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Prof. Dr. Stefan Sinzinger


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Silicon on Ceramics at a glance

SiCer is a new silicon-ceramic wafer compound material originally designed for MEMS applications without any additional joining material. The method is based on a bonding procedure between a nano patterned silicon surface (modified Black Silicon) and LTCC (Low Temperature Cofired Ceramic).

With the novel substrate material advantages of reliability, thermal stability and chemically inertness offered by an established standard ceramic technology (LTCC) can be combined with the thin film precision using MEMS/CMOS technology. Especially tough mechanical, electrical or fluidic connections to micro- and nano-structures without affecting their functionality can be achieved.