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Prof. Dr. Erich Runge
Head of the Institute of Physics
Dagmar Böhme
Phone: +49 (0) 3677 / 69 37 06
Room: Curiebau, room 320
Visiting address: Weimarer Strasse 25, 98693 Ilmenau
How to find us: Directions and site plan
Lecture and tutorial in physics 1 and physics 2
Information under teaching group physics for engineers
Lectures (substitution of single lectures):
Mechanics and Thermodynamics, Fundamentals of Electronics, Semiconductor Technology, Nanotechnology.
Melanie Schiemer: Herstellung und Charakterisierung gesputterter ScxAl1-xN-Schichten für Anwendungen in der Magnetfeldsensorik
(Thesis for M.sc. Biomedical Engineering, 2019)
Konrad Jaekel: Strukturierung von MEMS auf ScxAl1-xN-Basis mit Hilfe von plasma-basierten Trockenätzprozessen für Anwendungen in der Magnetfeldsensorik
(Thesis for M.sc. Biomedical Engineering, 2019)
Sascha Kürth: Untersuchung von ScxAl1-xN-Schichten mit Hilfe der Spektralellipsometrie
(Thesis for B.sc. Technical Physics, 2019)
Tim Hofmann: Spektroskopische Charakterisierung von ScxAl1-xN -Schichten
(Thesis for B.sc. Technical Physics, 2019)
Max Heinemann: Untersuchung des Schwingverhaltens von AlN-Ni Resonatoren
(Thesis for B.sc. Technical Physics 2018)
Theresa Scheler: Herstellung und Charakterisierung gesputterter TbFe2-Schichten für die Anwendung in der Magnetfeldsensorik
(Project in Master WSW, defended on May 16, 2018)
Ouro-Salim Abdou-Moumouni: P-typ Kontaktierung von Gruppe III-Nitriden
(Thesis for Master of Electrical and Computer Engineering, 2012)
Weihong Zhao: Morphologische Charakterisierung von SiO2-basierten Antikorrosionsschichten
(Diploma, 2011)
Christopher Maus: Titannitrid als metallfreie Kontaktierung eines zweidimensionalen Elektronengases in AlGaN/GaN-Heterostrukturen
(Master of Science (M. Sc.) Technical Physics, 2011)
Stephan Maroldt: Charakterisierung und Optimierung von AlGaN/GaN-Heterostrukturen für elektronische Bauelemente
(Diploma 2006)
Stephan Maroldt: Charakterisierung elektronischer Eigenschaften niedrigdimensionaler Elektronengase
(Student wrk 2005/2006)
The goal of the MagSens research group is the development of integrated and resonant microstructures based on magnetoelectric composites for the measurement of weakest (e.g. bio-) magnetic fields at room temperature. The research project therefore includes a fundamental understanding of the design-relevant properties and their dependencies, the ability to simulate and predict the performance, the provision of the technological basis including layout, technological sequence, adjustment and analysis of the layer characteristics (especially with respect to deposition and post-treatment), as well as metrological aspects related to validation of the sensor system.
Duration: 01.01.2018 - 31.12.2020
The MagSens research group is funded by the Free State of Thuringia from the European Social Fund.
Coordination of the research group OptiSolar (silicon photovoltaics), 2013 - 2014, Coordination of the share of TU Ilmenau in the research group BiPV (application: HS Nordhausen, 2015-2017).
Epitaxy of group III nitrides: Epitaxial growth of AlGaN/GaN heterostructures on sapphire, SiC and silicon using metal organic vapor deposition (MOCVD) for applications in the field of high frequency transistors, micromechanical resonators (MEMS) and in the field of sensor technology (pH measurement with open gate FETs).
Micro/nanomechanics: Development of piezoelectrically excited micromechanical resonators based on epitaxial AlGaN/GaN layer systems (PhD), fabrication and investigation of mechanical properties of nanowires. (DFG SPP 1157, 2003-2010, DFG SPP 1165, 2006-2007, TMBWK, 2011-2013)
Translated with www.DeepL.com/Translator (free version)
The project "BASIC- Basic Engineering School- New forms of teaching and learning in engineering education - especially in the introductory phase of studies" is funded by the BMBF from the "Program for better study conditions and more quality in teaching" and is the first large project that is located at ZIB. During the project period from 1.1.2012 to 31.12.2016, students' entry into the basic subjects of engineering studies at the TU Ilmenau is to be made more suitable.
BASIC 2 will build on this and promote the implementation of the basic principle and of practice and project-oriented elements in the basic engineering studies and transfer them to the regular study program. The project period is 5 years from 01.01.2017 - 31.12.2020.
Further information about the Basic Engineering School can be found here.
The BASICplus project comprises the conception and realization of an in-service education and training program in engineering subjects and thus significantly complements the in-service training landscape for STEM professions.
Different target groups will be able to complete individual certificates as well as degrees through more flexible access conditions. Based on practical and interdisciplinary modules with research- and development-focused content, individual and demand-oriented qualification can be made possible.
Funding period 1st funding phase: August 2014 - January 2018
Further information can be found here.
Automated Parameter Extraction of ScAlN MEMS Devices using an extended Euler-Bernoulli Beam Theory, Maximilian Krey, Bernd Haehnlein, Katja Tonisch, Stefan Krischok, and Hannes Toepfer, Sensors 2020, 20(4), 1001; https://doi.org/10.3390/s20041001.
Structural analysis of sputtered Sc(x)Al(1-x)N layers for sensor applications, Bernd Hähnlein, Tim Hofmann, Katja Tonisch, Jörg Pezoldt, Jaroslav Kovac Jr. , Stefan Krischok, Proceedings of the 6th International Conference on Materials Science & Smart Materials (MSSM) 2019; published in: Key Engineering Materials, ISSN: 1662-9795, Vol. 865, pp 13-18, 2020.
Spectroscopic characterization of sputtered ScAlN thin films, Tim Hofmann, Katja Tonisch, Bernd Hähnlein, Jaroslav Kovic Jr, Jörg Pezoldt and Stefan Krischok, DPG Frühjahrstagung 2019, Regensburg.
Investigation of ScAlN for piezoelectric and ferroelectric applications, R. Petrich, H. Bartsch, K. Tonisch, K. Jaekel, S. Barth, H. Bartzsch, D. Glöß, A. Delan, S. Krischok, S. Strehle, M. Hoffmann and J. Müller, Proc. 22nd Microelectronics and Packaging Conference (EMPC) 2019. DOI: 10.23919/EMPC44848.2019.8951824
Ebenso in: Untersuchung von ScAlN für piezoelektrische und ferroelektrische Anwendungen, Rebecca Petrich, Heike Bartsch, Katja Tonisch, Konrad Jaekel, Stephan Barth, Hagen Bartzsch, Daniel Glöß, Annekatrin Delan, Stefan Krischok, Steffen Strehle, Martin Hoffmann und Jens Müller, MikroSystemTechnik Kongress 2019, Berlin.
Bending modes in magnetoelectric effect for the two-layer structure ScAlN-Ni, O.V. Sokolov, R.V. Petrov, K. Tonisch, H. Töpfer, ВЕСТНИК НОВГОРОДСКОГО ГОСУДАРСТВЕННОГО УНИВЕРСИТЕТА 107, 2018, p. 50-53.
Magnetoelectric current sensor in the EMR range, Viktor Leontiev, Oleg Sokolov, Roman Petrov, Mirza Bichurin , Katja Tonisch , Stefan Krischok and Hannes Töpfer, 13th International Conference on Applied Electromagnetics - ПЕС 2017, August 30 – September 01, 2017, Niš, Serbia
Mixed signal ... blended learning in der Physik, K. Tonisch, BASICplus Schriftenreihe, Technische Universität Ilmenau, www.tu-ilmenau.de/basicplus/publikationen, 2017
Digitalisierung in der Studieneingangsphase: Visualisierung von physikalischen Experimenten mit Applets, K. Tonisch, J. Nau, H. Heidtmann, S. Krischok, 12. Ingenieurpädagogische Regionaltagung 2017, 11.-13.05.17, Ilmenau, Vortrag + Beitrag im Tagungsband.
Mixed signal ... Blended learning in der Physik, K. Tonisch, DPG Frühjahrstagung, Fachverband Didaktik der Physik, 19.-24. März 2017, Dresden (Vortrag).
Magnetoelectric effect in layered structures of Ni/AlN/Ni and Ni/GaN/Ni, O.V. Sokolov, R.V. Petrov, K. Tonisch, H. Töpfer, ВЕСТНИК НОВГОРОДСКОГО ГОСУДАРСТВЕННОГО УНИВЕРСИТЕТА 98, 2016, p. 60-64.
High-Frequency Performance of GaN High-Electron Mobility Transistors on 3C-SiC/Si Substrates With Au-Free Ohmic Contacts, W. Jatal, U. Baumann, K. Tonisch, Katja et al., IEEE Electron Device Letters 36 (2) 2015, p. 123-125.
Über Beobachtung und Experiment zur Theorie – und zurück in die Praxis: Physik im Kontext der Ingenieurwissenschaften, K. Tonisch, Dortmund Spring School for Staff Developpers (DOSS 2014), 26.-28.05.2014, Dortmund (Poster).
Physik als Nebenfach: Fachübergreifende Kontexteinbettung am Beispiel der Ingenieurwissenschaften, K. Tonisch, DPG Frühjahrstagung, Fachverband Didaktik der Physik, 17.-21. März 2014, Frankfurt/Main (Vortrag).
AlGaN based MEMS structures, B. Hähnlein, K. Tonisch, G. Ecke, et al., Physica Status Solidi C 11 (2) 2014, p. 239-43.
Side gate AlGaN/GaN FET on silicon and sapphire, L. Hiller, K. Tonisch, J. Pezoldt, Physica Status Solidi C 11 (2) 2014, p. 280-3 .
GaN HEMTs on Si substrate with high cutoff frequency, W. Jatal, K. Tonisch, U. Baumann, et al., 10th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM) in Smolenice, Slovakia, 20-22 Oct. 2014, Proceedings 4 pp.
AlGaN/GaN based HEMTs on SiC/Si-substrates: influences on high frequency performance, W. Jatal, K. Tonisch, U. Baumann, et al., Materials Science Forum 740-742 (2013) 1115-18.
SiC/Si pseudosubstrates for AlGaN nanoelectronic devices, L. Hiller, K. Tonisch, J. Pezoldt, Materials Science Forum 740-742 (2013) 1119-22.
AlGaN solid solution grown on 3C-SiC(111)/Si(111) pseudosubstrates, K. Tonisch, R. Benzig, G. Ecke, et al., Materials Science Forum 740-742 (2013) 103-6.
Smooth ceramic titanium nitride contacts on AlGaN/GaN-heterostructures, C. Maus, S. Stauden, G. Ecke, K. Tonisch et al., Semiconductor Science and Technology 27 (11) 2012, p. 115007.
Residual stress measurements and mechanical properties of AlN thin films as ultra-sensitive materials for nanoelectromechanical systems, R. Grieseler, J. Klaus, M. Stubenrauch, K. Tonisch S. Michael, J. Pezoldt, P. Schaaf, Philosphical Magazine 92 (25-27) 2012 p. 3392-3401
Vertical design of cubic GaN-based high electron mobility transistors
R. Granzner, E. Tschumak, M. Kittler, K. Tonisch, W. Jatal, J. Pezoldt, D.As, F. Schwierz,
J. Appl. Phys. 110 (2011) 114501-1 - 114501-8
Side gate graphene and AlGaN/GaN unipolar devices
R. Göckeritz, K. Tonisch, W. Jatal, L. Hiller, F. Schwierz, J. Pezoldt
Adv. Mater. Res. 324 (2011), 427-430
AlGaN/GaN-heterostructures on (111) 3C-SiC/Si pseudo substrates for high frequency applications
K. Tonisch, W. Jatal, F. Niebelschuetz, H. Romanus, U. Baumann, F. Schwierz, J. Pezoldt
Thin Solid Films 520 (2011)491-496
Micro- and nano-electromechanical resonators based on SiC and group III-nitrides for sensor applications, K. Brueckner, F. Niebelschuetz, K. Tonisch, Ch. Foerster, V. Cimalla, R. Stephan, J. Pezoldt, T. Stauden, O. Ambacher, and M. A. Hein, Phys. Status Solidi A (2010) 1–20
Optical properties of InN grown on Si(111) substrate
E. Sakalauskas, P. Schley, J. Räthel, T.A. Klar, R. Müller, J. Pezoldt, K.Tonisch, J. Grandal, M.A. Sanchez-Garcia, E. Calleja, R. Viltalta-Clemente, P. Ruterana, R. Goldhahn
Phys. Status Solidi A 207 (2010) 1066-1069
Elastic properties of nanowires
C.-C. Röhlig, M. Niebelschuetz, K. Brueckner, K.Tonisch, O. Ambacher, V. Cimalla
Phys. Status Solidi B 247 (2010) 2557–2570
AlGaN/GaN based heterostructures for MEMS and NEMS applications
V. Cimalla, C.-C. Röhlig, V. Lebedev, O. Ambacher, K. Tonisch, F. Niebelschütz, K. Brückner, M. Hein, Solid State Phenomena 159 (2010) 27-38
Piezoelelctric actuated epitaxially grown AlGaN/GaN-resonators
F. Niebelschütz, K. Brueckner, K. Tonisch, R. Stephan, V. Cimalla, O. Ambacher, M.A. Hein
Phys. Status Solidi C 7 (2010) 1829-1831
AlGaN/GaN based heterostructures for MEMS and NEMS applications
V. Cimalla, C.-C. Röhlig, V. Lebedev, O. Ambacher, K. Tonisch, F. Niebelschütz, K. Brückner, and M. Hein, Solid State Phenomena Vol. 159 (2010) 27-38
Nitrides based sensors
V. Cimalla, V. Lebedev, S. Linkohr, C.C. Röhlig, I. Cimalla, B. Lübbers, K. Tonisch, K. Brückner, F. Niebelschütz, M. Hein, and O. Ambacher, Proc. HETECH 2008, edited by Gaudenzio Meneghesso, pp. 33-40
Temperature facilated ECR-etching for isotropic SiC structuring
F. Niebelschütz, Th. Stauden, K. Tonisch, J. Pezoldt
Mater. Sci. Forum, 645-648 (2010) 849-852
Property modification of 3C-SiC MEMS on Ge-modified Si(100) substrates
F. Niebelschütz, W. Zhao, K. Brueckner, K. Tonisch, M. Linß, M.A. Hein
J. Pezoldt, Mater. Sci. Forum, 645-648 (2010) 861-864
2H-AlGaN/GaN HEMTs on 3C-SIC(111)/Si(111) substrates
K. Tonisch, W. Jatal, R. Granzner, M. Kittler, U. Baumann, F. Schwierz, J. Pezoldt
Mater. Sci. Forum, 645-648 (2010) 1219-1222
Resonant Piezoelectric AlGaN/GaN MEMS Sensors in Longitudinal Mode Operation
K. Brückner, F. Niebelschütz, K. Tonisch, R. Stephan, V. Cimalla, O. Ambacher und M. A. Hein, Proceeeding der IEEE MEMS Conference, Sorrento, Italien, 25.-29.01.2009.
Comparative study of 3C-GaN grwon on semi-insulating 3C-SiC/Si(100) substrates
E. Tschumak, K.Tonisch, J. Pezoldt, D.J.As, Material Sci. Forum, 615-617 (2009) 943-946
Structure and lattice location of Ge implanted 4H-SiC
Th. Kups, K. Tonisch, M. Voelskow, W. Skorupa, A.L. Konkin, J. Pezoldt
Material Sci. Forum 600-603 (2009) 623 - 626
Isotropic etching of SiC
Th. Stauden, F. Niebelschütz, K. Tonisch, V. Cimalla, G. Ecke, Ch. Haupt, and J. Pezoldt
Materials Science Forum 600-603 (2009) 651-654
Nitrides based sensors, V. Cimalla, V. Lebedev, S. Linkohr, C.C. Röhlig, I. Cimalla, B. Lübbers, K. Tonisch, K. Brückner, F. Niebelschütz, M. Hein, and O. Ambacher, Proc. HETECH 2008, edited by Gaudenzio Meneghesso, pp. 33-40
Sensing applications of micro- and nanoelectromechanical resonators
F. Niebelschütz, V. Cimalla, K.Brückner, R.Stephan, K.Tonisch, M.A. Hein und O. Ambacher
Proc. IMechE Vol. 221 Part N: J. Nanoengineering and Nanosystems (2008) 59-65.
Structural and photoconductive properties of MBE and MOCVD grown III-nitride double-heterostructures
S. Hauguth-Frank, V. Lebedev, K. Tonisch, H. Romanus, T. Kups, H.J. Buchner, G. Jaeger, O. Ambacher, A. Schober, Mater. Res. Soc. Symp. Proc. 1076 (2008) 155-161
Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators
K. Brueckner, F. Niebelschuetz, K. Tonisch, S. Michael, A. Dadgar, A. Krost, V. Cimalla, O. Ambacher, R. Stephan, and M. A. Hein, Appl. Phys. Lett. 93 (2008) 173504.
Piezoelectric actuation of (GaN/)AlGaN/GaN heterostructures
K. Tonisch, C. Buchheim, F. Niebelschütz, A. Schober, G. Gobsch, V. Cimalla, O. Ambacher, and R. Goldhahn, J. Appl. Phys. 104 (2008) 084516.
Electronic structure of GaN(0001)-2x2 thin films grown by PAMPE
R. Gutt, P. Lorenz, K. Tonisch, M. Himmerlich, J.A. Schäfer and S. Krischok
phys. stat. sol. (RRL), 1-3 (2008) pssr.200802146
The Role of Ti/Al Ratio in Nanolayered Ohmic Contacts for GaN/AlGaN HEMTs
L. Kolaklieva, R. Kakanakov, V. Cimalla, St. Maroldt, F. Niebelschütz, K. Tonisch, O. Ambacher
Proc. 26th International Conference on Microelctronics (Miel 2008), Nis, Serbia 11-14th May 2008
AlGaN/GaN – based MEMS with two-dimensional electron gas for novel sensor applications
F. Niebelschütz, V. Cimalla, K. Tonisch, Ch. Haupt, K. Brückner, R. Stephan, M. Hein and O. Ambacher, phys. stat. sol. (c) 5, No. 6, (2008) 1914–1916
Piezoelectric actuation of all-nitride MEMS
K. Tonisch, C. Buchheim, F. Niebelschütz, M. Donahue, R. Goldhahn, V. Cimalla, O. Ambacher
phys. stat. sol. (c) 5, No. 6, (2008) 1910–1913
Electric field distribution in GaN/AlGaN/GaN heterostructures with 2DEG and 2DHG
C. Buchheim, R. Goldhahn, G. Gobsch, K. Tonisch, V. Cimalla, F. Niebelschütz, O. Ambacher
Appl. Phys. Lett. 92 (2008) 013510.
Sensing applications of micro- and nanoelectromechanical resonators
F. Niebelschütz, V. Cimalla, K.Brückner, R.Stephan, K.Tonisch, M.A. Hein und O. Ambacher
Proc. IMechE, Part N: J.Nanoengineering and Nanosystems, 2007, 221(N2), 59-65
AlN as a piezoelectric material for integrated micro and nano sensors on silicon
T. Polster, M. Hoffmann, A. Albrecht, K. Tonisch, O. Ambacher, T. Stauden, M. Donahue, S. Michael, Smart Systems Integration 2007, Paris, VDE Verlag, S. 161-166
ISBN 978-3-8007-3009-4
Analysis of nanostructures by means of Auger electron spectroscopy
G. Ecke, V. Cimalla, K. Tonisch, V. Lebedev, H. Romanus, O. Ambacher, and J. Liday
J. Electrical Eng. 58 (2007) 301-306
Nanomechanics with nanowires and nano-electro-mechanical systems
V. Cimalla, K. Brückner, A.W. Hassel, S. Milenkovic, M.A. Hein, F. Niebelschütz, M. Niebelschütz, J. Pezoldt, H. Romanus, C.-C. Röhlig, K. Tonisch, J. Weber, and O. Ambacher
Proc. Intern Workshop Nanostruct. Thin Films (NANOHARD 2007) May 13-16 2007, Velingrad, Bulgaria (Eds. R. Kakanakov and L. Kolaklieva), 2007, p. 27-48.
Strain- and pressure-dependent RF response of microelectromechanical resonators for sensing applications
K. Brueckner, V. Cimalla, F. Niebelschütz, R. Stephan, K. Tonisch, O. Ambacher, and M.A. Hein, J. Micromech. Microeng. 17 (2007) 2016-2023
Fabrication of one-dimensional "trenched" GaN nanowires and their interconnections
V. Lebedev, D. Cengher, M. Fischer, K. Tonisch, V. Cimalla, M. Niebelschütz, and O. Ambacher, phys. stat. sol. (a) 204 (2007) 3387-3391
Nanoelectromechanical devices for sensing applications
V. Cimalla, F. Niebelschütz, K. Tonisch, Ch. Foerster, K. Brueckner, I. Cimalla, T. Friedrich, J. Pezoldt, R. Stephan, M. Hein, O. Ambacher, Sens. Actuat. B 126 (2007) 24-34
Fully unstrained GaN on sacrificial AlN layers by nano-heteroepitaxy
K. Tonisch, V. Cimalla, F. Niebelschütz, H. Romanus, M. Eickhoff, O. Ambacher
phys. stat. sol. (c) 4 (2007) 2248-2251
Structural studies of single crystalline bixbyte In2O3 films epitaxially grown on InN(0001)
Ch.Y. Wang, V. Lebedev, V. Cimalla, Th. Kups, K. Tonisch, O. Ambacher
Appl. Phys. Lett. 90 (2007) 221902 (also: Virtual Journal of Nanoscale Science & Technology 15 (2007) Issue 23)
Resonant Sensors for Microfluidic Applications
F. Niebelschütz, K. Tonisch, V. Cimalla, K. Brückner, R. Stephan, M. Hein, A. Schober, and O. Ambacher, MRS Symp. Proc. 951 (2007) E05-07
AlGaN/GaN biosensor-effect of device processing steps on the surface properties and biocompatibility
I. Cimalla, F. Will, K. Tonisch, M. Niebelschütz, V. Cimalla, V. Lebedev, G. Kittler, M. Himmerlich, S. Krischok, J.A. Schaefer, M. Gebinoga, A. Schober, T. Friedrich, and O. Ambacher, Sens. Actuat. B 123 (2007) 740–748
Fully Unstrained GaN on Thick AlN Layers for MEMS Application
K. Tonisch, F. Niebelschuetz, V. Cimalla, H. Romanus, and O. Ambacher
MRS Symp. Proc. 955 (2007) I16-03.
Growth of silicon nanowires on UV-structurable glass using self-organized nucleation centres
K. Tonisch, F. Weise, M. Stubenrauch, V. Cimalla, G. Ecke, F. Will, H. Romanus, S. Mrotzek, H. Hofmeister, M. Hoffmann, D. Hülsenberg and O. Ambacher
Physica E 38 (2007) 40-43
Nanowire-based electromechanical biomimetic sensor
K. Tonisch, V. Cimalla, F. Will, F. Weise, M. Stubenrauch, A. Albrecht, M. Hoffmann and O. Ambacher, Physica E 37 (2007) 208-211
Suspended nanowire web
V. Cimalla, M. Stubenrauch, F. Weise, M. Fischer, K. Tonisch, M. Hoffmann, and O. Ambacher
Appl. Phys. Lett. 90 (2007) 101504 (also: Virtual Journal of Nanoscale Science & Technology 15 (2007) Issue 11) and Virtual Journal of Biological Physics Research 13 (2007) Issue 5).
Coalescence aspects of III-nitride epitaxy
V. Lebedev, K. Tonisch, F. Niebelschütz, V. Cimalla, D. Cengher, I. Cimalla, Ch. Mauder, S. Hauguth, and O. Ambacher, F. M. Morales, J. G. Lozano, and D. González J. Appl. Phys. 101 (2007) 054906
Piezoelectric properties of polycristalline AlN thin films for MEMS application
K. Tonisch, V. Cimalla, Ch. Förster, H. Romanus, O. Ambacher, D. Dontsov
Sensors Actuat. A 132 (2006) 658-663
Impact of Device Technolgy Processes on the Surface Properties and Biocompatibility of Group III Nitride Based Sensors
I. Cimalla, F. Will, K. Tonisch, M. Niebelschütz, V. Cimalla, V. Lebedev, G. Kittler, M. Himmerlich, S. Krischok, J.A. Schäfer, M. Gebinoga, A. Schober, T. Friedrich, O. Ambacher
Mat. iss. Werkst. techn. 37 (2006) 919
Austrittsarbeitsanalyse von GaN basierten Lateral Polarity Strukturen durch Auger-Elektronen-Energie-Messungen
M. Niebelschütz, G. Ecke, V. Cimalla, K. Tonisch, O. Ambacher
Mat. wiss. Werkst. techn. 37 (2006) 937
Work Function Analysis of GaN-based Lateral Polarity Structures by Auger Electron Energy Measurements
M. Niebelschütz, G. Ecke, V. Cimalla, K. Tonisch, and O. Ambacher
J. Appl. Phys. 100 (2006) 074909
Impact of device processing on the surface properties and the biocompatibility of AlGaN/GaN HEMT sensors
I. Cimalla, F. Will, K. Tonisch, V. Lebedev, M. Niebelschütz, M. Himmerlich, S. Krischok, V. Cimalla, G. Kittler, C. Kremin, T. Friedrich and O. Ambacher
51st Internationales Wissenschaftliches Kolloquium
Technische Universität Ilmenau, September 11 – 15, (2006) 299
Work Function Analysis of GaN-based Lateral Polarity Structures by Auger Electron Energy Measurements
M. Niebelschütz, G. Ecke, V. Cimalla, K. Tonisch and O. Ambacher
51st Internationales Wissenschaftliches Kolloquium
Technische Universität Ilmenau, September 11 – 15, (2006) 297
First steps towards a nanowire-based electromechanical biomimetic sensor
K. Tonisch, V. Cimalla, F. Will, C. Haupt, D. Cengher, F. Weise, M. Stubenrauch, A. Albrecht, M. Hoffmann, O. Ambacher
51st Internationales Wissenschaftliches Kolloquium Technische Universität Ilmenau, September 11 – 15, (2006) 243
Micro- and nanomechanical resonators for sensing Applications
F. Will, K. Tonisch, V. Cimalla, D. Cengher, C. Haupt, K. Brückner, R. Stephan, M. Hein and O. Ambacher
51st Internationales Wissenschaftliches Kolloquium
Technische Universität Ilmenau, September 11 – 15, (2006) 241
Pulsed mode operation of strained microelectromechanical resonators in air
V. Cimalla, Ch. Förster, F. Will, K. Tonisch, K. Brückner, R. Stephan, M. E. Hein, O. Ambacher, and E. Aperathitis
Appl. Phys. Lett. 88 (2006) 253501
Pulsed mode operation of strained microelectromechanical resonators in air
V. Cimalla, Ch. Förster, F. Will, K. Tonisch, K. Brückner, R. Stephan, M. E. Hein, O. Ambacher, and E. Aperathitis
Virtual Journal of Nanoscale Science & Technology 14 (2006) Issue 1
Piezoelectronic properties of thin AlN layers for MEMS application determined by piezoresponse force microscopy
K. Tonisch, V. Cimalla, Ch. Förster, D. Dontsov, and O. Ambacher
phys. stat. sol. (c) 3 (2006) 2274-2277
Growth of AlN nanowires by metal organic chemical vapour deposition
V. Cimalla, Ch. Förster, D. Cengher, K. Tonisch, and O. Ambacher
phys. stat. sol. (b) 243 (2006) 1476-1480
Estimation of the piezoelectric properties of thin AlN layers for MEMS applications
K. Tonisch, V. Cimalla, Ch. Förster, D. Dontsov, O. Ambacher
Proc. 50. IWK 2005, TU Ilmenau, 207-208
Electromechanical Resonances of SiC and AlN Beams under Ambient Conditions
K. Brueckner, Ch. Förster, K. Tonisch, V. Cimalla, O. Ambacher, R. Stephan, K. Blau, M. Hein
Proc. 50. IWK 2005, TU Ilmenau, 209-210
Group III-nitrides and 3C-SiC for micro- and nanoelectromechanical resonators
Ch. Förster, V. Cimalla, F. Will, O. Ambacher, K. Brückner, R. Stephan, M. Hein, E. Aperathitis
Proc. 50. IWK 2005, TU Ilmenau, 187-188
SiC and AlN-based micro- and nanomechanical resonators for sensing applications
K. Tonisch, F. Will, Ch. Förster, V. Cimalla , K. Brueckner, M. Hein, O. Ambacher
Proc. 7. Dresdener Sensorsymposium, 12.-14.12.2005
Electromechanical Resonances of SiC and AlN Beams under Ambient Conditions
K. Brueckner, Ch. Förster, K. Tonisch, V. Cimalla, O. Ambacher, R. Stephan, K. Blau and M. A. Hein
Proc. 35th European Microwave Conference, Paris, October 2005
Technology of SiC and AlN based Micro and Nanomechanical Resonators for Sensor Applications
V. Cimalla, Ch. Förster, K. Tonisch, O. Ambacher, K. Brückner, R Stephan, M. Hein, and E. Aparathitis
Workshop on Integrated Electroceramic Functional Structures, Berchtesgaden, June 7th-8th 2005
RF Characterisation of SiC- and AlN-MEMS Resonators for sensor applications
K. Brückner, K. Blau, M. Happ, C. Kutscher, R. Stephan, M. Hein, V. Cimalla, C. Förster, K. Tonisch, F. Will, and O. Ambacher
Workshop on Integrated Electroceramic Functional Structures, Berchtesgaden, June 7th-8th 2005
Equal Opportunity Officer of the Faculty of Mathematics and Natural Sciences (since May 2014)
Radiation Protection Officer of the Department of Technical Physics 1 (since Nov. 2017)
Member of the
Institute Council of the Institute of Physics (since January 2014)
Equal Opportunities Council (since May 2014)
Faculty Council (since September 2014)
- in the study commission and examination board in the study program Technical Physics (since 2015)
- in the study program commissions Optronics (2016-2020) and Teaching Mechanical Engineering (since September 2016)
Mentor during the summer academy for female students interested in technology and science in cooperation with the Nano4Women network in July 2015.