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Institute of Micro- and Nanotechnologies



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Contact Person

Prof. Dr. Jens Müller

Phone +49 3677 69-3402

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INHALTE

Technology center

Members of the IMN MacroNano® as well as external users are benefiting from a total of more than 1800m² of modern and appropriately equipped laboratory space (used as clean rooms and powder controlled specialized laboratories) within the two technology buildings Meitner-building and Feynman-building of the Center of Micro- and Nanotechnologies, a central institution of the university.

Clean room:

  • 50m² clean room class 5 (according to DIN EN ISO 14644)
  • 250m² clean room class 6 (according to DIN EN ISO 14644)
  • 880m² clean room class 7 (according to DIN EN ISO 14644)

 Powder controlled specialized laboratories: 

  • Biological laboratorieswith protection class 1
  • Analytical laboratories (partially fault minimized)
  • Laboratories for laser- and ultra high precision processing
  • Laboratories for printed circuit board manufacture and electrochemical processes