Technische Universität Ilmenau

Materials for Micro- and Nanotechnology - Modultafeln of TU Ilmenau

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module properties Materials for Micro- and Nanotechnology in degree program Master Biotechnische Chemie 2016
module number6956
examination number2100320
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2172 (Materials for Electrical Engineering and Electronics)
module leaderProf. Dr. Peter Schaaf
term winter term only
languageEnglisch (Deutsch)
credit points5
on-campus program (h)45
self-study (h)105
obligationelective module
examwritten examination performance, 90 minutes
details of the certificate

Zulassung zur Klausur nur bei erfolgreich absolviertem Praktikum und erfolgreicher Seminarteilnahme, die durch einen Vortrag von 30min Dauer mit anschliessender Diskussion zu belegen ist.

alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
previous knowledge and experience

Knowledge in materials science and engineering, physics, and chemistry on bachelor level.

learning outcome

Students are able to explain the mechanical and functional properties of materials in micro- and nanotechnology starting from the microscopic and submicroscopic structure. The can analyze changes in the properties and judge them for their applicability in new applications and can develop strategies for their implementation.
Students know the various materials in micro- and nanotechnology and in sensorics. They gain knowledge about the basic materials properties, their application and the fabrication of such materials.
The students know the basics of fabrication of highly integrated circuits, the preparation of microsystems and sensors and how the materials have to be selected.
Various methods and steps, materials and their control and analysis are treated for selected applications.
In the seminar, the students gain deeper knowledge for selected examples, and they learn how to search information and how to present this in a talk and to discuss the problems.


Docent: PD Dr. Dong Wang

Materials for micro- and nanotechnology
1. Introduction
2. Thin films, deposition, transport mechanisms in thin films
2.1. basic processes during deposition
2.2. Epitaxy / Superlattices
2.3. Diffusion
2.4. Electromigration
2.5. functional properties of thin films
3. Mesoscopic Materials
3.1. Definition
3.2. Quantum interference
3.3. Applications
4. liquid crystals
5. carbon materials
6. Gradient materials
7. Properties and treatment of materials in basic technologies of micro- and nanotechnology
7.1. Lithography
7.2. Anisotropic etching
7.3. coating
7.4. LIGA-method
7.5. materials for packaging technology
8. materials for sensorics
9. materials for plasmonics
10. materials for energy conversion and storage


media of instruction and technical requirements for education and examination in case of online participation

Scriptum, powerpoint, computer demos, animations, specialized literature


literature / references

Specialized literature will be given in the course.
1. Introduction to nanoscience and nanomaterials. Agrawal. World Scientific.
2. Materials for microelectronics. Elsevier.
3. Werkstoffwissenschaft / W. Schatt; H. Worch / Wiley- VCH Verlag, 2003
4. Menz, W.; Mohr, J.; Paul, O.: Mikrosystemtechnik für Ingenieure. – Wiley-VCH, 2005
5. Grundlagen der Mikrosystemtechnik: Lehr- und Fachbuch / G. Gerlach; W. Dötzel / Hanser, 1997
6. Sensorik: Handbuch für Praxis und Wissenschaft / H.- R. Tränkler; E. Obermeier / Springer, 1998
7. Mikrosytemtechnik / W.-J. Fischer / Würzburg: Vogel, 2000
8. Schaumburg, H.: Sensoren / H. Schaumburg / Teubner, 1992
9. Frühauf, J.: Werkstoffe der Mikrotechnik; Hanser Verlag 2005
10. Mescheder, U.: Mikrosystemtechnik; Teubner-Verlag, 2004

evaluation of teaching


WS 2018/19 (Fach)

Freiwillige Evaluation: