SiCer Messaufnehmer

SiCer-based sensors for applications in gas sensor technology

 

Contact person

Prof. Steffen Strehle
Microsystems Technology Group

Phone: +49 3677 69-2487
e-mail:steffen.strehle@tu-ilmenau.de

Funding information

Project leader:Projektträger Jülich (PTJ)

Project number:03WKDG03E

Participating groups:Microsystems Technology Group

Period of funding:01.09.2019 - 31.08.2022

Project information

The subproject includes the development, technological implementation and evaluation of SiCer-based sensor elements for gas sensor technology. In concrete terms, three prototypical applications for a structure in the composite substrate technology SiCer are to be implemented first separately from each other and then combined in a demonstrator. The challenge in the joint project is based on the strongly differing specifics of the individual prototypical applications infrared sensor, pressure sensor and temperature sensor. In the technological implementation of the sensor element, different processes and process sequences have to be applied, which may influence each other or in extreme cases could exclude each other (e.g. high temperature processes, which allow piezoelectric strain sensors to drift away by diffusion). 
Due to its preliminary work, TU Ilmenau plays a central role in the technological implementation of sensor elements based on SiCer processes. Based on the specifications developed by the industrial partners, TU Ilmenau works in work packages, each of which is SiCer-based (focus: sensor elements). Aspects of electronic Beschlatung are covered by the partners in the consortium.