Technische Universität Ilmenau

Materials of Micro- and Nanotechnologies - Modultafeln of TU Ilmenau

The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only). Information on place and time of the actual lectures is served in the Vorlesungsverzeichnis.

module properties 6956 - common information
module number6956
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2172 (Group of Materials for Electrical Engineering and Electronics)
module leaderProf. Dr. Peter Schaaf
requirements
learning outcome

Students know the various materials in micro- and nanotechnology and in sensorics. They gain knowledge about the basic materials properties, their application and the fabrication of such materials.
The students know the basics of fabrication of highly integrated circuits, the preparation of microsystems and sensors and how the materials have to be selected.
Various methods and steps, materials and their control and analysis are treated for selected applications.
In the seminar, the students gain deeper knowledge for selected examples, and the learn how to search information and how to present this in a talk and to discuss the problems.

Details in major Master Micro- and Nanotechnologies 2016
module nameMaterials of Micro- and Nanotechnologies
credit points5
Obligationobligatory
certificate of the module Individual achievements or exams
details of the certificate

The talk in the seminar is a prerequisite for admission to the written examination.

subject properties subject number 6956 - common information
subject number6956
departmentDepartment of Electrical Engineering and Information Technology
ID of group2172 (Group of Materials for Electrical Engineering and Electronics)
subject leaderProf. Dr. Peter Schaaf
languageEnglisch (Deutsch)
term Wintersemester
previous knowledge and experience

Knowledge in materials, physics, and chemistry on bachelor level.

Gute Grundkennte in Werkstoffe, Physik, Chemie, Elektrotechnik, Mechanik auf Bachelorniveau

learning outcome

Students are able to explain the mechanical and functional properties of materials in micro- and nanotechnology starting from the microscopic and submicroscopic structure. The can analyze changes in the properties and judge them for their applicability in new applications and can develop strategies for their implementation.
Students know the various materials in micro- and nanotechnology and in sensorics. They gain knowledge about the basic materials properties, their application and the fabrication of such materials.
The students know the basics of fabrication of highly integrated circuits, the preparation of microsystems and sensors and how the materials have to be selected.
Various methods and steps, materials and their control and analysis are treated for selected applications.
In the seminar, the students gain deeper knowledge for selected examples, and they learn how to search information and how to present this in a talk and to discuss the problems.

Die Studierenden sind in der Lage, mechanische und funktionale Eigenschaften der Werkstoffe im Mikro- und Nanometerbereich aus ihren mikroskopischen und submikroskopischen Aufbauprinzipien zu erklären und Eigenschaftsveränderungen gezielt zu analysieren, zu bewerten und für neue Anwendungen zu synthetisieren. Das Fach vermittelt Fach-, Methoden- und Systemkompetenz.

content

Materials for micro- and nanotechnology
1. Introduction
2. Thin films, deposition, transport mechanisms in thin films
2.1. basic processes during deposition
2.2. Epitaxy / Superlattices
2.3. Diffusion
2.4. Electromigration
2.5. functional properties of thin films
3. Mesoscopic Materials
3.1. Definition
3.2. Quantum interference
3.3. Applications
4. liquid crystals
5. carbon materials
6. Gradient materials
7. Properties and treatment of materials in basic technologies of micro- and nanotechnology
7.1. Lithography
7.2. Anisotropic etching
7.3. coating
7.4. LIGA-method
7.5. materials for packaging technology
8. materials for sensorics
9. materials for plasmonics
10. materials for energy conversion and storage

 

Werkstoffe der Mikro- und Nanotechnologie

1. Einführung
2. Dünnschichtzustand, Schichtbildung und Transportvorgänge in dünnen Schichten                          
2.1. Elementarprozesse beim Schichtaufbau
2.2. Epitaxie / Supergitter
2.3. Diffusion
2.4. Elektromigration
2.5. Spezielle funktionale Eigenschaften dünner Schichten
3. Werkstoffe im mesoskopischen Zustand
3.1. Definition
3.2. Quanteninterferenz
3.3. Anwendungen
4. Flüssigkristalle
4.1. Definition
4.2. Strukturen thermotroper Flüssigkristalle
4.3. Dynamische Streuung und Anwendungen
5. Kohlenstoff-Werkstoffe
5.1. Modifikationen des Kohlenstoff
5.2. Interkalation des Graphit
5.3. Fullerene
5.4. Nanotubes
6. Gradientenwerkstoffe
6.1. Gradierung durch Diffusion
6.2. Gradierung durch Ionenimplantation
7. Verhalten und Behandlung der Werkstoffe in den Basistechnologien der Mikro- und Nanotechnik
7.1. Lithografie
7.2. Anisotropes Ätzen
7.3. Beschichten
7.4. LIGA-Technik
7.5. Aufbau- und Verbindungstechnik
Die Vorlesung wird durch ein Praktikum begleitet.

media of instruction

Scriptum, powerpoint, computer demos, animations, specialized literature

 

literature / references

Specialized literature will be given in the course.
1. Introduction to nanoscience and nanomaterials. Agrawal. World Scientific.
2. Materials for microelectronics. Elsevier.
3. Werkstoffwissenschaft / W. Schatt; H. Worch / Wiley- VCH Verlag, 2003
4. Menz, W.; Mohr, J.; Paul, O.: Mikrosystemtechnik für Ingenieure. – Wiley-VCH, 2005
5. Grundlagen der Mikrosystemtechnik: Lehr- und Fachbuch / G. Gerlach; W. Dötzel / Hanser, 1997
6. Sensorik: Handbuch für Praxis und Wissenschaft / H.- R. Tränkler; E. Obermeier / Springer, 1998
7. Mikrosytemtechnik / W.-J. Fischer / Würzburg: Vogel, 2000
8. Schaumburg, H.: Sensoren / H. Schaumburg / Teubner, 1992
9. Frühauf, J.: Werkstoffe der Mikrotechnik; Hanser Verlag 2005
10. Mescheder, U.: Mikrosystemtechnik; Teubner-Verlag, 2004

evaluation of teaching

Pflichtevaluation:

Freiwillige Evaluation:

Hospitation:

Details in major Master Biotechnische Chemie 2016
subject nameMaterials for Micro- and Nanotechnology
examination number2100320
credit points5
on-campus program (h)45
self-study (h)105
Obligationobligatory elective
examwritten examination performance, 90 minutes
details of the certificate

Zulassung zur Klausur nur beo erfolgreich absolviertem Praktikum und erfolgreicher Seminarteilnahme, die durch einen Vortrag von 30min Dauer mit anschliessender Diskussion zu belegen ist.

maximum number of participants
Details in major Master Micro- and Nanotechnologies 2016
subject nameMaterials for Micro- and Nanotechnology
examination number2100555
credit points5
on-campus program (h)45
self-study (h)105
Obligationobligatory
examwritten examination performance, 90 minutes
details of the certificate

The successful participation in the seminar (talk and discussion) is a prerequisite for the admission to the written examination.

maximum number of participants
Details in major Master Werkstoffwissenschaft 2013
subject nameMaterials for Micro- and Nanotechnology
examination number2100320
credit points8
on-campus program (h)67
self-study (h)173
Obligationobligatory
examwritten examination performance, 90 minutes
details of the certificate

Zulassung zur Klausur nur beo erfolgreich absolviertem Praktikum und erfolgreicher Seminarteilnahme, die durch einen Vortrag von 30min Dauer mit anschliessender Diskussion zu belegen ist.

maximum number of participants
Details in major Master Werkstoffwissenschaft 2010, Master Werkstoffwissenschaft 2011
subject nameMaterials for Micro- and Nanotechnology
examination number2100320
credit points3
on-campus program (h)34
self-study (h)56
Obligationobligatory
examwritten examination performance, 90 minutes
details of the certificate

Zulassung zur Klausur nur beo erfolgreich absolviertem Praktikum und erfolgreicher Seminarteilnahme, die durch einen Vortrag von 30min Dauer mit anschliessender Diskussion zu belegen ist.

maximum number of participants
Details in major Bachelor Werkstoffwissenschaft 2009
subject nameMaterials for Micro- and Nanotechnology
examination number2100180
credit points3
on-campus program (h)34
self-study (h)56
Obligationobligatory elective
examwritten pass-fail certificate, 90 minutes
details of the certificate
maximum number of participants
Details in major Master Miniaturisierte Biotechnologie 2009
subject nameMaterials for Micro- and Nanotechnology
examination number2100320
credit points3
on-campus program (h)34
self-study (h)56
Obligationobligatory elective
examwritten examination performance, 90 minutes
details of the certificate

Zulassung zur Klausur nur beo erfolgreich absolviertem Praktikum und erfolgreicher Seminarteilnahme, die durch einen Vortrag von 30min Dauer mit anschliessender Diskussion zu belegen ist.

maximum number of participants