microscopy
K. Hatakeyama1, E. Sarajlic2, M. H. Siekman1, R. Huijink2, L. Abelmann1

1 TST, MESA+ Research Institute, University of Twente, The Netherlands

2 SmartTip B.V., The Netherlands

A 14          (PDF, 477 KB)
Thin LTCC membranes with integrated heaters and temperature sensors

N. Gutzeit1, J. Müller1, C. Reinlein2, M. Appelfelder2, S. Gebhardt3

1 Electronics Technology Group, IMN MacroNano®, Ilmenau University of Technology,
   Germany

2 Fraunhofer Institute for Applied Optics and Precision Engineering, Jena, Germany

3 Fraunhofer Institute for Ceramic Technologies and Systems, Dresden, Germany

A 15          (PDF, 2,10 MB)
Silicon based sensors and functional components fabricated by ICP-RIE cryogenic dry etching
S. Merzsch1, J. Kähler1, H. S. Wasisto1, L. Doering2, U. Brand2, E. Peiner1, A. Waag1

1 Braunschweig University of Technology, Institute of Semiconductor Technology,
   Braunschweig, Germany

2 Physikalisch-Technische Bundesanstalt (PTB), Nano- and Micrometrology,
   Braunschweig, Germany

A 16          (PDF, 2,01 MB)
Fabrication of a Si-measurement cuvette using a new multifunctional bonding method
S. Günschmann1, M. Fischer1, T. Bley2, I. Käpplinger3, W. Brode3, H. Mannebach4, J. Müller1

1 Electronics Technology Group, IMN MacroNano®, Ilmenau University of Technology,
   Germany

2 ZeMA, Center for Mechatronics and Automation Engineering Charitable GmbH,
   Saarbrücken, Germany

3 Siegert Thinfilm Technology GmbH, Hermsdorf, Germany

4 Hydac Electronic GmbH, Saarbrücken, Germany

 
Industrial presentations

A 17          (PDF, 820 KB)
Modular micromechanical testing system
Simon Muntwyler, Felix Beyeler
FemtoTools, Zurich, Switzerland
LOT-Oriel, Darmstadt, Germany

 

Session B

Session B


Sensing and actuation applications

B 01          (PDF, 984 KB)
Static large-angle micromirror with aluminum nitride springs
S. Weinberger, Y. Cheriguen, M. Hoffmann

Micromechanical Systems Group, IMN MacroNano®, Ilmenau University of Technology, Germany

B 02          (PDF, 1,22 MB)
Design of a biaxial nanoprobe utilizing Matlab Simulink
B. Goj, M. Hoffmann

Micromechanical Systems Group, IMN MacroNano®, Ilmenau University of Technology, Germany

B 03          (PDF, 3,03 MB)
Electromagnetic changer for AFM tips
B. Goj1, N. Vorbringer-Dorozhovets2, C. Wystup1, M. Hoffmann1, E. Manske2

1 Micromechanical Systems Group, IMN MacroNano®, Ilmenau University of Technology,
   Germany

2 Measurement Systems Group, IMN MacroNano®, Ilmenau University of Technology,
   Germany

B 04          (PDF, 4,59 MB)
Gluing free assembly of an advanced 3D structure using visual servoing
S. Dembélé, N. Piat, N. Marturi, B. Tamadatze

FEMTO-ST Institute, UMR CNRS 6174 - UFC / ENSMM / UTBM Automatic Control and Micro-Mechatronic Systems Department, Besançon, France

B 05          (PDF, 865 KB)
Packaged MEMS magnetic field sensor based on magnetoelectric composites

S. Marauska1, R. Jahns2, C. Kirchhof3, M. Claus1, E. Quandt3, R. Knöchel2, B. Wagner1

1 Microsystems Technology, Fraunhofer Institute for Silicon Technology ISIT, Itzehoe,
   Germany

2 High-frequency Laboratory, Institute of Electrical Engineering,
   Christian-Albrechts-Universität, Kiel, Germany

3 Inorganic Functional Materials, Institute for Materials Science,
   Christian-Albrechts-Universität, Kiel, Germany

B 06          (PDF, 310 KB)
Flexible and transparent pyroelectric polymer sensor for light spot position detection
R. Barb, G. Buchberger, W. Hilber, B. Jakoby

Johannes Kepler University Linz, Institute of Microelectronics and Microsensors, Linz, Austria

B 07          (PDF, 1,52 MB)
Fine dust measurement with electrical fields concept for a capacitive setup
T. Geiling, S. Leopold, Y. Cheriguen, M. Hoffmann

Micromechanical Systems Group, IMN MacroNano®, Ilmenau University of Technology, Germany

B 08          (PDF, 563 KB)
Monitoring MEMS switch closure time as a measure of reliability
C. Kosla, C. Do, M. Hill

Nimbus Centre, Cork Institute of Technology, Bishopstown, Cork, Ireland

B 09          (PDF, 1,23 MB)
Design of biological sensors utilising mode-localisation in electrostatically coupled microresonators
G. S. Wood1, S. H. Pu1,2, C. Zhao1, M. Kraft1

1 University of Southampton, Nano Research Group, Highfield Campus,
   School of Electronics and Computer Science, Southampton, United Kingdom

2 University of Southampton Malaysia Campus, Nusajaya, Johor, Malaysia

B 10          (PDF, 460 KB)
Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators
C. Zhao1, G. S. Wood1, S. H. Pu1,2, M. Kraft1

1 Nano Research Group, University of Southampton, School Electronics and Computer
   Science, Highfield Campus, Southampton, United Kingdom

2 University of Southampton Malaysia Campus, Nusajaya, Johor, Malaysia

B 11          (PDF, 875 KB)
Fast video rate AFM silicon cantilever
M. Hofer, K.Gorovoy, I. W. Rangelow

Micro- and Nanoelectronic Systems Group, IMN MacroNano®, Ilmenau University of Technology, Germany

B 12          (PDF, 281 KB)
Development of a humidity micro switch based on humidity sensitive polymers

C. Bellmann1, R. Sarwar2, A. Steinke3, T. Frank3, H. F. Schlaak2, G. Gerlach1

1 Technische Universität Dresden, Laboratory of Solid-State Electronics, Dresden, Germany

2 Technische Universität Darmstadt, Laboratory of Microtechnology and Electromechanical
   Systems, Darmstadt, Germany

3 CiS research institute for microsensorical technology and photovoltaics, Erfurt, Germany

B 13          (PDF, 609 KB)
Prototype energy harvesting wheel speed sensor for anti-lock braking

D. Parthasarathy1, P. Enoksson1, R. Johansson2

1 Chalmers University of Technology, Gothenburg, Sweden

2 Volvo Group Trucks Technology, Advanced Technology and Research, Gothenburg, Sweden

B 14          (PDF, 539 KB)
Effects on imaging by tilting electrostatic actuators in electron microscopy
A. J. Been, R. Vermeer, L. A. Woldering, L. Abelmann

MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands

B 15          (PDF, 577 KB)
Closed loop operation of time-based accelerometers
R. A. Dias1, R. F. Wolffenbuttel2, E. Cretu3, L. A. Rocha1

1 Institute of Polymer and Composites, University of Minho, Campus Azurem,
   Guimarães, Portugal

2 Faculty EEMCS, Delft University of Technology, Delft, The Netherlands

3 Elect. and Comp. Eng., University of British Columbia, Vancouver, Canada

B 16          (PDF, 571 KB)
Optimization of the uniaxial nature of strain on cantilever for MOSFET sensors
Y. Wang, S. J. N Mitchell, B. M. Armstrong

School of Electronics, Electrical Engineering and Computer Science, Queen’s University Belfast, Belfast, United Kingdom

B 17          (PDF, 493 KB)
Electrically tunable diffractive optical elements and DFB lasers based on polymer-LC composites and elastomers
J. Stumpe1,2, O. Sakhno1, Y. Gritsai1, R. Rosenhauer1, S. Döring2, M. Kollosche2, G. Kofod2

1 Fraunhofer Institute for Applied Polymer Research, Golm-Potsdam, Germany

2 University of Potsdam, Institute of Physics, Potsdam, Germany

B 18          (PDF, 105 KB)
Comparing silicon deposition techniques for visible-blind detector fabrication
A. Emadi1, P. Enoksson2, J. H. Correia3, R. F. Wolffenbuttel1

1 Faculty EEMCS, Delft University of Technology, Delft, The Netherlands

2 Micro and Nanosystems, MC2, Chalmers University of Technology, Gothenburg, Sweden

3 Dept. of Industrial Electronics, University of Minho, Campus Azurem, Guimarães, Portugal

Session C

Session C


Microcomponent packaging and solutions

C 01          (PDF, 434 KB)
Reliability of thermosonic bonded palladium wires in high temperature environments up to 350 °C
W. Heiermann1, T. Geruschke1, K. Grella1, M. Bartsch2, T. Bormann1, M. Ruß1, H. Vogt1

1 Fraunhofer Institute for Microelectronic Circuits and Systems IMS, Duisburg, Germany

2 University of Duisburg - Essen, Institute of Experimental Physics and CENIDE, Duisburg,
   Germany

C 02          (PDF, 953 KB)
Successful fabrication of polymer based low voltage electrostatic actuators
N. Lange1,2, F. Wippermann1, E. Beckert1, R. Eberhardt1, A. Tünnermann1,2

1 Friedrich Schiller University of Jena, Institute of Applied Physics, Jena, Germany

2 Fraunhofer Institute for Applied Optics and Precision Engineering, Jena, Germany

C 03          (PDF, 4,78 MB)
Tungsten-siliconnitride medium for mega- to gigayear data storage
J. de Vries1, L. Abelmann1, A. Manz2, M. Elwenspoek1,2

1 MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands

2 Freiburg Institute for Advanced Studies, School of Soft Matter Research,
   Freiburg, Germany

Device and process characterization

C 04          (PDF, 223 KB)
Investigation of piezoresistive effect in p-type silicon using four point bending method
T. H. Tan1, D. W. McNeill1, P. Baine1, J. H. Montgomery1, S. J. N Mitchell1, H. Wadsworth2,
S. Strahan2, I. Bailie2

1 School of Electronics, Electrical Engineering and Computer Science,
   Queen’s University Belfast, United Kingdom

2 Schrader Electronics Ltd.

C 05          (PDF, 508 KB)
The influence of surface tension on anisotropic wet etching of silicon

A. Brockmeier1,2, F. J. Santos Rodriguez1, U. Hilleringmann2

1 Infineon Technologies Austria AG, Villach, Austria

2 University of Paderborn, Department of Electrical Engineering and Information
   Technology, Paderborn, Germany

C 06          (PDF, 688 KB)
Stress controlled piezoelectric AlN-MEMS-Resonators with molybdenum electrodes for GHz applications
H. Mehner1, K. Brueckner2, D. Karolewski3, S. Michael3, M. A. Hein2, M. Hoffmann1

1 Micromechanical Systems Group, IMN MacroNano®, Ilmenau University of Technology,
   Germany

2 RF and Microwave Research Group, IMN MacroNano®, Ilmenau University of Technology,
   Germany

3 Institute of Microelectronic and Mechatronic Systems, Ilmenau, Germany

C 07          (PDF, 1, 52 MB)
Optical and electrical characterization of in-plane modes of AlN-based piezoelectric vibrating MEMS
V. Ruiz1, T. Manzaneque1, J. Hernando-García1, A. Ababneh2, H. Seidel3, E. Vikhagen4,
J. L. Sánchez-Rojas1

1 Área de Tecnología Electrónica, Universidad de Castilla-La Mancha, Ciudad Real, Spain

2 Hijjawi Faculty for Engineering Technology, Yarmouk University, Irbid, Jordan

3 Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and
   Technology II, Saarland University, Saarbrücken, Germany

4 Optonor, Trondheim, Norway

C 08          (PDF, 408 KB)
TiO2/SiO2 optical filters based on Fabry-Perot resonators for endoscopy
M. F. Silva, C. G. Costa, L. M. Goncalve, J. H. Correia

University of Minho, Dept. Industrial Electronics, Campus Azurem, Guimaraes, Portugal

C 09          (PDF, 213 KB)
Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O3 thin film membranes
O. Sardan Sukas1, H. Yagubizade1, J. W. Berenschot1, M. J. de Boer1, M. D. Nguyen1,2,
L. Abelmann1

1 MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands

2 SolMateS BV, Enschede, The Netherlands

C 10          (PDF, 211 KB)
Structural analysis of ultrasharp silicon microneedles

C. O'Mahony

Microsystems Centre, Tyndall National Institute, University College Cork, Cork, Ireland

C 11          (PDF, 549 KB)
Low-cost uncooled infrared detector using microcantilever arrays with optical readout
M. Steffanson1, K. Gorovoy1, R. Kampmann2, R. Kleindienst2, S. Sinzinger2,
I. W. Rangelow1

1 Micro- and Nanoelectronic Systems Group, IMN MacroNano®,
   Ilmenau University of Technology, Germany

2 Technical Optic Group, IMN MacroNano®, Ilmenau University of Technology, Germany

C 12          (PDF, 3,99 MB)
Inverse kinematics of a new five degree-of-freedom spatial parallel micromanipulator
K. Kobus, G. Karpiel, D. Prusak

AGH University of Science and Technology, Department of Robotics and Mechatronics, Kraków, Poland

C 13          (PDF, 514 KB)
Impact force modelling for MEMS ohmic switch
C. Do, M. Lishchynska, M. Hill

Nimbus Centre, Cork Institute of Technology, Bishopstown, Cork, Ireland

Microfluidic components and systems

C 14          (PDF, 380 KB)
Bistable polymer micro valve with a thermo-pneumatic actuator
A. Barth, C. Gerhardy, W. K. Schomburg

RWTH Aachen University, Konstruktion und Entwicklung von Mikrosystemen (KEmikro), Aachen, Germany

C 15          (PDF, 4,73 MB)
Design and technology concept for a novel micropump coping without moving mechanical components
L. Dittrich, C. Endrödy, M. Hoffmann

Micromechanical Systems Group, IMN MacroNano®, Ilmenau University of Technology, Germany

C 16          (PDF, 446 KB)
Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry
M. Wirtssohn1, L. Sainiemi2, M. Haapala2, S. Franssila1

1 Department of Materials Science and Engineering, Aalto University, Finland

2 Division of Pharmaceutical Chemistry, University of Helsinki, Finland

C 17          (PDF, 403 KB)
A novel temperature control method for shortening thermal cycling time to achieve rapid polymerase chain reaction (PCR) in a disposable polymer microfluidic device
M. Bu1,2, I. R. Perch-Nielsen2, K. S. Sørensen1,2, J. Skov2, Y. Sun1, D. D. Bang3,
M. E. Pedersen2, M. F. Hansen1, A. Wolff1

1 Technical University of Denmark, DTU Nanotech, Kgs. Lyngby, Denmark

2 DELTA, Hørsholm, Denmark

3 Technical University of Denmark, National Food Institute, Søborg, Denmark

C 18          (PDF, 703 KB)
Electrochemically etched porous silicon membrane with precisely sized micropores for contaminant filtration
A. A. Hamzah, H. E. Zainal Abidin, J. Yunas, C. F. Dee, B. Y. Majlis

Universiti Kebangsaan Malaysia, Institute of Microengineering and Nanoelectronics (IMEN), Bangi, Selangor, Malaysia

C 19          (PDF, 2,91 MB)
Electrospray deposition from fountain pen AFM probes
J. Geerlings1, E. Sarajlic1,2, J. W. Berenschot1, L. Abelmann1, N. R. Tas1

1 MESA+ Research Institute, University of Twente, Enschede, The Netherlands

2 SmartTip B.V., Enschede, The Netherlands

 

Session D

Session D


Design and simulation tools

D 01          (PDF, 213 KB)
Concept and simulation of a fluidic particle transporter with pneumatic actuation
A. Rockenbach1, C. Brücker2, U. Schnakenberg1

1 RWTH Aachen University, Institute of Materials in Electrical Engineering 1,
   Aachen, Germany

2 TU Bergakademie Freiberg, Institute for Mechanics and Fluid Dynamics,
   Freiberg, Germany

D 02          (PDF, 638 KB)
Comsol models of two different microphones membrane with a piezoresistive sensing element

L. Petricca1, P. Ohlckers1, D. Wang2

1 Vestfold University College; IMST, Borre, Norway

2 Sintef, Oslo, Norway

D 03          (PDF, 301 KB)
Analytical electromechanical model for CMUTs with multi-layered, non-uniform-thickness diaphragm
P. Pursula1,2, J. Saarilahti1, O. Paul2, V. Viikari1

1 VTT Technical Research Centre of Finland, Espoo, Finland

2 IMTEK Department of Microsystems Engineering, University of Freiburg,
   Freiburg, Germany

D 04          (PDF, 708 KB)
Determination of influence coefficients to calculate the thermal expansion of ball screws for instationary loads
J. Edler

Graz University of Technology, Institute of Production Engineering, Graz, Austria

D 05          (PDF, 567 KB)
Influence of the nonlinearity introduced by the van der Waals force on the behaviour of NEM resonators

M. Zanaty1,2,3, R. Jansen2, V. Rochus2, M. Abbas3, A. Witvrouw2, H. A. C. Tilmans2,
X. Rottenberg2

1 KACST-Intel Consortium Center of Excellence in Nano-manufacturing Applications (CENA),
   Riyadh, KSA

2 IMEC v.z.w., Leuven, Belgium

3 Department of Electrical Engineering, Faculty of Engineering, Assiut University, Egypt

D 06          (PDF, 263 KB)
New modelling approach for micro energy harvesting systems based on model order reduction enabling truly system-level simulation
T. Aftab1, D. Hohlfeld2, E. B. Rudnyi3, T. Bechtold3, J. G. Korvink1

1 Freiburg University, Institute for Microsystems Engineering, Freiburg, Germany

2 Reutlingen University, Reutlingen, Germany

3 CADFEM GmbH, Grafing, Germany

D 07          (PDF, 131 KB)
Thermal analysis methods for automated design of composite materials in Termet software
I. Farmaga, O. Matviykiv, M. Lobur, P. Shmigelskyi

Lviv Polytechnic National University, CAD Department, Lviv, Ukraine

D 08          (PDF, 1,3 MB)
Simulation, development and characterization of platinum microheater on polyimide membrane
M. Predanocy1, I. Hotovy1, I. Kosc1, V. Rehacek1, I. Kostic2, L. Spiess3

1 Slovak University of Technology, Faculty of Electrical Engineering and Information
   Technology, Bratislava, Slovakia

2 Institute of Informatics, Slovak Academy of Sciences, Bratislava, Slovakia

3 Materials of Electronics Group, IMN MacroNano®, Ilmenau University of Technology,
   Germany

BioMEMS

D 09          (PDF, 2,1 MB)
Bio instrument for determining the viability of cells on the basis of the impedance measurement
A. Rösner, T. Frank, I. Tobehn, A. Steinke 

CiS research institute for microsensorical technology and photovoltaics, Erfurt, Germany

D 10          (PDF, 514 KB)
Risk enhancement by caffeine-consumption: drug-caffeine interference detected by microcombinatorial screenings using micro fluid segment technique
J. Cao1, J. Goldhan1, S. Schneider1, K. Martin2, J. M. Köhler1

1 Dept. Physical Chemistry and Micro Reaction Technology, Institute for Chemistry and
   Biotechnology, Ilmenau University of Technology, Germany

2 Hans Knöll Institute for Natural Products Research, Department Bio Pilot Plant,
   Jena, Germany

D 11          (PDF, 178 KB)
Study of population dynamics of E. Coli in a microfluidic landscape incorporating a toxic gradient
K. Kolari1, D. Mojzita1, I. Stuns1, M. Penttilä1, K. Hjort1,2

1 VTT Technical Research Centre of Finland, Espoo, Finland

2 Microsystem Technology, Engineering Sciences, Uppsala University, Uppsala, Sweden

D 12          (PDF, 275 KB)
Study on cellar behaviors on different micro/nano structures of anodic aluminum oxide template
Y. K. Shen1,2, H. M. Hsiao3, W. J. Chen3

1 School of Dental Technology, Collage of Oral Medicine, Taipei Medical University, Taipei,
   Taiwan, R.O.C.

2 Center for Biomedical Microdevice, Taipei Medical University, Taipei, Taiwan, R.O.C.

3 Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, R.O.C

D 13          (PDF, 2,7 MB)
New ways of measuring pull-in voltage and transient behavior of parallel-plate capacitive MEMS transducers
C. Glacer1,2, A. Dehé2, M. Nawaz2, R. Laur1

1 Institute for Electromagnetic Theory and Microelectronics (ITEM), University of Bremen,
   Bremen, Germany

2 Infineon Technologies AG, Neubiberg/Munich, Germany

Micro-Nano integration

D 14          (PDF, 383 KB)
S
ynthesis of ZnO nanoflowers and their wettabilities and photocatalytic properties
X. D. Guo1, L. E. Heleseth1, Q. Z. Zhao2

1 Department of Physics and Technology, University of Bergen, Bergen, Norway

2 State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics
   and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China

D 15          (PDF, 643 KB)
Contact mechanics and needle like surfaces for micro-nano integration

S. Keshavarzi1,2, U. Mescheder2, H. Reinecke1, A. Kovacs2

1 University of Freiburg, IMTEK, Freiburg, Germany

2 Hochschule Furtwangen University, IAF, Furtwangen, Germany

D 16          (PDF, 431 KB)
In-situ grown of nanostructured zinc oxide layer for conductometric gas microsensors
J. Gonzalez-Chavarri, I. Castro-Hurtado, G. G. Mandayo, E. Castaño

Ceit and Tecnun, San Sebastián, Spain

Materials

D 17          (PDF, 848 KB)
Patterned array of nanoporous silicon
D. Wang1, S. Schönherr2, C. Ronning2, P. Schaaf1

1 Materials of Electronics Group, IMN MacroNano®, Ilmenau University of Technology,
   Germany

2 Institute for Solid State Physics, Friedrich-Schiller-University Jena, Jena, Germany

D 18          (PDF, 490 KB)
Future electrode materials for supercapacitors in intelligent wireless sensor system
H. Staaf, P. Enoksson, P. Lundgren 

Chalmers University of Technology, Gothenburg, Sweden

System integration of MEMS, NEMS, RF-MEMS and MOEMS

D 19          (PDF, 3,6 MB)
Contactless pin-flange adapter for high-frequency measurements
S. Rahiminejad1, E. Pucci2, S. Haasl3, P. Enoksson1

1 Chalmers University of Technology, Department of Microtechnology and Nanoscience,
   Gothenburg, Sweden

2 Chalmers University of Technology, Department of Signals and Systems,
   Gothenburg, Sweden

3 Royal Institute of Technology, Stockholm, Sweden

D 20          (PDF, 760 KB)
Monolithic integration of MOEMS on CMOS backplanes using surface micromachining techniques
M. List, M. Friedrichs, M. Müller

Fraunhofer Institut für Photonische Mikrosysteme IPMS, Dresden, Germany