http://www.tu-ilmenau.de

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Contact Person

Prof. Dr. Stefan Sinzinger

director of the institute

Phone +49 3677 69-3402

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INHALTE

Labs Feynmanbau


Polymer Electronics Lab


Layer Measurement Lab


Optical and E-Beam Lithography Lab
 Lab for Wet Chemical Processes
PVD/RIE Lab

 Lab for High Temperature Processes

Assembly- and Packaging Technologies Lab I

 Electrical Characterisation Lab

MBE and Surface Analytic Lab

Lab for Analytics of the Solid State

Backend Technology Lab

Lab for Ultra Precision Processing