Technische Universität Ilmenau

Mikro- und Nanotechnologiepraktikum - Modultafeln of TU Ilmenau

The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only).
Information on the room and time of planned courses can be found in the e-calendar of events. Courses and examinations that are not listed in the e-calendar of events are planned "by appointment". A list of the events concerned can be found here: courses, examinations.

module properties 5973 - common information
module number5973
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2142 (Nanotechnology Group)
module leaderProf. Dr. Heiko Jacobs
requirements
learning outcomeDie Studierenden sind in der Lage ausgewählte mikro- und nanoelektronische sowie mikromechanische Bauelemente herzustellen. Die Studenten besitzen die Fachkompetenz um Technologieabläufe zur Herstellung von Halbleiterbauelementen zu planen und durchzuführen. Sie besitzen die Fachkompetenz Bauelemente zu charakterisieren und Fehlfunktionen zu identifizieren.
Details in major Master Micro- and Nanotechnologies 2008
module nameMikro- und Nanotechnologiepraktikum
credit points3
Obligationobligatory
certificate of the module Individual achievements or exams
details of the certificate