Conference contributions

Anzahl der Treffer: 2031
Erstellt: Wed, 27 Mar 2024 23:07:04 +0100 in 0.0542 sec


Ortlepp, Ingo; Kühnel, Michael; Hofmann, Martin; Mohr-Weidenfeller, Laura; Kirchner, Johannes; Supreeti, Shraddha; Mastylo, Rostyslav; Holz, Mathias; Michels, Thomas; Füßl, Roland; Rangelow, Ivo W.; Fröhlich, Thomas; Dontsov, Denis; Schäffel, Christoph; Manske, Eberhard
Tip- and laser-based nanofabrication up to 100 mm with sub-nanometre precision. - In: Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, (2020), S. 113240A-1-113240A-17

Although the field of optical lithography is highly investigated and numerous improvements are made, structure sizes smaller than 20 nm can only be achieved by considerable effort when using conventional technology. To cover the upcoming tasks in future lithography, enormous exertion is put into the development of alternative fabrication technologies in particular for micro- and nanotechnologies that are capable of measuring and patterning at the atomic scale in growing operating areas of several hundred square millimetres. Many new technologies resulted in this process, and are promising to overcome the current limitations^1, 2, but most of them are demonstrated in small areas of several square micrometers only, using state-of-the-art piezo stages or the like. At the Technische Universitat Ilmenau, the NanoFabrication Machine 100 (NFM-100) was developed, which serves as an important experimental platform for basic research in the field of scale-spanning AFM tip-based and laser-based nanomeasuring and nanofabrication for simultaneous subnanometre measuring and structuring on surfaces up to Ø100 mm. This machine can be equipped with several probing systems like AFM, laser focus probes and 3D-micro probes as well as tools for different nanofabrication technologies like tip-based technologies, optical technologies and mechanical two-dimensional technologies in a large working range with subnanometre reproducibility and uncertainty. In this paper, the specifics and advantages of the NFM-100 will be described as well as nanofabrication technologies that are currently worked on e.g. advanced scanning proximal probe lithography based on Fowler-Nordheim-electron-field emission, direct laser writing and UV-nanoimprint lithography.



https://doi.org/10.1117/12.2551044
Eliseyev, Ilya A.; Smirnov, Alexander N.; Lebedev, Sergey P.; Panteleev, V. N.; Dementev, Peter A.; Pezoldt, Jörg; Hartung, Gerd; Kröger, Jörg; Zubov, Alexander V.; Lebedev, Alexander A.
Transformation of the buffer layer grown on 4H-SiC to single-layer graphene by ex situ hydrogen intercalation. - In: Fullerenes, nanotubes & carbon nanostructures, ISSN 1536-4046, Bd. 28 (2020), 4, S. 316-320

https://doi.org/10.1080/1536383X.2019.1708733
Biermann, Steffen; Magi, André; Sachse, Patrick; Hoffmann, Martin; Wedrich, Karin; Müller, Lutz; Koppert, Ralf; Ortlepp, Thomas; Baldauf, Julia
Advanced broadband MEMS infrared emitter based on high-temperature-resistant nanostructured surfaces and packaging solutions for harsh environments. - In: Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIII, (2020), S. 1127908-1-1127908-15

https://doi.org/10.1117/12.2545119
Liborius, Lisa; Bieniek, Jan; Nägelein, Andreas; Tegude, Franz-Josef; Prost, Werner; Hannappel, Thomas; Poloczek, Artur Christoph; Weimann, Nils
n-doped InGaP nanowire shells in GaAs/InGaP core-shell p-n junctions. - In: Physica status solidi, ISSN 1521-3951, Bd. 257 (2020), 2, 1900358, insges. 9 S.

https://doi.org/10.1002/pssb.201900358
Sevillano-Bendezú, Miguel Ángel; Dulanto, Jorge A.; Conde, L.A.; Grieseler, Rolf; Guerra, Jorge A.; Töfflinger, Jan Amaru
Capacitance voltage curve simulations for different passivation parameters of dielectric layers on silicon. - In: Peruvian Workshop on Solar Energy (JOPES 2019), (2020), 012007, S. 1-8

https://doi.org/10.1088/1742-6596/1433/1/012007
Nagel, Henning; Issa, Esmail; Nagel, Timo; Glatthaar, Markus; Glunz, Stefan
Hydrosilane-free low-cost APCVD of SiO2 films for crystalline Si solar cell applications. - In: 36th European Photovoltaic Solar Energy Conference and Exhibition, (2019), S. 419-422

Groß, Philipp; Ihlow, Alexander; Böttcher, René; Bessert, Steffen; Pandey, Rick; Kirchhof, Jan; Krieg, Fabian; Römer, Florian; Osman, Ahmad; Del Galdo, Giovanni
Ein portabler, vielfältig einsetzbarer 3D-Positionierer für Synthetik-Apertur-Ultraschallmessungen in der ZfP. - In: DACH-Jahrestagung 2019, (2019), insges. 2 S.
Paper P41

Ispas, Adriana; Schlag, Leslie; Eggert, Lara; Böttcher, René; Bund, Andreas; Jacobs, Heiko O.
Electrodeposition of aluminium-nickel films in 1-butyl-1-methylpyrrolidinium-bis(trifluoromethylsulfonyl) amide. - In: Meeting abstracts, ISSN 2151-2043, Bd. MA2019-02 (2019), 17, 963

https://doi.org/10.1149/MA2019-02/17/963
Schwarz, Felix; Bohm, Sebastian; Runge, Erich; Wang, Dong; Schaaf, Peter; Zhong, Jinhui; Yi, Juemin; Lienau, Christoph
Natural cavities with huge Purcell factors in gold nano sponges. - In: Quantum science and information technologies, (2019), FM 85.8

Issa, Esmail; Nagel, Henning; Guzik, Lukasz; Javanbakht, Hamed; Coron, Eddy; Rädlein, Edda; Glatthaar, Markus; Glunz, Stefan
Plated front side metallization on transparent conducting oxide utilizing low-cost APCVD SiO2 insulating layer. - In: 36th European Photovoltaic Solar Energy Conference and Exhibition, (2019), S. 431-435