Technische Universit├Ąt Ilmenau

Laboratory for Materials & Micro/Nanofabrication - Modultafeln of TU Ilmenau

The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only). Information on place and time of the actual lectures is served in the Vorlesungsverzeichnis.

module properties 101731 - common information
module number101731
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2142 (Nanotechnology Group)
module leaderProf. Dr. Heiko Jacobs
learning outcome

This module is a combined laboratory course offered by Prof. Jacobs and Prof. Schaaf to gain hands-on practical experience on the technologies used for the production and characterization of modern materials, semiconductor devices, and sensors.
Students acquire basic knowledge on materials commonly used in micro/nanotechnology and modern sensors. They gain knowledge in basic properties, applications, and production of such materials.
The students also gain knowledge of basics production methods including lithography, patterning, etching, and the production of thin films commonly used for the fabrication of semiconductor devices, integrated circuits, microsystems, and sensors.
Appropriate materials and production methods will be realized directly in the lab by addressing specific tasks.

Details in major Master Micro- and Nanotechnologies 2016
module nameLaboratory for Materials & Micro/Nanofabrication
credit points5
certificate of the module Individual achievements or exams
details of the certificate

lab attestations and lab reports