Technische Universit├Ąt Ilmenau

Micro- and nanosensors - Modultafeln of TU Ilmenau

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module properties Micro- and nanosensors in degree program Master Micro- and Nanotechnologies 2008
ATTENTION: not offered anymore
module number5994
examination number2100186
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2143 (Micro- and Nanoelectronic Systems)
module leaderProf. Dr. Martin Ziegler
term winter term only
languageDeutsch, auf Nachfrage Englisch
credit points4
on-campus program (h)34
self-study (h)86
obligationobligatory module
examoral examination performance, 30 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
previous knowledge and experience

Prerequisites are a basic knowledge in physics, chemistry, micro- and semiconductor technology



learning outcome

The students have a sound knowledge of the micro- and nano-sensor technology. They are able to understand stimulus and response in micro- and nano-scale systems. The analyze and evaluate micro and nano-sensors in terms of their principles and applications. They are able to synthesize micro and nano-sensors and to make use of them in the systems. The students have an understand of the structure and function of sensors for the main non-electrical measurement variables (e. g. temperature, humidity, gas concentration, ion concentration, flow rate, pressure, force, acceleration, displacement, angle, speed, light intensity, color, magnetic field strength, etc.). Particular attention is paid to so-called scanning- and resonant-probe techniques.  


The content of the course includes an introduction to the basics of sensor prinicples of common sensor technologies, as well as sensor of micro-technologies and the classification of sensors: (i) forms of energy and conversion, (ii) Physical effects of sensor nano-technology. The course also includes an overview of the sensors for mechanical, mass, thermal, chemical, magnetic and optical sizes and methods of sensors and their nano-system realization. The seminar deepens the knowledge of technologies and applications of nano-sensors by means of seminar presentations based on literature review.

media of instruction and technical requirements for education and examination in case of online participation

Overheadprojektor, Beamer, Tafel

literature / references

Thomas Elbel: "Mikrosensorik" Vieweg-Verlag 1996 /ISBN 3-528-03377-0

J. Fraden: "Handbook of modern sensors" 1996, Springer

evaluation of teaching


Freiwillige Evaluation: