Prof. Dr.-Ing. Steffen Strehle
Head of Group
Microsystems Technology Group
Am Helmholtzring 12 (Werner-Bischoff-Bau room 3110)
98693 Ilmenau
Phone: +49 3677 69-2485
Fax: +49 3677 69-1801
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Weigert F, Wolf M, Theska R (2022). „Model-based determination of the reproducibility of kinematic couplings”, Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology / European Society for Precision Engineering and Nanotechnology International Conference & Exhibition 22. 2022 Genf. - Bedford, UK : euspen, 2022, S. 87-90
Mathew S, Narasimha S, Reiprich J, Scheler T, Hähnlein B, Thiele S, Stauffenberg J, Kurtash V, Abedin S, Manske E, Jacobs H O, Pezoldt J (2022). “Formation and Characterization of Three-Dimensional Tetrahedral MoS2 Thin Films by Chemical Vapor Deposition”,Crystal Growth & Design, https://doi.org/10.1021/acs.cgd.2c00333
StauffenbergJ, Ortlepp I, Belkner J, Dontsov D, Langlotz E, Hesse S, Rangelow I W, Manske E (2022). „Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm”, Appl. Sci. 2022, 12, 7843, https://doi.org/10.3390/app12157843
Reuter C, Strehle S (2022). „Resistless Nanopatterning of 2D Materials by Field Electron Emission Scanning Probe Lithography“ Graphene 2022, Aachen, 04.07.-08.07.2022
Leineweber J, Meyer C, Füßl R, Theska R, Manske E (2022). “Ein neuartiges Konzept für 5D Nanopositionier-, Nanomess-,und Nanofabrikationsmaschinen”, tm – Technisches Messen 2022
Huaman A S, Gorges S, Katzschmann M, Hesse S, Fröhlich T, Manske E (2022). "Investigations on the tracking control and performance of a long stroke vertical nanopositioning drive", 22nd euspen International Conference, Geneva, CH, 30.05.-03.06.2022
Hebenstreit R, Wedrich K, Strehle S, Manske E, Theska R (2022). “First prototype of a positioning device with subatomic resolution”, euspen 22nd international conference and exhibition, Geneva, 30.05.-03.06.22, S.97-100. ISBN: 978-1-9989991-1-8
Wittke M, Wolf M, Darnieder M, Weigert F, Gerlach E, Zimmermann K, Theska R (2022).” Investigations on a torque-compensating adjustment drive for mechanically sensitive devices.”. Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology (euspen), May 30th – June 3rd 2022. Genf, Schweiz, ISBN: 978-1-9989991-1-8
Wittke M, Torres Melgarejo M, Theska R (2022). „Concept of a monolithic stiffness-compensated mechanism for high-resolution force sensors”, 21. IGT/GMA Fachtagung Sensoren und Messsysteme, Nürnberg, 10.05.-11.05.22, S.461-464. ISBN: 978-3-8007-5835-7
Ortlepp I, Stauffenberg J, Krötschl A, Dontsov D, Zöllner J-P, Hesse S, Reuter C, Strehle S, Fröhlich T, Rangelow I W, Manske E (2022). "Nanofabrication and -metrology by using the nanofabrication machine (NFM-100)", Proc. SPIE 12054, Novel Patterning Technologies 2022, 120540A (25 May 2022); https://doi.org/10.1117/12.2615118
Belkner J, Stauffenberg J, Häcker A-V, Ortlepp I, Manske E (2022). „Amplituden- und Phasenmodulation in der Lock-In gefilterten differentiellen konfokalen Profilometrie“, ITG-Fb. 303: Sensoren und Messsysteme / VDE Verlag. - Neuerscheinung. - Berlin : VDE VERLAG, S. 235-244
Seminario R, Schmitt C, Weise C, Reger J (2022). "Control of an Overactuated Nanopositioning System with Hysteresis by Means of Control Allocation," 2022 IEEE 17th International Conference on Advanced Motion Control (AMC), 2022, pp. 280-287, doi: 10.1109/AMC51637.2022.9729294
Poroskun I, Rothleitner C, Heißelmann D (2022). „Structure of digital metrological twins as software for uncertainty estimation”, J. Sens. Sens. Syst., 11, 75–82, doi.org/10.5194/jsss-11-75-2022
Hofmann M, Weidenfeller L, Supreeti S, Mechold S, Holz M, Reuter C, Sinzinger S, Manske E, Rangelow I.W.; “Mix-and-match lithography and cryogenic etching for NIL template fabrication”, Microelectronic Engineering, Volume 224, 111234 (2020) https://doi.org/10.1016/j.mee.2020.111234
Ortlepp I, Kühnel M, Hofmann, M, Weidenfeller, L, Kirchner, J, Supreeti, S, Mastylo, R, Holz, M, Michels T, Füßl, R, Rangelow,I, Fröhlich, T, Donstov, D, Schäffel C, Manske, E, “Tip- and Laser based nanofabrication up to 100 mm with sub-nanometer precision” in SPIE Advanced Lithography 2020, San Jose, USA (24th-27th February 2020) https://doi.org/10.1117/12.2551044
Fern F; Füßl R; Eichfelder G; Manske E; Kühnel M: "Coordinate transformation and its uncertainty under consideration of a non orthogonal coordinate base" In: Measurement Science and Technology, 2020 https://doi.org/10.1088/1361-6501/aba3f5
Nilsen M, Dannberg O, Fröhlich T, Strehle S: "Direct polymer microcantilever fabrication from free-standing dry film photoresists" In: J. Micromech. Microeng.30 (2020) 095012 https://doi.org/10.1088/1361-6439/ab9e4c
Fischer D, Sinzinger S: "Evaluation of quadratic phase hologram calculation algorithms in the Fourier regime" Appl. Opt. 59, pp. 1501–1506 (2020). https://doi.org/10.1364/AO.381547
Kapp D, Weise C, Ruderman M, and Reger J: "Fractional-Order System Identification of Viscoelastic Behavior: A Frequency Domain Based Experimental Study", In Advanced Motion Control, 2020, DOI: 10.1109/AMC44022.2020.9244449