Conference Papers

Results: 281
Created on: Thu, 28 Mar 2024 23:04:58 +0100 in 0.0687 sec


Handte, Thomas; Scheller, Nicolas; Dittrich, Lars; Thesen, Manuel W.; Messerschmidt, Martin; Sinzinger, Stefan
Efficient and cost-effective manufacturing of nanostructures with high aspect ratios using Soft UV-Nanoimprint Lithography with bi- and trilayer resist systems. - In: MikroSystemTechnik, (2021), S. 35-38

Ortlepp, Ingo; Fern, Florian; Schienbein, Ralf; Supreeti, Shraddha; Füßl, Roland; Theska, René; Sinzinger, Stefan; Manske, Eberhard
Traceable 5D-nanofabrication with nano positioning and nano measuring machines. - In: Proceedings of the 21st International Conference of the European Society for Precision Engineering and Nanotechnology, (2021), S. 333-336

Today, besides the ongoing progress in the reduction of feature sizes, the measuring and fabrication of freeform surfaces with nanometre uncertainty, e.g. for aspheric lenses or structures with high aspect ratios, are a challenging task. Usually, dealing with such objects is limited by the local tilt angle between the object surface and the tool axis. There are different approaches to perform such measurements. In this paper, an extension of the Nano Measuring Machine NMM-1 with two rotational axes is described. With the proposed setup, it is possible to orientate the tool-axis perpendicular to the sample in every position, allowing larger angles to be measured / structured and minimising the uncertainty of the process e.g. due to the tilt dependency of the tool. Various machine designs are investigated and finally a solution with one rotary and one goniometer stage is integrated, preserving the existing machine infrastructure and allowing the addressability of a full hemisphere without limiting the measuring volume. As the tool centre point maintains its position during tool rotation, the Abbe principle is still fulfilled in every angular orientation. Emphasis was put on the metrological traceability of the whole system, including linear and rotary axes as well the tool itself. This was achieved by using a reference hemisphere, compensating the trajectory errors of the rotational axes. For the developed arrangement, the measurement uncertainty was investigated and several strategies for an in-situ-calibration of the additional axes are described. Finally, nanofabrication on large slopes is demonstrated.



Wüster, Julian; Bourgin, Yannick; Feßer, Patrick; Behrens, Arne; Sinzinger, Stefan
Nano-imprinted subwavelength gratings as polarizing beamsplitters. - In: Journal of the European Optical Society, ISSN 1990-2573, Bd. 17 (2021), 1, 4, S. 1-13

Polarizing beamsplitters have numerous applications in optical systems, such as systems for freeform surface metrology. They are classically manufactured from birefringent materials or with stacks of dielectric coatings. We present a binary subwavelength-structured form-birefringent diffraction grating, which acts as a polarizing beamsplitter for a wide range of incidence angles -30˚…+30˚. We refine the general design method for such hybrid gratings. We furthermore demonstrate the manufacturing steps with Soft-UV-Nanoimprint-Lithography, as well as the experimental verification, that the structure reliably acts as a polarizing beamsplitter. The experimental results show a contrast in efficiency for TE- and TM-polarization of up to 1:18 in the first order, and 34:1 in the zeroth order. The grating potentially enables us to realize integrated compact optical measurement systems, such as common-path interferometers.



https://doi.org/10.1186/s41476-021-00149-8
Behrens, Arne; Bosch, Martí; Hentschel, Martina; Sinzinger, Stefan
Deformed microcavities with very high Q-factors and directional farfield emission. - In: EOS Annual Meeting (EOSAM 2020), (2020), 01006, S. 1-2

We report the design and optimized fabrication of deformed whispering gallery mode resonators in silica with solely ICP-RIE. This allows us to control the morphology of the resonators more freely and results in low surface roughness. The light was coupled into the resonator using a state of the art tapered fiber approach and we determined the Q-factor in the range of 10^5



https://doi.org/10.1051/epjconf/202023801006
Bosch, Martí; Behrens, Arne; Sinzinger, Stefan; Hentschel, Martina
Optische Systeme im Phasenraumbild. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 121 (2020), B29, insges. 2 S.

https://nbn-resolving.org/urn:nbn:de:0287-2020-B029-0
Hübner, Matthias; Lenk, Leonhard; Markweg, Eric; Sinzinger, Stefan
Compressive sensing hyperspectral imaging with optimized diffractive optical elements. - In: Photonic Instrumentation Engineering VII, (2020), insges. 1 S.

Hyperspectral image acquisition is challenging due to its three-dimensional dataset consisting of two spatial and one spectral dimensions. Available spectral imagers are either based on spatial or spectral scanning or they sacrifice spatial and spectral resolution for snapshot imaging. Compressive Sensing techniques have already been applied to spectral imaging to enhance the image acquisition, but they still rely on multiple consecutive measurements. We utilize several diffraction orders of a novel diffractive optical element whose diffraction efficiency has been optimized for a broad wavelength range. Based on this diffractive optical element we design and compare novel compressive snapshot spectral imaging systems and present experimental results.



https://doi.org/10.1117/12.2548037
Kreismann, Jakob; Kim, Jaewon; Bosch, Martí; Hein, Matthias; Sinzinger, Stefan; Hentschel, Martina
Super-directional light emission and emission reversal from micro cavity arrays. - In: DPG-Frühjahrstagung (DPG Spring Meeting) of the Condensed Matter Section (SKM) together with the DPG Division Environmental Physics and the Working Groups Accelerator Physics; Equal Opportunities; Energy; Industry and Business; Physics, Modern IT and Artificial Intelligence, Young DPG, (2020), KFM 7.1

Wüster, Julian; Feßer, Patrick; Behrens, Arne; Sinzinger, Stefan
Resonant diffraction gratings with polarization-dependent efficiencies. - In: EOS Annual Meeting (EOSAM 2020), (2020), 05002, S. 1-2

Subwavelength-structures with different fill factors in the lateral dimensions result in unique phase shifts for the different polarization states of transmitted light.By using this additional degree of freedom for diffractive optical elements, we yield additional functionalities for compact optical systems with DOEs. As a fully operable example we present a binary subwavelength-grating which acts as a polarizing beamsplitter for TE- and TM-polarization over a wide range of incidence angles. We show our design approach, the manufacturing process with Soft-UV-Nanoimprint-Technology, as well as experimental results. We will also lay out possibilities for the design and application of multilevel polarization-functionalized gratings.



https://doi.org/10.1051/epjconf/202023805002
Thronicke, Nicole; Möller, Christian; Mitrenga, Dennis; Karolewski, Dominik; Klein, Thomas; Neckermann, Kristin; Ortlepp, Hans-Georg; Grewe, Adrian; Sinzinger, Stefan; Ortlepp, Thomas
Spectrally tunable microsensor for gas analysis. - In: Smart Systems Integration - 13th International Conference and Exhibition on Integration Issues of Miniaturized Systems, (2019), S. 340-343

https://ieeexplore.ieee.org/document/8727823
Gharbi Ghebjagh, Shima; Sinzinger, Stefan
Multifocal complex-value phase zone plate for 3D focusing. - In: EOS Topical Meeting on Diffractive Optics 2019, (2019), S. 84-85