New metrological basis of highest precision

Contact person

Prof. Eberhard Manske
Production and Precision Measurement Technology

Phone: +49 3677 69-1250 or 69-5050


Funding information

Project leader: Carl Zeiss Stiftung

Project number: 0563-2.8/643/2

Participating groups: Production and Precision Measurement Technology, Process Measurement Technology Group

Period of funding: 01.01.2017 - 31.12.2020

Project information

The aim of the project is in particular to create a new metrological basis in order to raise research in the proven field of nanopositioning and nanometrology machines to a qualitatively new level. For this purpose, the frequency comb technology is to be established as a new key component at the TU Ilmenau and synergistically combined with the high level of nanopositioning and nanometrology in order to be able to continue research at a higher level in the long term.