Logo TU Ilmenau

Photo of the Contact Person
Contact Person

Prof. Dr. Stefan Sinzinger

director of the institute

Phone +49 3677 69-3402

Send email

You are here


Labs Feynmanbau

Polymer Electronics Lab

Layer Measurement Lab

Optical and E-Beam Lithography Lab
 Lab for Wet Chemical Processes

 Lab for High Temperature Processes

Assembly- and Packaging Technologies Lab I

 Electrical Characterisation Lab

MBE and Surface Analytic Lab

Lab for Analytics of the Solid State

Backend Technology Lab

Lab for Ultra Precision Processing