In the sub-project, tools and methods for the model-based design and metrological characterisation of active cantilevers with multifunctional tips are developed, which enable highly sensitive and reproducible electromechanical and optical readout with the cantilevers. This is done for the different measurement modes in the SPM. Furthermore, TUI comprehensively characterises the new cantilever technology. In detail, this results in several sub-goals. For example, the development of analysis and design models for the quantitative design and optimisation of the new active cantilevers with multifunctional tips for highly sensitive and reproducible selection; elaboration of the relationship between the design variables, the manufacturing tolerances and the parameters/characteristics of the new active cantilevers through simulation; the elaboration of a model-based design procedure and designs of new cantilevers as well as a comprehensive experimental characterisation and test of the new cantilevers and quantitative verification of the models as design tools for the new cantilevers. Compared to the state of the art in science and technology, the solution approach of active cantilevers with multifunctional tips in production-ready manufacturing results in novelties for their model-based design and characterisation. The holistic modelling of active cantilevers with multifunctional tips, which depicts the mechanical, electrothermomechanical and piezoresistive behaviour. The discovery of the correlation between the design variables, the manufacturing tolerances and the target variables of the new active cantilevers with the previously developed parameterised models through simulations. The model-based design of the new cantilevers in terms of a parameterised design model with a step-by-step design workflow.
