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INHALTE

Teaching

Electronics (3 SWS)

This introduction lecture deals with analog electronics, which stands at the beginning of measuring and data recording and the implementation of first and simple electronic circuits. Main basic electronic laws are as well included as most important electronic devices and basic circuits. The understanding of the function of the devices and their basic circuits is explained more or less physically.
The aim of the lecture is, to introduce the world of electronics to the students, to teach them better understanding of functions and applications of electronics and to enable them the design of simple electronic circuits (such as amplifiers) with passive (resistors, capacitors and coils) and semiconductor electronic devices (diodes, transistors, FET’s).

Micro- and nano analytics

The analysis of nanostructures with decreasing size incorporates compositional, structural, morphological, electronic and optical analysis. For that purpose, usually the sample is irradiated with energetic irradiation or is mechanically scanned. In their application on nanostructures, most of the analytical methods reach their limits. Only the combination of different analysis methods often supplies sufficient results. The understanding of the analytical methods, their properties, their advantages and disadvantages and their special parameters is the basis for the understanding and the critical evaluation of analysis results and, not least, for optimal use of analysis methods in micro- and nanotechnology.  The lecture teaches the most important methods applied in micro- and nanotechnology, their physical principles and basics, their possibilities and limits. Much importance is attached to practical relevance.

Vacuumtechnology in semiconductur industries

Engineers are faced with vacuum technology in many fields of production. For lots of technological processes analytical methods vacuum technique is definitely essential. Especially for the new technological processes in micro- and nanotechnology the importance of vacuum and vacuum technique is growing. The knowledge of the physical principles and the application specific knowledge about vacuum pumping, vacuum measurement, vacuum materials and vacuum construction enables the students, to solve vacuum relevant problems in their jobs. The lecture teaches all vacuum ranges down to ultra high vacuum and the operation of vacuum equipment, as well. Additionally to the lecture, a seminar is provided.

Content:
1. Physical basics of vacuum technique
2. Vacuum pumping
3. Vacuum measurement
4. Vacuum devices/ parts
5. materials and construction principles in vacuum technology

Practical course on micro- and nanotechnology

The aim of this practical course is, that students get to know the main technological steps in the manufacturing of electronic and sensor devices based on silicon and organic materials. They should get an insight into technological equipment, measuring technique and the main principles of operation in semiconductor technology. In the main technological steps in that practical course a micromechanical pressure sensor on the basis of a Si membrane will be produced and characterized. Students can learn the influence of technological processing parameters on device properties. The following technological methods are included in this practical course:
1.  Oxidation
2.  Ellipsometry
3.  Electrical  contacts
4.  Spin Coating
5.  Electrical characterization
6.  Vacuum pumps
7.  Vacuum measurement
8.  Wafer cleaning
9.  Sputtering
10.Plasmaetching