Technische Universit├Ąt Ilmenau

Laboratory for Materials & Micro/Nanofabrication - Modultafeln of TU Ilmenau

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module properties module number 101731 - common information
module number101731
departmentDepartment of Electrical Engineering and Information Technology
ID of group2142 (Nanotechnology)
module leaderProf. Dr. Heiko Jacobs
term unbekannt
previous knowledge and experience
learning outcome

This module is a combined laboratory course offered by Prof. Jacobs and Prof. Schaaf to gain hands-on practical experience on the technologies used for the production and characterization of modern materials, semiconductor devices, and sensors.
Students acquire basic knowledge on materials commonly used in micro/nanotechnology and modern sensors. They gain knowledge in basic properties, applications, and production of such materials.
The students also gain knowledge of basics production methods including lithography, patterning, etching, and the production of thin films commonly used for the fabrication of semiconductor devices, integrated circuits, microsystems, and sensors.
Appropriate materials and production methods will be realized directly in the lab by addressing specific tasks.

media of instruction and technical requirements for education and examination in case of online participation
literature / references
evaluation of teaching
Details reference subject
module nameLaboratory for Materials & Micro/Nanofabrication
examination number90700
credit points5
on-campus program (h)0
self-study (h)150
obligationobligatory module
exammultiple performances
details of the certificate

lab attestations and lab reports

alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants