http://www.tu-ilmenau.de

Logo TU Ilmenau


You are here

INHALTE

Micromechanical Systems Group

Our main fields of interest are the development, manufacturing and characterization of micro-electro-mechanical systems (MEMS). Currently, we focus on applications for optical microsystems (including integrated optics and MOEMS), MEMS for life sciences (implatable sensors) and for energy-efficient systems (energy harvesting as well as ultra-low-power sensors).

Besides silicon-based MEMS technologies we investigate the integration of nanostructures into microsystems (micro-nano-integration), especially nanograss made of silicon or AlN by additive or subtractive technologies and nanocrystalline AlN thin films for mechanical applications.

We closely cooperate with other Chairs within the Institute of Micro- and Nanotechnologies (IMN MacroNano®), especially in joint research projects with industrial and external research partners. The Chair for Micromechanical Systems is also responsible for the major part of the Si-based infrastructure of the Center of Micro- and Nanotechnologies (ZMN).