Technische Universität Ilmenau

Micro- and nanosystem engineering - Modultafeln of TU Ilmenau

The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only). Information on place and time of the actual lectures is served in the Vorlesungsverzeichnis.

subject properties subject number 5962 - common information
subject number5962
ID of group2143 (Micro- and nanoelectronic Systems Group)
subject leaderProf. Dr. Martin Ziegler
term Wintersemester
previous knowledge and experienceBachelor-Abschluß (Ingenieur- oder Naturwissenschaften)
learning outcomeDie Studierenden sind fähig Mikro- und Nanosysteme zu entwickeln, charakterisieren und optimieren. Sie besitzen die Fachkompetenz Mikro- und Nanosysteme durch lithografische Verfahren zu erstellen oder selbstorganisierte Prozesse zu deren Realisierung einzusetzen.

The subject area includes the following priorities:

- Design of the smallest systems

- Lithographic processes

- Etching technologies

- Metallization

- System Integration

media of instructionVorlesungen, Folien, Beamer
literature / referencesFoundations of Nanomechanics, A. Cleland, Springer, (2003)
Device Electronics for ICs, R.Muller & T. Kamins, John Wiley & Sons, Inc. (1997)
Advanced Microsystems, I.W.Rangelow ed, FSRM, (2000)
Integrated Micro-Motion Systems, F.Harashima, Elsevier, (1990)
Fundamentals of Microfabrication, M. Madow, CRN Press, 2002
AIP Handbook of Modern Sensors, J. Fraden, American Institute of Physics, (1999
Mesoscopic Electronics in Solid State Nanostructures, T. Heinzel, Wiley-VCH, Weinheim (2003)
Physics of Nanostructures, J.H. Davies and A.R. Long eds., Institute of Physics Publishing, Bristol (1992)
evaluation of teaching


Freiwillige Evaluation:


Details in major Master Micro- and Nanotechnologies 2008
ATTENTION: not offered anymore
subject nameMicro- and nanosystem engineering
examination number2100188
credit points4
on-campus program (h)34
self-study (h)86
examoral examination performance, 30 minutes
details of the certificate
maximum number of participants