Technische Universität Ilmenau

Micro- and nanosystems technology 2 - Modultafeln of TU Ilmenau

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Please refer to the respective study and examination rules and regulations for the legally binding curricula (Annex Curriculum).

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module properties module number 5627 - common information
module number5627
departmentDepartment of Electrical Engineering and Information Technology
ID of group2143 (Micro- and Nanoelectronic Systems)
module leaderProf. Dr. Martin Ziegler
languageDeutsch und Englisch
term Wintersemester
previous knowledge and experience

Participation in the course "Micro and nano sensor technology"

learning outcome

Students acquire an overview on basic and background of micro- and nanosystem technology, devices and fabrication technology. They aquire knowledge to understand original literature, to design and use micro devices.

content

1. The course includes an introduction to the advanced micro- and nanotechnologies and their classification.

2. The course also includes and overview of the modern micro- and nano-systems technologies and their microsystem realization.

3. The exercice deepens the knowledge of technologies and applications of micro- and nano-systems technology by means of seminar presentations on the basis of literature review.

media of instruction and technical requirements for education and examination in case of online participation

Overhead projector, beamer, blackboard

literature / references

B. Heimann, W. Gerth, K. Popp: Mechatronik; Hanser Verlag München, 1998

S. E. Lyschevski: Nano- and micromechanical systems, CRC Press, 2005

Gerald Gerlach, Wolfram Dötzel, Einführung in die Mikrosystemtechnik, Hanser, München-Wien 2006

G. Gerlach, W. Dötzel, Introduction to Microsystem Technology, Wiley & Sons, 2008

W. Menz, J. Mohr, O. Paul, Mikrosystemtechnik für Ingenieure, Weinheim, Wiley-VCH, 3. Auflage (2005)

U. Mescheder, Mikrosystemtechnik, Wiesbaden, Teubner, 2. Auflage (2004)

M. Glück, MEMS in der Mikrosystemtechnik, Wiesbaden, Teubner (2005)

Friedemann Völklein, Praxiswissen Mikrosystemtechnik : Grundlagen, Technologien, Anwendungen. Wiesbaden, Vieweg (2006)

Friedemann Völklein, Einführung in die Mikrosystemtechnik : Grundlagen und Praxisbeispiele. Braunschweig, Vieweg (2000)

Werner Karl Schomburg, Introduction to Microsystem Design, Springer, Berlin-Heidelberg 2015

Nam-Trung Nguyen, Mikrofluidik, Teubner, Wiesbaden 2004

Nguyen/Wereley, Fundamentals and Applications of Microfluidics, Artech House, Boston-London 2002

evaluation of teaching

Pflichtevaluation:

Freiwillige Evaluation:

Hospitation:

Details reference subject
module nameMicro- and nanosystems technology 2
examination number2100196
credit points4
SWS3
on-campus program (h)33.75
self-study (h)86.25
obligationobligatory module
examoral examination performance, 30 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
Details in degree program Diplom Elektrotechnik und Informationstechnik 2017
module nameMicro- and nanosystems technology
examination number2100565
credit points5
on-campus program (h)45
self-study (h)105
obligationelective module
examoral examination performance, 30 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
Details in degree program Master Micro- and Nanotechnologies 2008
ATTENTION: not offered anymore
module nameMicro- and nanosystems technology 2
examination number2100196
credit points4
on-campus program (h)34
self-study (h)86
obligationobligatory module
examoral examination performance, 30 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants