Micro- and nanosensors - Modultafeln of TU Ilmenau
The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only). Information on place and time of the actual lectures is served in the Vorlesungsverzeichnis.
|subject properties subject number 5994 - common information|
|department||Department of Electrical Engineering and Information Technology|
|ID of group||2143 (Micro- and nanoelectronic Systems Group)|
|subject leader||Prof. Dr. Martin Ziegler|
|language||Deutsch, auf Nachfrage Englisch|
|previous knowledge and experience|
Prerequisites are a basic knowledge in physics, chemistry, micro- and semiconductor technology
The students have a sound knowledge of the micro- and nano-sensor technology. They are able to understand stimulus and response in micro- and nano-scale systems. The analyze and evaluate micro and nano-sensors in terms of their principles and applications. They are able to synthesize micro and nano-sensors and to make use of them in the systems. The students have an understand of the structure and function of sensors for the main non-electrical measurement variables (e. g. temperature, humidity, gas concentration, ion concentration, flow rate, pressure, force, acceleration, displacement, angle, speed, light intensity, color, magnetic field strength, etc.). Particular attention is paid to so-called scanning- and resonant-probe techniques.
The content of the course includes an introduction to the basics of sensor prinicples of common sensor technologies, as well as sensor of micro-technologies and the classification of sensors: (i) forms of energy and conversion, (ii) Physical effects of sensor nano-technology. The course also includes an overview of the sensors for mechanical, mass, thermal, chemical, magnetic and optical sizes and methods of sensors and their nano-system realization. The seminar deepens the knowledge of technologies and applications of nano-sensors by means of seminar presentations based on literature review.
|media of instruction|
Overheadprojektor, Beamer, Tafel
|literature / references|
Thomas Elbel: "Mikrosensorik" Vieweg-Verlag 1996 /ISBN 3-528-03377-0
J. Fraden: "Handbook of modern sensors" 1996, Springer
|evaluation of teaching|
Master Micro- and Nanotechnologies 2008
ATTENTION: not offered anymore
|subject name||Micro- and nanosensors|
|on-campus program (h)||34|
|exam||oral examination performance, 30 minutes|
|details of the certificate|
|maximum number of participants|