Growth core HIPS-VP1: Research into a multifunctional substrate technology for high-performance sensors - TP10: Development of SiCer base technologies for high-performance sensor applications


Contact person

Prof. Jens Müller
Electronics Technology Group

Phone: +49 3677 69-2606

Funding information

Project leader:Projektträger Jülich (PTJ)

Project number:03WKDG01J

Participating groups: Electronics Technology Group

Period of funding:01.09.2019 - 31.08.2022

Project information

The subproject includes the research, further development and evaluation of the SiCer platform in joint project 1 with the aim of opening up new materials and functional elements for high-performance sensor applications and raising the processes required for this, which up to now have only had a very low level of technological maturity, to a level with which the implementation strategy of the industrial joint project partners can be fulfilled after the funding phase has expired. Within the consortium, TU Ilmenau has the greatest wealth of experience in the SiCer composite technology and will play a decisive role in driving forward the technology transfer to the substrate technology partners Via electronic GmbH and Micro-Hybrid Electronic GmbH (LTCC) as well as CiS GmbH and 5microns GmbH (SI-MEMS processing). In addition, the TU Ilmenau plays a central role in the further development of SiCer processes due to its preliminary work. The work and sub-work packages span all levels of the VP1 project structure starting with the material technology up to the demonstrator elements.