journal articles, book contributions

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Leineweber, Johannes; Hebenstreit, Roman; Häcker, Annika-Verena; Meyer, Christoph; Füßl, Roland; Manske, Eberhard; Theska, René
Characterization of a parallel kinematics actuated in situ reference measurement system for 5D-nano-measurement and nano-fabrication applications :
Charakterisierung eines parallelkinematisch aktuierten In-situ-Referenzmesssystems für 5D-Nanomess- und Fabrikationsanwendungen. - In: Technisches Messen, ISSN 2196-7113, Bd. 91 (2024), 2, S. 102-115

Die stetig voranschreitende Entwicklung im Bereich der Fertigung optischer und elektronischer Elemente auf Basis von Nanotechnologien führt seit Jahren zu einer steigenden Nachfrage nach hochpräzisen Nanomess- und Nanofabrikationsmaschinen (The International Roadmap For Devices And Systems, IEEE, 2020; C. Grant Willson and B. J. Roman, “The future of lithography: SEMATECH litho forum 2008,” ASC Nano , vol. 2, no. 7, pp. 1323-1328, 2008). Als technologisch besonders anspruchsvoll hat sich dabei die Fabrikation auf stark geneigten, gekrümmten, asphärischen und freigeformten Oberflächen herausgestellt (R. Schachtschneider, et al., “Interlaboratory comparison measurements of aspheres,” Meas. Sci. Technol. , vol. 29, no. 13pp, p. 055010, 2018). Aufbauend auf den zukunftsweisenden Entwicklungen der Nanopositionier- und Nanomessmaschine 1 (NMM-1) (G. Jäger, E. Manske, T. Hausotte, and J.-J. Büchner, “Nanomessmaschine zur abbefehlerfreien Koordinatenmessung,” tm - Tech. Mess. , vol. 67, nos. 7-8, pp. 319-323, 2000) und der Nanopositionier- und Nanomessmaschine 200 (NPMM-200) (E. Manske, G. Jäger, T. Hausotte, and F. Balzer, “Nanopositioning and Nanomeasuring Machine NPMM-200 - sub-nanometre resolution and highest accuracy in extended macroscopic working areas,” in Euspen’s 17th International Conference , 2017), wird an der Technischen Universität Ilmenau seit mehreren Jahren an Konzepten für NPMM mit erhöhtem Freiheitsgrad geforscht (F. Fern, “Metrologie in fünfachsigen Nanomess- und Nanopositioniermaschinen,” Ph.D. thesis, Technische Universität Ilmenau, 2020; R. Schienbein, “Grundlegende Untersuchungen zum konstruktiven Aufbau von Fünfachs-Nanopositionier- und Nanomessmaschinen,” Ph.D. thesis, Technische Universität Ilmenau, 2020). So besitzt der seit 2020 entwickelte Demonstrator NMM-5D (J. Leinweber, C. Meyer, R. Füßl, R. Theska, and E. Manske, “Ein neuartiges Konzept für 5D Nanopositionier-, Nanomess-, und Nanofabrikationsmaschinen,” tm - Tech. Mess. , vol. 37, nos. 1-10, 2022) neben dem kartesischen Verfahrbereich von 25mm × 25mm × 5mm zusätzlich ein Rotationsvermögen des Tools von 360˚ sowie ein Neigungsvermögen von 50˚. Imfolgenden Artikel wird davon ausgehend die mechanische und metrologische Charakterisierung der parallelkinematisch aktuierten Rotationserweiterung präsentiert. Hierbei konzentrieren sich durchgeführte Untersuchungen primär auf die kinematisch verursachten Abweichungen des Tool Center Point (TCP) sowie die Detektierung dieser Abweichungen mit einem interferometrischen In-situ -Referenzmesssystem. Darüber kann perspektivisch eine geregelte Kompensation der auftretenden TCP-Abweichungen erfolgen.



https://doi.org/10.1515/teme-2023-0109
Zettlitzer, Lucas; Gross, Herbert; Risse, Stefan; Theska, René
Reflective dual field-of-view optical system based on the Alvarez principle. - In: Applied optics, ISSN 2155-3165, Bd. 62 (2023), 31, S. 8390-8401

A novel, to the best of our knowledge, dual-state reflective optical relay system based on the Alvarez system is proposed, which can be used for remote sensing applications. By keeping the image and pupil positions constant, it can be combined with a telescope to achieve two different magnifications. As a compact structure with only two moving parts, freeform optical mirrors and a nearly diffraction limited performance for the infrared wavelength 8 µm make it an attractive subsystem for space applications. Different design tradeoffs and the preferred layout properties are discussed in detail.



https://doi.org/10.1364/AO.502846
Vainio, Valtteri; Miettinen, Mikael; Majuri, Jaakko; Theska, René; Viitala, Raine
Manufacturing and static performance of porous aerostatic bearings. - In: Precision engineering, Bd. 84 (2023), S. 177-190

According to the common body of knowledge, aerostatic bearings invariably need narrow manufacturing tolerances to ensure maximal load capacity and high stiffness. This study experimentally investigates the manufacturing of porous material aerostatic bearings and the effect of manufacturing parameters on the performance properties of the bearings. During the study, samples were manufactured using different methods, and the geometrical and performance properties of each sample were inspected. The bearing performance measurement device developed during the study is introduced. The results present the dependence between manufacturing parameters and bearing properties under varying load and operating pressure conditions. The results clearly suggest that effect of bearing surface roughness on load capacity is small; meanwhile, surface planarity has a major impact on load capacity.



https://doi.org/10.1016/j.precisioneng.2023.06.014
Layher, Michel; Bliedtner, Jens; Theska, René
Hybrid additive manufacturing : improved large scale additive manufacturing by means of laser tempering. - In: PhotonicsViews, ISSN 2626-1308, Bd. 19 (2022), 5, S. 47-51

Large-scale additive manufacturing (LSAM) is an additive manufacturing process based on the principles of fused filament fabrication but with significantly higher material deposition rates. The novel hybrid process shown in this paper combines LSAM with a laser beam heat treatment. The structure and mechanical properties of parts are improved due to significantly decreased void sizes. The following article details investigations into the vertical and lateral remelting of strands as well as the utilization of a mirror system, which enables beam guidance according to the machine's printing path.



https://doi.org/10.1002/phvs.202200041
Leineweber, Johannes; Meyer, Christoph; Füßl, Roland; Theska, René; Manske, Eberhard
A novel concept for 5D nanopositioning, nanomeasuring and nanofabrication machines :
Ein neuartiges Konzept für 5D Nanopositionier-, Nanomess-, und Nanofabrikationsmaschinen. - In: Technisches Messen, ISSN 2196-7113, Bd. 89 (2022), 9, S. 634-643

In den vergangenen Jahren wurden an der TU-Ilmenau zahlreiche Entwicklungen im Bereich der Nanopositionier- und Nanomesstechnik realisiert. Insbesondere die NMM-1 [Gerd Jäger, Eberhard Manske, Tino Hausotte, Jans-Joachim Büchner, Nanomessmaschine zur abbefehlerfreien Koordinatenmessung, tm - Technisches Messen, 67(7-8), 2000] sowie die NPMM-200 [Eberhard Manske, Gerd Jäger, Tino Hausotte, Felix Balzer, Nanopositioning and Nanomeasuring Machine NPMM-200 - sub-nanometre resolution and highest accuracy in extended macroscopic working areas, euspen’s 17th International Conference, 2017] stellen ein Novum auf dem Gebiet der Koordinatenmesstechnik mit Nanometerpräzision unter Einhaltung des Abbe-Komparatorprinzips [Ernst Abbe, Messaparate für Physiker, Zeitschrift für Instrumentenkunde, 10:446-448, 1890] dar. Ausgehend von diesen Errungenschaften besteht ein nächster Schritt im Messen und Fabrizieren auf stark gekrümmten, asphärischen, oder freigeformten Oberflächen. Vor jenem Hintergrund wird im folgenden Artikel ein Konzept für ein zweiachsiges Rotationsmodul vorgestellt. Dieses dient als Erweiterung für die NMM-1 und ermöglicht über das kartesische Messvolumen von hinaus zusätzlich eine Rotation des Tools über 360 ˚ um die Hochachse sowie 60 ˚ Neigung. Die Umsetzung erfolgt über eine neuartige sphärische Parallelkinematik. Mit Hilfe eines interferometrischen In-Situ-Referenzmesssystems können die während der Rotationsbewegungen auftretenden translatorischen Positionsabweichungen detektiert werden. Erste Untersuchungen an einem Prototypenaufbau erbringen den Funktionsnachweis des Referenzmesssystems über den gesamten adressierbaren Winkelbereich.



https://doi.org/10.1515/teme-2022-0037
Keck, Lorenz; Seifert, Frank; Newell, David; Schlamminger, Stephan; Theska, René; Haddad, Darine
Design of an enhanced mechanism for a new Kibble balance directly traceable to the quantum SI. - In: EPJ Techniques and Instrumentation, ISSN 2195-7045, Bd. 9 (2022), 1, 7, S. 1-18

The "Quantum Electro-Mechanical Metrology Suite" (QEMMS) is being designed and built at the National Institute of Standards and Technology. It includes a Kibble balance, a graphene quantum Hall resistance array and a Josephson voltage system, so that it is a new primary standard for the unit of mass, the kilogram, directly traceable to the International System of Units (SI) based on quantum constants. We are targeting a measurement range of 10 g to 200 g and optimize the design for a relative combined uncertainty of for masses of 100 g. QEMMS will be developed as an open hardware and software design. In this article, we focus on the design of an enhanced moving and weighing mechanism for the QEMMS based on flexure pivots.



https://doi.org/10.1140/epjti/s40485-022-00080-3
Miettinen, Mikael; Vainio, Valtteri; Theska, René; Viitala, Raine
Aerostatically sealed chamber as a robust aerostatic bearing. - In: Tribology international, ISSN 1879-2464, Bd. 173 (2022), 107614, S. 1-10

Aerostatic bearings are typically used in ultra precision and high speed applications in controlled environments. The present study expands this operating domain. The present study experimentally investigates the performance and feasibility of a novel design for a robust air bearing consisting of an aerostatically sealed pressurized volume. A suitable operating domain for the bearing system was characterized based on measurements of the load capacity, friction moment, chamber flow, and seal flow rate at various opposing surface run-outs and supply pressures. The highest measured load capacity was 18.86 kN at 0.330 mm run-out, and decreased to 12.22 kN load at 3.804 mm run-out. The study provided corroborative evidence on the feasibility of the proposed chamber based bearing design.



https://doi.org/10.1016/j.triboint.2022.107614
Pabst, Markus; Darnieder, Maximilian; Theska, René; Fröhlich, Thomas
Adjustment concept for compensating for stiffness and tilt sensitivity of a novel monolithic electromagnetic force compensation (EMFC) weighing cell. - In: Journal of sensors and sensor systems, ISSN 2194-878X, Bd. 11 (2022), 1, S. 109-116

This paper describes the new adjustment concept of novel planar, monolithic, high-precision electromagnetic force compensation weighing cells. The concept allows the stiffness and the tilt sensitivity of the compliant mechanisms that are dependent on the nominal load on the weighing pan to be adjusted to an optimum. The new mechanism is set up and adjusted according to the developed mechanical model. For evaluation of the concept the system is tested on a high-precision tilt table and under high vacuum conditions in the environment of a commercially available mass comparator.



https://doi.org/10.5194/jsss-11-109-2022
Manske, Eberhard; Theska, René; Fröhlich, Thomas; Ortlepp, Ingo
Foreword to the special issue on "Tip- and laser-based 3D nanofabrication in extended macroscopic working areas". - In: Nanomanufacturing and metrology, ISSN 2520-8128, Bd. 4 (2021), 3, S. 131

https://doi.org/10.1007/s41871-021-00113-7
Supreeti, Shraddha; Schienbein, Ralf; Feßer, Patrick; Fern, Florian; Hoffmann, Martin; Sinzinger, Stefan
Development and implementation of a rotating nanoimprint lithography tool for orthogonal imprinting on edges of curved surfaces. - In: Nanomanufacturing and metrology, ISSN 2520-8128, Bd. 4 (2021), 3, S. 175-180

Uniform molding and demolding of structures on highly curved surfaces through conformal contact is a crucial yet often-overlooked aspect of nanoimprint lithography (NIL). This study describes the development of a NIL tool and its integration into a nanopositioning and nanomeasuring machine to achieve high-precision orthogonal molding and demolding for soft ultraviolet-assisted NIL (soft UV-NIL). The process was implemented primarily on the edges of highly curved plano-convex substrates to demonstrate structure uniformity on the edges. High-resolution nanostructures of sub-200-nm lateral dimension and microstructures in the range of tens of microns were imprinted. However, the nanostructures on the edges of the large, curved substrates were difficult to characterize precisely. Therefore, microstructures were used to measure the structure fidelity and were characterized using profilometry, white light interferometry, and confocal laser scanning microscopy. Regardless of the restricted imaging capabilities at high inclinations for high-resolution nanostructures, the scanning electron microscope (SEM) imaging of the structures on top of the lens substrate and at an inclination of 45˚ was performed. The micro and nanostructures were successfully imprinted on the edges of the plano-convex lens at angles of 45˚, 60˚,and 90˚ from the center of rotation of the rotating NIL tool. The method enables precise imprinting at high inclinations, thereby presenting a different approach to soft UV-NIL on curved surfaces.



https://doi.org/10.1007/s41871-021-00114-6
Ortlepp, Ingo; Fröhlich, Thomas; Füßl, Roland; Reger, Johann; Schäffel, Christoph; Sinzinger, Stefan; Strehle, Steffen; Theska, René; Zentner, Lena; Zöllner, Jens-Peter; Rangelow, Ivo W.; Reinhardt, Carsten; Hausotte, Tino; Cao, Xinrui; Dannberg, Oliver; Fern, Florian; Fischer, David; Gorges, Stephan; Hofmann, Martin; Kirchner, Johannes; Meister, Andreas; Sasiuk, Taras; Schienbein, Ralf; Supreeti, Shraddha; Mohr-Weidenfeller, Laura; Weise, Christoph; Reuter, Christoph; Stauffenberg, Jaqueline; Manske, Eberhard
Tip- and laser-based 3D nanofabrication in extended macroscopic working areas. - In: Nanomanufacturing and metrology, ISSN 2520-8128, Bd. 4 (2021), 3, S. 132-148

The field of optical lithography is subject to intense research and has gained enormous improvement. However, the effort necessary for creating structures at the size of 20 nm and below is considerable using conventional technologies. This effort and the resulting financial requirements can only be tackled by few global companies and thus a paradigm change for the semiconductor industry is conceivable: custom design and solutions for specific applications will dominate future development (Fritze in: Panning EM, Liddle JA (eds) Novel patterning technologies. International society for optics and photonics. SPIE, Bellingham, 2021. https://doi.org/10.1117/12.2593229). For this reason, new aspects arise for future lithography, which is why enormous effort has been directed to the development of alternative fabrication technologies. Yet, the technologies emerging from this process, which are promising for coping with the current resolution and accuracy challenges, are only demonstrated as a proof-of-concept on a lab scale of several square micrometers. Such scale is not adequate for the requirements of modern lithography; therefore, there is the need for new and alternative cross-scale solutions to further advance the possibilities of unconventional nanotechnologies. Similar challenges arise because of the technical progress in various other fields, realizing new and unique functionalities based on nanoscale effects, e.g., in nanophotonics, quantum computing, energy harvesting, and life sciences. Experimental platforms for basic research in the field of scale-spanning nanomeasuring and nanofabrication are necessary for these tasks, which are available at the Technische Universität Ilmenau in the form of nanopositioning and nanomeasuring (NPM) machines. With this equipment, the limits of technical structurability are explored for high-performance tip-based and laser-based processes for enabling real 3D nanofabrication with the highest precision in an adequate working range of several thousand cubic millimeters.



https://doi.org/10.1007/s41871-021-00110-w
Gräser, Philipp; Linß, Sebastian; Harfensteller, Felix; Torres, Mario; Zentner, Lena; Theska, René
High-precision and large-stroke XY micropositioning stage based on serially arranged compliant mechanisms with flexure hinges. - In: Precision engineering, Bd. 72 (2021), S. 469-479

Compliant mechanisms are state of the art in micropositioning stages due to their many beneficial features. However, their design usually compromises between motion range, motion accuracy and design space, while mechanisms with distributed compliance are mostly applied. The further use of flexure hinges with common notch shapes strongly limits the stroke in existing high-precision motion systems. Therefore, this paper presents a high-precision compliant XY micropositioning stage with flexure hinges capable of realizing a motion range of ± 10 mm along both axes. The stage is based on a novel plane-guidance mechanism, which is optimized to realize a precise rectilinear motion of the coupler link while keeping the rotation angles of all hinges below 5˚. The XY motion is then achieved by coupling two of these mechanisms in a serial arrangement. Next, the synthesis of the monolithic XY stage is realized by replacing all revolute joints of the rigid-body model with flexure hinges using optimized power function notch shapes. Emphasis is also placed on the embodiment design of the stage and the actuator integration to minimize possible error sources. Finally, the quasi-static behavior of the compliant stage is characterized by a simulation with a 3D FEM model and by an experimental investigation of a prototype. According to the results, the developed compliant XY micropositioning stage achieves a maximum positioning deviation of less than 10 [my]m in both axes and a yaw error of less than 100 [my]rad over a working range of 20 mm × 20 mm with a comparably compact design of the compliant mechanism of 224 mm × 254 mm.



https://doi.org/10.1016/j.precisioneng.2021.02.001
Weigert, Florian; Hebenstreit, Roman; Füßl, Roland; Theska, René
Experimental setup for the investigation of reproducibility of novel tool changing systems in nanofabrication machines. - In: Nanomanufacturing and metrology, ISSN 2520-8128, Bd. 4 (2021), 3, S. 181-189

Nanomeasuring machines developed at the Technische Universität Ilmenau enable three-dimensional measurements and manufacturing processes with the lowest uncertainties. Due to the requirements for these processes, a highly reproducible and long-term stable tool changing system is needed. For this purpose, kinematically determined couplings are widely used. The state-of-the-art investigations on those are not sufficient for the highest demands on the reproducibility required for this application. A theoretical determination of the reproducibility based on analytical or numerical methods is possible, however not in the desired nanometer range. Due to this, a measurement setup for the determination of the reproducibility in five degrees of freedom with nanometer uncertainty was developed. First, potential measuring devices are systematically examined and measurement principles were developed out of this. A three-dimensional vector-based uncertainty analysis is performed to prove the feasibility of the measurement principle and provides a basis for further design. As a result, a translatory measurement uncertainty of 10 nm and a rotatory uncertainty of 11 nrad can be reached. Afterwards, the measurement setup is designed, focusing on the metrological frame and the lift-off device. The developed setup exceeds the uncertainties of the measurement setups presented in the state-of-the-art by an order of magnitude, allowing new in-depth investigations of the reproducibility of kinematic couplings.



https://doi.org/10.1007/s41871-021-00103-9
Schienbein, Ralf; Fern, Florian; Theska, René; Supreeti, Shraddha; Füßl, Roland; Manske, Eberhard
Fundamental investigations in the design of five-axis nanopositioning machines for measurement and fabrication purposes. - In: Nanomanufacturing and metrology, ISSN 2520-8128, Bd. 4 (2021), 3, S. 156-164

The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system. This in combination with the specific nature of sensors and tools limits the addressable part geometries. An enhancement of an NPMM is introduced by the implementation of rotational movements while keeping the precision in the nanometer range. For this purpose, a parameter-based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify and assess general solution concepts and adequate substructures. Evaluations taken show high potential for three linear movements of the object in combination with two angular movements of the tool. The influence of the additional rotation systems on the existing structure of NPMMs has been investigated further on. Test series on the repeatability of an NPMM enhanced by a chosen combination of a rotary stage and a goniometer setup are realized. As a result of these test series, the necessity of in situ position determination of the tool became very clear. The tool position is measured in situ in relation to a hemispherical reference mirror by three Fabry-Pérot interferometers. FEA optimization has been used to enhance the overall system structure with regard to reproducibility and long-term stability. Results have been experimentally investigated by use of a retroreflector as a tool and the various laser interferometers of the NPMM. The knowledge gained has been formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.



https://doi.org/10.1007/s41871-021-00102-w
Keck, Lorenz; Shaw, Gordon; Theska, René; Schlamminger, Stephan
Design of an electrostatic balance mechanism to measure optical power of 100 kW. - In: IEEE transactions on instrumentation and measurement, ISSN 0018-9456, Bd. 70 (2021), 7002909, insges. 9 S.

https://doi.org/10.1109/TIM.2021.3060575
Fern, Florian; Füßl, Roland; Manske, Eberhard; Schienbein, Ralf; Theska, René; Ortlepp, Ingo; Leineweber, Johannes
Measurement uncertainty analysis on a five-axis nano coordinate measuring machine NMM-5D following a vectorial approach :
Messunsicherheitsbetrachtungen an einem fünfachsigen Nano-Koordinatenmessgerät NMM-5D nach einem vektoriellen Ansatz. - In: Technisches Messen, ISSN 2196-7113, Bd. 88 (2021), 2, S. 61-70

Dieser Beitrag zeigt ein Konzept für eine fünfachsige Nano-Koordinatenmessmaschine zur Messung auf stark gekrümmten asphärischen und frei geformten optischen Oberflächen in einem Messvolumen von 25mm × 25mm × 5mm mit einem maximal möglichen Neigungswinkel von bis zu 60˚ zur Hochachse und einer maximalen Rotation von 360˚ um die Hochachse. Dabei wird die Probe translatorisch bewegt und der Sensor in seiner Orientierung verändert. Unter Einhaltung des Abbe-Komparatorprinzips für alle Messachsen wird die Bewegungsabweichung des Sensors bei der Rotation durch ein in-situ-Referenzmesssystem erfasst. Dieses besteht aus drei kartesisch angeordneten Fabry-Pérot-Interferometern mit dem Ursprung im Antastpunktes des Sensors, die den Abstand zu einer hemisphärischen Referenzfläche messen. Die Messunsicherheitsbetrachtung des Gesamtsystems erfolgt nach dem guide to the expression of uncertainty in measurement in einem vektoriellen Ansatz und liefert unter konservativen Annahmen eine Unsicherheit des Antastpunktes von maximal 72 nm (k=1).



https://doi.org/10.1515/teme-2020-0092
Sasiuk, Taras; Fröhlich, Thomas; Theska, René; Oliveira, Rafael Soares
A novel approach to generate a static torque in the range from 1 mN&hahog;m to 1 N&hahog;m :
Ein neuartiger Ansatz zur Erzeugung eines statischen Drehmoments im Bereich von 1 mN&hahog;m bis 1 N&hahog;m. - In: Technisches Messen, ISSN 2196-7113, Bd. 88 (2021), 2, S. 103-113

Drehmomentsensoren mit einem kleinen Messbereich bis zu 1 N&hahog;m sind Teil verschiedener Präzisionsgeräte, wie beispielsweise Roboter oder Werkzeuge für medizinische Operationen und Nanofabrikationsgeräte. Die Drehmomentsensoren benötigen häufig eine Kalibrierung, für die eine Rückführbarkeit nachgewiesen werden muss. Gemäß gesetzlichem Auftrag haben die nationalen metrologischen Institute die Aufgabe, die Drehmomenteinheiten zu realisieren und die geforderte Rückführbarkeit zu ermöglichen. Dieser Artikel zeigt, wie nach einem neuen Prinzip statische Drehmomente im Bereich von 1 mN&hahog;m bis 1 N&hahog;m erzeugt werden können. Ziel der laufenden Arbeiten war die Umsetzung dieser neuen Idee der Drehmomenterzeugung zur Schaffung einer neuen, präziseren Drehmoment-Normalmesseinrichtung. Die Leistungsfähigkeit der neuen Methode wurde mit der Erzeugung von statischen Drehmomenten nach dem Stand der Technik (PTB-Drehmoment-Normalmesseinrichtung) verglichen.



https://doi.org/10.1515/teme-2020-0090
Henning, Stefan; Linß, Sebastian; Gräser, Philipp; Theska, René; Zentner, Lena
Non-linear analytical modeling of planar compliant mechanisms. - In: Mechanism and machine theory, Bd. 155 (2021), 104067, insges. 15 S.

Compliant mechanisms are state of the art in technical applications, especially in precision engineering. They mostly achieve their motion due to bending-dominated deformation of their compliant segments, i.e. flexure hinges. Accurately analyzing a compliant mechanism in dependence of specific flexure hinges is still a challenging task due to the monolithic design and non-linearities caused by large deflections. Most existing accurate analytical models are restricted to single hinges. Therefore, this paper presents a non-linear analytical approach to calculate the elasto-kinematic properties of arbitrary planar compliant mechanisms. The approach is based on the theory for large deflections of rod-like structures. As a typical example, a compliant parallel four-bar linkage with varying compliant segments is investigated by means of the proposed analytical approach. The motion and deformation behavior are numerically calculated with the use of MATLAB®. It is shown, that the analytical results are in good correlation with FEM-based simulations and measurements of a manufactured prototype. To demonstrate the generality of the proposed method, two further and more complex mechanism examples are considered. As a result, the implemented modeling approach allows an accurate and fast analysis as well as synthesis of manifold planar compliant mechanisms with distributed or concentrated compliance.



https://doi.org/10.1016/j.mechmachtheory.2020.104067
Schienbein, Ralf; Theska, René; Fern, Florian; Füßl, Roland; Supreeti, Shraddha
Grundlegende Untersuchungen zur Entwicklung von fünfachsigen Nanopositioniermaschinen für Mess- und Fertigungszwecke. - In: Jahrbuch Optik und Feinmechanik, ISSN 0075-272X, Bd. 66 (2020), S. 67-92

Gon¸calves Junior, Luis Antonio; Theska, René; Lepikson, Herman A.; Ribeiro Junior, Armando Sá; Linß, Sebastian; Gräser, Philipp
Theoretical and experimental investigation of performance characteristics and design aspects of cross-spring pivots. - In: International journal of solids and structures, Bd. 185/186 (2020), S. 240-256

Cross-spring pivots have been widely employed over the last decades in a broad variety of precision engineering applications due to the high motion repeatability achieved thanks to the absence of stick slip and clearance. In this paper, the non-linear effect of the anticlastic curvature of the leaf-springs is considered for the accurate analytical modeling of the elasto-kinematic behavior of cross-spring pivots. Finite element analyses (FEA), based on a non-linear thin-shell model, are carried out in order to compare them with the analytical results for the main performance parameters of this type of device, i.e. center-shift, rotational stiffness and stress in the leaf-springs. Furthermore, an experimental setup is built to assess the applicability limits of both models. Finally, remarkable performance aspects of cross-spring pivots are discussed aiming for design improvements.



https://doi.org/10.1016/j.ijsolstr.2019.08.023
Darnieder, Maximilian; Torres, Mario; Linß, Sebastian; Theska, René; Zentner, Lena; Fröhlich, Thomas
Modellierung der Drehsteifigkeit dünner Festkörpergelenke in der Präzisionsgerätetechnik. - In: Jahrbuch Optik und Feinmechanik, ISSN 0075-272X, Bd. 64 (2018), S. 139-165

Festkörpergelenke werden seit langem in verschiedensten Bereichen der Feinwerktechnik eingesetzt, besonders dort, wo erhöhte Anforderungen an die Präzision bestehen. Beispiele dafür sind Präzisionswaagen und Massekomparatoren, die bereits eine beeindruckende Leistungsfähigkeit erreicht haben. Dies ist nicht zuletzt auf die genaue Kenntnis der mechanischen Eigenschaften und deren Modellierung zurückzuführen. Dennoch ergeben viele in der Literatur verfügbare analytische Modellgleichungen zur Berechnung der Drehsteifigkeit der hier typischen, besonders dünnen Festkörpergelenke eine Abweichung von rund 10 % gegenüber dem 3D-Modell basierend auf der Finiten-Elemente-Methode. Dies wird anhand der genauen Betrachtung des Spannungszustandes im belasteten Gelenk aufgezeigt und ist ein relevanter Aspekt für die Entwicklung von Geräten für Präzisionsanwendungen und deren Justierung. Der Beitrag beleuchtet dieses Phänomen im Detail, zeigt Grenzen verschiedener Modellansätze in Abhängigkeit der Geometrie auf und bietet dem Leser einen Vorschlag zur präzisen Modellierung in einem großen Parameterraum an, die ohne eine aufwändige Finite-Elemente-Analyse auskommt.



Torres Melgarejo, Mario André; Darnieder, Maximilian; Linß, Sebastian; Zentner, Lena; Fröhlich, Thomas; Theska, René
On modeling the bending stiffness of thin semi-circular flexure hinges for precision applications. - In: Actuators, ISSN 2076-0825, Bd. 7 (2018), 4, 86, S. 1-16

Compliant mechanisms based on flexure hinges are widely used in precision engineering applications. Among those are devices such as precision balances and mass comparators with achievable resolutions and uncertainties in the nano-newton range. The exact knowledge of the mechanical properties of notch hinges and their modeling is essential for the design and the goal-oriented adjustment of these devices. It is shown in this article that many analytical equations available in the literature for calculating the bending stiffness of thin semi-circular flexure hinges cause deviations of up to 12% compared to simulation results based on the three-dimensional finite element model for the considered parameter range. A close examination of the stress state within the loaded hinge reveals possible reasons for this deviation. The article explains this phenomenon in detail and shows the limitations of existing analytical models depending on specific geometric ratios. An accurate determination of the bending stiffness of semi-circular flexure hinges in a wide range of geometric parameters without the need for an elaborate finite element analysis is proposed in form of FEM-based correction factors for analytical equations referring to Euler-Bernoulli's beam theory.



https://doi.org/10.3390/act7040086
Linß, Sebastian; Gräser, Philipp; Räder, Thomas; Henning, Stefan; Theska, René; Zentner, Lena
Influence of geometric scaling on the elasto-kinematic properties of flexure hinges and compliant mechanisms. - In: Mechanism and machine theory, Bd. 125 (2018), S. 220-239

https://doi.org/10.1016/j.mechmachtheory.2018.03.008
Darnieder, Maximilian; Pabst, Markus; Wenig, Ronny; Zentner, Lena; Theska, René; Fröhlich, Thomas
Static behavior of weighing cells. - In: Journal of sensors and sensor systems, ISSN 2194-878X, Bd. 7 (2018), 2, S. 587-600

https://doi.org/10.5194/jsss-7-587-2018
Marangoni, Rafael R.; Rahneberg, Ilko; Hilbrunner, Falko; Theska, René; Fröhlich, Thomas
Analysis of weighing cells based on the principle of electromagnetic force compensation. - In: Measurement science and technology, ISSN 1361-6501, Bd. 28 (2017), 7, S. 075101, insges. 7 S.

https://doi.org/10.1088/1361-6501/aa6bcd
Steinbach, Manfred; Höhne, Günther; Schilling, Manfred; Theska, René
Werner Bischoff : Teil 2: Sein Leben in Ilmenau. - In: Jenaer Jahrbuch zur Technik- und Industriegeschichte, ISSN 2198-6746, Bd. 19 (2016), S. 377-393

Wolhfahrt, Fabian; Theska, René
Force-controlled measuring cell in delatometry. - In: Ceramic forum international, ISSN 0173-9913, Bd. 93 (2016), 4/5, S. E22-E28

Bao, Bui Dinh; Latyev, Svjatoslav M.; Theska, René
Automation of lenses centering at gluing in the frame :
Avtomatizacija centrirovki linz pri vklejke v opravy. - In: Scientific and technical journal of information technologies, mechanics and optics, ISSN 2500-0373, Bd. 15 (2015), 6, S. 1030-1035

http://dx.doi.org/10.17586/2226-1494-2015-15-6-1030-1035
Scheibe, Hannes; Theska, René
Lösungsansätze zur wirtschaftlichen Fertigung von Präzisionsasphären. - In: Jahrbuch Optik und Feinmechanik, ISSN 0075-272X, Bd. 61 (2015), S. 83-98

Dieser Beitrag diente der Aufarbeitung des aktuellen Standes der Technik zur Politur rotationssymmetrischer Asphären. Dabei konnten der Durchpolierprozess als wesentlicher Kostentreiber identifiziert und mögliche Ansätze zur Weiterentwicklung / Optimierung bestehender Herstellverfahren abgeleitet werden. Startpunkt der Betrachtung bildete die Beschreibung des Bonnet Polishing, der aktuell meistverbreiteten Fertigungstechnologie zum Vorpolieren rotationssymmetrischer Asphären und Freiformoptiken. Wesentliche Nachteile dieses subaperturigen Polierverfahren wurden dargestellt. Darauf aufbauend erfolgte die Vorstellung und Beschreibung dreier Ansätze mit dem Ziel einer Prozesszeitverringerung durch: eine Prozessparameteroptimierung, eine Multiwerkzeuganordnung sowie ein großflächiges, aktivadaptives Polierwerkzeug. Eine anschließende Bewertung hinsichtlich Erfolgsaussichten, Realisierungsaufwand sowie Flexibilität bilden den Abschluss.



Chilian, Gunhild;
Institut für Maschinen- und Gerätekonstruktion (IMGK). - In: Jenaer Jahrbuch zur Technik- und Industriegeschichte, ISSN 2198-6746, Bd. 18 (2015), S. 53-133
Literaturangaben

Weber, Christian; Theska, René; Sinzinger, Stefan
Die Entwicklung der Fakultät von 1955 bis 2015. - In: Jenaer Jahrbuch zur Technik- und Industriegeschichte, ISSN 2198-6746, Bd. 18 (2015), S. 11-34
Literaturverzeichnis

Oliveira, Rafael S.; Winter, Simon; Lepikson, Herman A.; Fröhlich, Thomas; Theska, René
A new approach to test torque transducers under dynamic reference regimes. - In: Measurement, Bd. 58 (2014), S. 354-362

A system is proposed to test torque transducers under reference dynamic regimes, where the reference torque is provided by the application of angular acceleration to a coupled mass moment of inertia. The dynamic regimes include different angular velocity intervals, angular velocity steps and high torque rates. A basic general assembly is proposed and theoretical and practical analyses are performed to determine the primary parameters and depict components. The results show that the angular velocity and torque curves are repeatable and also that the simultaneous responses of torque and acceleration are linear. The mass moments of inertia involved in the measurement process are evaluated. The results provide a positive direction for future tests with transducers and the objective to fill the gap in the metrological traceability chain for torque measurement with dynamic tests and sensor verification.



http://dx.doi.org/10.1016/j.measurement.2014.09.020
Schröter, Tobias J.; Johnson, Shane B.; John, Kerstin; Santi, Peter A.
Scanning thin-sheet laser imaging microscopy (sTSLIM) with structured illumination and HiLo background rejection. - In: Biomedical optics express, ISSN 2156-7085, Bd. 3 (2012), 1, S. 170-177

http://dx.doi.org/10.1364/BOE.3.000170
Selva Ginani, Luciano; Motta, Jose Mauricio S.T.
Theoretical and practical aspects of robot calibration with experimental verification. - In: Journal of the Brazilian Society of Mechanical Sciences and Engineering, ISSN 1806-3691, Bd. 33 (2011), 1, S. 15-21

https://doi.org/10.1590/S1678-58782011000100003
Latyev, Svjatoslav M.; Smirnov, Aleksej P.; Frolov, Dmitry N.; Tabachkov, Alexey G.; Theska, René
Providing target performance indices when automating the assembly of microscope objectives. - In: Journal of optical technology, ISSN 1091-0786, Bd. 77 (2010), 1, S. 38-41

http://dx.doi.org/10.1364/JOT.77.000038
Khajavikhan, Mercedeh; John, Kerstin; Leger, James R.
Experimental measurements of supermodes in superposition architectures for coherent laser beam combining. - In: IEEE journal of quantum electronics, Bd. 46 (2010), 8, S. 1221-1231

http://dx.doi.org/10.1109/JQE.2010.2045344
Latyev, Svjatoslav M.; Smirnov, Aleksej P.; Voronin, Andrey A.; Padun, Boris S.; Yablochnikov, E. I.; Frolov, Dmitry N.; Tabachkov, Alexey G.; Theska, René; Zocher, Klaus-Peter
The concept of an automatic assembly line for microscope objectives, based on adaptive selection of their components. - In: Journal of optical technology, ISSN 1091-0786, Bd. 76 (2009), 7, S. 436-439

http://dx.doi.org/10.1364/JOT.76.000436
Schilling, Manfred;
Fassen optischer Bauelemente. - In: Gerätekonstruktion, (2000), S. 476-495

Schilling, Manfred;
Übersicht über optische Systeme. - In: Gerätekonstruktion, (2000), S. 469-476

Schilling, Manfred;
Genauigkeit und Fehlerverhalten. - In: Gerätekonstruktion, (2000), S. 142-157

Schilling, Manfred;
Konstruktionsprinzipien. - In: Gerätekonstruktion, (2000), S. 127-142

Schilling, Manfred;
Grundbegriffe der Zuverlässigkeit, Beschaffenheit und Verhalten von Geräten. - In: Gerätekonstruktion, (2000), S. 126-127

Schilling, Manfred; Witte, Inge
Zuverlässigkeit. - In: Gerätekonstruktion, (2000), S. 174-201

Gevorgyan, Gevorg; Heinritz, Wolfgang
Verschleißuntersuchungen von selbstschmierenden Polymerwerkstoffen unter Vakuum. - In: Forschung und Lehre im Institut für Maschinenelemente und Konstruktion, (1999), S. 13-17

Schilling, Manfred;
Spann-, Schritt- und Sprungwerke. - In: Konstruktionselemente der Feinmechanik, (1993), S. 521-532

Rauch, Manfred; Schilling, Manfred
Anschläge, Bremsen und Dämpfer. - In: Konstruktionselemente der Feinmechanik, (1993), S. 463-486

Schilling, Manfred;
Gehemme und Gesperre. - In: Konstruktionselemente der Feinmechanik, (1993), S. 445-462

Schilling, Manfred;
Führungen. - In: Konstruktionselemente der Feinmechanik, (1993), S. 407-434

Höhne, Günter; Krause, Werner; Krause, Werner *1937-2023*; Schilling, Manfred;
Charakterisierung und Systematik der Konstruktionselemente. - In: Konstruktionselemente der Feinmechanik, (1993), S. 19-24

Braunschweig, Marion; Löwe, Bernhard; Schilling, Manfred;
Geregelter Zweikoordinaten-Hybridschrittmotor. - In: Tätigkeitsbericht / Technische Universität Ilmenau, Fakultät für Maschinenbau, (1992), S. 144-156

Höhne, Günter; Schilling, Manfred; Schorcht, Hans-Jürgen; Sperlich, Horst
Von der Konstruktionssystematik zur Konstruktionstechnik - eine Chronik der "Ilmenauer Schule" der Konstruktionslehre. - In: Wissenschaftliche Zeitschrift / Technische Hochschule Ilmenau, ISSN 0043-6917, Bd. 37 (1991), 5, S. 31-36