Large-scale research unit Multi-chamber sputtering unit

Contact person

Prof. Martin Ziegler
Micro- and Nanoelectronic Systems

Phone: +49 3677 69-3711
e-mail: martin.ziegler@tu-ilmenau.de

Funding information

Project leader: Deutsche Forschungsgemeinschaft 

Project number: INST 273/95-1 FUGG

Participating groups: Micro- and Nanoelectronic Systems

Period of funding: 06.12.2019 - 01.12.2023

It is a powerful PVD system for research and pilot productions with 5 independent vacuum chambers. The system is to be suitable for the deposition of various magnetic and non-magnetic materials, as well as for rough sputtering processes of oxide and nitride layers.