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Prof. Ivo W. Rangelow

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INHALTE

Micro and nano manufacturing

The department of Univ.-Prof. Dr.-Ing. habil. Ivo W. Rangelow develops  techniques for micro and nano structuring of surfaces by controlled and regular lithographic pattern generation and controlled plasma or wet chemical etching. Optical and e-beam based lithographic techniques are evaluated and enhanced at the Center for Micro- and Nanotechnologies (ZMN) (Zentrum für Mikro- und Nanotechnologie) of the Ilmenau university of technology (Technische Universität Ilmenau).

In close cooperation with Thuringian companies these technologies are intensively developed and market potentials are scanned.

Thuringian companies can benefit from future nanostructure technologies if innovation analysis, technology reviews, roadmaps and market studies go hand I hand with science and young academics in frame of interdisciplinary research projects.

A number of applications stems from the fact that the nanostructures manufactured in the clean room have unique properties and facilitate to form the future of nano technology.

Translation: B. Volland
Please report mistakes to: Burkhard.Volland@Tu-Ilmenau.de