Technische Universität Ilmenau

Micro/Nanofabrication Laboratory - Modultafeln of TU Ilmenau

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module properties module number 101728 - common information
module number101728
departmentDepartment of Electrical Engineering and Information Technology
ID of group2142 (Nanotechnology)
module leaderProf. Dr. Heiko Jacobs
languageEnglish (Deutsch)
term Sommersemester
previous knowledge and experience

Physics, Chemistry, Materials, and Electronics at the Bachelor level

learning outcome

The participant obtains hands-on experience in the fabrication of micro and nanotechnological devices.
The majority of the experiments will be carried out within am educational laboratory setting which houses the required equipment.
The student get familiar with the equipment and the process flow commonly used in the fabrication of micro and nanotechnological devices.
Learning Goals:
The participant gains basic skills on the technological steps used in the manufacturing of modern micro/nanofabricated devices which integrate electronic and sensing elements in a small form factor integrated system.
The participant gets to know the equipment, measuring techniques, and principles of operation.
The lab-course mimics the main steps of semiconductor processing as it is used in the industry today and provide an important link to the theory which was provided in the lectures.
The lab-course provides an entry to the fabrication and processing of modern semiconductor devices which includes the fields of MEMS, NEMS, Sensors, Electronics, Photovoltaics, Bioelectronics, Nanoelectronics to name the most relevant today.

content

Lab course on selected problems:
You will apply the technology to fabricate a micro mechanical pressure sensor based on a Si membrane integrated on a Si - chip.
You will study the influence of technological processing parameters on device properties.
The processing you will carry out includes: Wafer cleaning, Thermal Oxidation, Sputtering and Evaporation, Dry Etching, Spin Coating, and Electrical contact formation
Characterisation methods include: Optical Microscopy, Ellipsometric measurements, and Electrical characterisation/probe station.
You will also get a brief introduction to the operation of vacuum pumps and vacuum measurement equipment commonly used in the industry.

Praktikumsverantwortlicher: M. Sc. Leslie Schlag

Liebe Studierende, zwecks Planung der Praktika melden Sie sich bitte an leslie.schlag@tu-ilmenau.de

media of instruction and technical requirements for education and examination in case of online participation

Lab course instruction manual

literature / references

Menz, W.; Mohr, J.; Paul, O.: Mikrosystemtechnik für Ingenieure. – 3., vollst. überarb. und erw. Aufl. –Weinheim: Wiley-VCH, 2005

evaluation of teaching
Details reference subject
module nameMicro/Nanofabrication Laboratory
examination number2100558
credit points3
SWS2
on-campus program (h)22.5
self-study (h)67.5
obligationobligatory module
examoral pass-fail certificate, 30 minutes
details of the certificate

lab attestations and lab reports

alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants25
Details in degree program Master Micro- and Nanotechnologies 2016
module nameMicro/Nanofabrication Laboratory
examination number2100558
credit points3
on-campus program (h)22
self-study (h)68
obligationobligatory module
examoral pass-fail certificate, 30 minutes
details of the certificate

lab attestations and lab reports

alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants25