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Micromechanical Sensors

Team Leader: Dr. rer. nat. Jens-Peter Zöllner

The reseach group is dealing with the development and investigation of remote sensing flow measurement systems based on microelectronic and mechanical multifunctional sensors with gas type recognition.
Project EMSiG

Development of a microresonator for the detection of force effects using combined static and dynamic measurements

Goal of the project:

Development and construction of a remote queried system for flow measurement of gases with gas type recognition. The TU Ilmenau develops the MEMS-based sensor. The results of the project create the conditions for the project partners to develop and sell innovative measuring devices, which in particular allow gas type-dependent flow measurement with intelligent sensors. These devices can be used in the laboratory as well as in industrial plants