Technische Universit├Ąt Ilmenau

Micro- and nanosensors - Modultafeln of TU Ilmenau

The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only). Information on place and time of the actual lectures is served in the Vorlesungsverzeichnis.

subject properties subject number 5994 - common information
subject number5994
departmentDepartment of Electrical Engineering and Information Technology
ID of group2143 (Micro- and nanoelectronic Systems Group)
subject leaderProf. Dr. Martin Ziegler
languageDeutsch, auf Nachfrage Englisch
term Wintersemester
previous knowledge and experience

Prerequisites are a basic knowledge in physics, chemistry, micro- and semiconductor technology



learning outcome

The students have a sound knowledge of the micro- and nano-sensor technology. They are able to understand stimulus and response in micro- and nano-scale systems. The analyze and evaluate micro and nano-sensors in terms of their principles and applications. They are able to synthesize micro and nano-sensors and to make use of them in the systems. The students have an understand of the structure and function of sensors for the main non-electrical measurement variables (e. g. temperature, humidity, gas concentration, ion concentration, flow rate, pressure, force, acceleration, displacement, angle, speed, light intensity, color, magnetic field strength, etc.). Particular attention is paid to so-called scanning- and resonant-probe techniques.  


The content of the course includes an introduction to the basics of sensor prinicples of common sensor technologies, as well as sensor of micro-technologies and the classification of sensors: (i) forms of energy and conversion, (ii) Physical effects of sensor nano-technology. The course also includes an overview of the sensors for mechanical, mass, thermal, chemical, magnetic and optical sizes and methods of sensors and their nano-system realization. The seminar deepens the knowledge of technologies and applications of nano-sensors by means of seminar presentations based on literature review.

media of instruction

Overheadprojektor, Beamer, Tafel

literature / references

Thomas Elbel: "Mikrosensorik" Vieweg-Verlag 1996 /ISBN 3-528-03377-0

J. Fraden: "Handbook of modern sensors" 1996, Springer

evaluation of teaching


Freiwillige Evaluation:


Details in major Master Micro- and Nanotechnologies 2008
ATTENTION: not offered anymore
subject nameMicro- and nanosensors
examination number2100186
credit points4
on-campus program (h)34
self-study (h)86
examoral examination performance, 30 minutes
details of the certificate
maximum number of participants