Multi-band double-directional 5G street canyon measurements in Germany. - In: 2019 European Conference on Networks and Communications (EuCNC), (2019), S. 123-127
https://doi.org/10.1109/EuCNC.2019.8801951
Comparision of deep etched borosilicate glasses in a fluorine based plasma. - In: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (Transducers & Eurosensors XXXIII), (2019), S. 1678-1681
https://doi.org/10.1109/TRANSDUCERS.2019.8808269
Synthesis method for compliant mechanisms of high-precision and large-stroke by use of individually shaped power function flexure hinges. - In: Advances in mechanism and machine science, (2019), S. 1569-1578
Optimization-based approach to the embodiment design of compliant mechanisms with different flexure hinges. - In: Advances in mechanism and machine science, (2019), S. 1579-1588
Computer modeling and experimental verification of a hybrid electromagnetic system with magnetic flux modulation. - In: 2019 16th Conference on Electrical Machines, Drives and Power Systems (ELMA), (2019), insges. 5 S.
https://doi.org/10.1109/ELMA.2019.8771639
Highly integrated RF-MEMS multi-frequency oscillator on a silicon-ceramic composite substrate. - In: 2019 IEEE MTT-S International Microwave Symposium (IMS), (2019), S. 782-785
https://ieeexplore.ieee.org/document/8700986
A wireless sensor system for traffic flow detection based on measurement of earth's magnetic field changes. - In: 2019 8th Mediterranean Conference on Embedded Computing (MECO), (2019), insges. 4 S.
https://doi.org/10.1109/MECO.2019.8760134
Parallel active cantilever AFM tool for high-throughput inspection and metrology. - In: Metrology, Inspection, and Process Control for Microlithography XXXIII, (2019), S. 1095929-1-1095929-6
Atomic Force Microscopy (AFM) is a capable to provide high resolution CD-metrology and precise defects analysis on large wafers, masks or displays. However, AFM is not enough productive for high-throughput industrial uses. Standard single probe AFMs are showing low throughput as a serial imaging tools. The use of an array of four cantilevers as a Quattro-Array results in effective speed of 6 to 10 mm/s. An image size of 0.5 mm x 0.2 mm is achieved employing a piezoelectric positioner with a scan range of 200 [my]m x 200 [my]m and a resolution of 0.25 nm (x,y) and 0.2 nm (z), respectively. These capabilities are qualifying the Quattro-cantilever array system as fastest tool for. In this paper we present new results obtained with our Quattro-AFM high-throughput parallel SPM system that exhibits two key advances that are required for a successful deployment of SPM in time-efficient metrology, defect analysis and mask inspection.
https://doi.org/10.1117/12.2515091
Three-dimensional deformation of tendon-bone insertions under load. - In: Journal of morphology, ISSN 1097-4687, Volume 280 (2019), issue S1, Seite S213
https://doi.org/10.1002/jmor.21003
On the development and qualification of multiaxial designs of nanofabrication machines with ultra precision tool rotations. - In: Proceedings of the 19th International Conference of the European Society for Precision Engineering and Nanotechnology, (2019), insges. 2 S.
The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system with a repeatability in the nanometer range. This in combination with the specific nature of sensors and tools limits the addressable part geometries. This article contributes to the enhancement of multiaxial machine structures by the implementation of rotational movements while keeping the precision untouched. A parameter based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify general solution concepts and adequate substructures. It further on contains data based on comprehensive design catalogues, uncertainty calculations and CAD-model based footprint analysis for specific setups. First evaluations show high potential for sample scanning mode variants considering linear movements of the object in combination with angular movements of the tool, considering a goniometer setup in specific. Based on this, positioning systems for the tool rotation of a NPMM were selected and the positioning properties of different arrangements were determined in test series using autocollimators. General properties of the influence of the arrangement were derived. The arrangement of the substructures which fulfils the previous given requirements is integrated into the NPMM and investigated for long-term stability using a retroreflector as a tool and various laser interferometers. The influence of the additional positioning systems on the existing structure of NPMMs are investigated and solutions for the optimization of the overall system with regard to reproducibility and long-term stability are developed. For this purpose, comprehensive FEA simulations are carried out and structural adjustments are derived via topology optimizations. After all, the knowledge gained is formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.