Technische Universität Ilmenau

Micro- and nanosystems technology - Modultafeln of TU Ilmenau

The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only). Information on place and time of the actual lectures is served in the Vorlesungsverzeichnis.

subject properties subject number 5627 - common information
subject number5627
departmentDepartment of Electrical Engineering and Information Technology
ID of group2143 (Micro- and nanoelectronic Systems Group)
subject leaderProf. Dr. Martin Ziegler
languageenglisch
term Wintersemester
previous knowledge and experience

Participation in the course "Micro and nano sensor technology"

learning outcome

Students acquire an overview on basic and background of micro- and nanosystem technology, devices and fabrication technology. They aquire knowledge to understand original literature, to design and use micro devices.

content
  • Requirements of micro- and nanotechnology;
  • material properties and choice of materials;
  • physical and engineering backgrounds of microsystem technology;
  • fabrication and functionality of miniature sensors or actuators based on selected examples
media of instruction

Overhead projector, beamer, blackboard

literature / references

B. Heimann, W. Gerth, K. Popp: Mechatronik; Hanser Verlag München, 1998

S. E. Lyschevski: Nano- and micromechanical systems, CRC Press, 2005

Gerald Gerlach, Wolfram Dötzel, Einführung in die Mikrosystemtechnik, Hanser, München-Wien 2006

G. Gerlach, W. Dötzel, Introduction to Microsystem Technology, Wiley & Sons, 2008

W. Menz, J. Mohr, O. Paul, Mikrosystemtechnik für Ingenieure, Weinheim, Wiley-VCH, 3. Auflage (2005)

U. Mescheder, Mikrosystemtechnik, Wiesbaden, Teubner, 2. Auflage (2004)

M. Glück, MEMS in der Mikrosystemtechnik, Wiesbaden, Teubner (2005)

Friedemann Völklein, Praxiswissen Mikrosystemtechnik : Grundlagen, Technologien, Anwendungen. Wiesbaden, Vieweg (2006)

Friedemann Völklein, Einführung in die Mikrosystemtechnik : Grundlagen und Praxisbeispiele. Braunschweig, Vieweg (2000)

Werner Karl Schomburg, Introduction to Microsystem Design, Springer, Berlin-Heidelberg 2015

Nam-Trung Nguyen, Mikrofluidik, Teubner, Wiesbaden 2004

Nguyen/Wereley, Fundamentals and Applications of Microfluidics, Artech House, Boston-London 2002

evaluation of teaching

Pflichtevaluation:

Freiwillige Evaluation:

Hospitation:

Details in major Master Micro- and Nanotechnologies 2016
subject nameMicro- and nanosystems technology
examination number2100565
credit points5
on-campus program (h)45
self-study (h)105
Obligationobligatory elective
examoral examination performance, 30 minutes
details of the certificate
maximum number of participants
Details in major Master Micro- and Nanotechnologies 2008
ATTENTION: not offered anymore
subject nameMicro- and nanosystems technology 2
examination number2100196
credit points4
on-campus program (h)34
self-study (h)86
Obligationobligatory
examoral examination performance, 30 minutes
details of the certificate
maximum number of participants
Details in major Master Micro- and Nanotechnologies 2013
ATTENTION: not offered anymore
subject nameMicro- and nanosystems technology 2
examination number2100196
credit points5
on-campus program (h)45
self-study (h)105
Obligationobligatory elective
examoral examination performance, 30 minutes
details of the certificate
maximum number of participants