Technische Universität Ilmenau

Mikro- und Nanotechnologiepraktikum - Modultafeln of TU Ilmenau

The module lists provide information on the degree programmes offered by the TU Ilmenau.

Please refer to the respective study and examination rules and regulations for the legally binding curricula (Annex Curriculum).

You can find all details on planned lectures and classes in the electronic university catalogue.

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module properties module number 5973 - common information
module number5973
departmentDepartment of Electrical Engineering and Information Technology
ID of group2142 (Nanotechnology)
module leaderProf. Dr. Heiko Jacobs
language
term unbekannt
previous knowledge and experience
learning outcomeDie Studierenden sind in der Lage ausgewählte mikro- und nanoelektronische sowie mikromechanische Bauelemente herzustellen. Die Studenten besitzen die Fachkompetenz um Technologieabläufe zur Herstellung von Halbleiterbauelementen zu planen und durchzuführen. Sie besitzen die Fachkompetenz Bauelemente zu charakterisieren und Fehlfunktionen zu identifizieren.
content
media of instruction and technical requirements for education and examination in case of online participation
literature / references
evaluation of teaching
Details reference subject
module nameMikro- und Nanotechnologiepraktikum
examination number90500
credit points3
SWS0
on-campus program (h)0
self-study (h)90
obligationobligatory module
exammultiple performances
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants