Technische Universität Ilmenau

Micro- and nanosystem engineering - Modultafeln of TU Ilmenau

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module properties Micro- and nanosystem engineering in degree program Master Micro- and Nanotechnologies 2008
ATTENTION: not offered anymore
module number5962
examination number2100188
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2143 (Micro- and Nanoelectronic Systems)
module leaderProf. Dr. Martin Ziegler
term winter term only
credit points4
on-campus program (h)34
self-study (h)86
obligationobligatory module
examoral examination performance, 30 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
previous knowledge and experienceBachelor-Abschluß (Ingenieur- oder Naturwissenschaften)
learning outcomeDie Studierenden sind fähig Mikro- und Nanosysteme zu entwickeln, charakterisieren und optimieren. Sie besitzen die Fachkompetenz Mikro- und Nanosysteme durch lithografische Verfahren zu erstellen oder selbstorganisierte Prozesse zu deren Realisierung einzusetzen.

The subject area includes the following priorities:

- Design of the smallest systems

- Lithographic processes

- Etching technologies

- Metallization

- System Integration

media of instruction and technical requirements for education and examination in case of online participationVorlesungen, Folien, Beamer
literature / referencesFoundations of Nanomechanics, A. Cleland, Springer, (2003)
Device Electronics for ICs, R.Muller & T. Kamins, John Wiley & Sons, Inc. (1997)
Advanced Microsystems, I.W.Rangelow ed, FSRM, (2000)
Integrated Micro-Motion Systems, F.Harashima, Elsevier, (1990)
Fundamentals of Microfabrication, M. Madow, CRN Press, 2002
AIP Handbook of Modern Sensors, J. Fraden, American Institute of Physics, (1999
Mesoscopic Electronics in Solid State Nanostructures, T. Heinzel, Wiley-VCH, Weinheim (2003)
Physics of Nanostructures, J.H. Davies and A.R. Long eds., Institute of Physics Publishing, Bristol (1992)
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