Nanoscale electron beam-induced vapour deposition with scanning probes for highly localised 3D material deposition


Contact person

Prof. Steffen Strehle
Microsystems Technology Group

Phone: +49 3677 69-2487
e-mail: steffen.strehle@tu-ilmenau.de


Funding information

Project leader: Deutsche Forschungsgemeinschaft

Project number: STR 1119/16-1

Participating groups: Mircrosystems Technology Group

Period of funding: 01.01.2023 - 31.12.2025

Project information

High-performance structuring processes for the precise generation of functional 3D nanostructures are of fundamental importance for the fabrication of novel micro- and nanosensors, all the way to the realization of the second quantum revolution. In the research project, the fundamental mechanisms of a scanning probe-based electron beam induced 3D vapor phase material deposition as well as the associated technological requirements and limitations will be elucidated. The aim is to evaluate the potential of this technology for 3D nanomaterial synthesis and the construction of nanoelectromechanical systems, as well as to discuss its future implementation and further development. Based on experiments on local 3D deposition of carbon nanostructures, the fundamental influencing parameters relevant for a controlled and reproducible 3D deposition will be identified and explored.