Combinatorial high-throughput in situ nano-diagnostics for sensing (high-throughput in situ scanning electron microscope - SEM)

Contact person

Prof. Peter Schaaf
Group of Materials for Electricial Engineering and Electronics

Phone: +49 3677 69-3611
e-mail: peter.schaaf@tu-ilmenau.de

Funding information

Project leader: Thüringer Aufbaubank (TAB)

Project number: 2021 FGI 0033

Participating groups: Group of Materials for Electrical Engineering and Electronics

Period of funding: 01.09.2021 - 30.06.2023


"KombiSens" aims at advanced in situ diagnostics of sensor materials in the micro- and nanometer range. The setup of a situ diagnostics in the electron microscope is to be extended by a localized and spatially resolved gas feed and corresponding sensory measurement technology. Thus, a high sample throughput and combinatorial investigation methods for the rapid development of novel material systems can be enabled and digitalization and machine learning can also be advanced into sensor technology and a technological leading position can be achieved.