Technische Universität Ilmenau

Nanoelectronics - Modultafeln of TU Ilmenau

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module properties Nanoelectronics in degree program Master Micro- and Nanotechnologies 2008
module number5629
examination number2100193
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2143 (Micro- and Nanoelectronic Systems)
module leaderProf. Dr. Martin Ziegler
term summer term only
credit points4
on-campus program (h)34
self-study (h)86
obligationobligatory module
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
previous knowledge and experience

Course Fundamentals of Electronics

learning outcome

The students are introduced to the evolution of micro- and nanoelectronics and of important trends in this field. They become familiar with the design, operation, and relevant figures of merit of nanometer MOSFETs and with the problems of continuing MOSFET scaling. The students are introduced to additional relevant device and material concepts (e.g., nanotube and nanowire transistors, single electron transistors, spin transistors, beyond-transistor devices, two-dimensional materials) and to understand their operation. Moreover, they are enabled to critically assess future trends in nanoelectronics.

  • Evolution of semiconductor electronics from micro to nano.
  • Device structure and operation of classical and advanced non-classical nanometer MOSFETs.
  • MOSFET scaling.
  • Power consumption and self-heating.
  • Nanoelectronic devices for the Post-CMOS era.
  • Moore's Law: Past, present, and future


media of instruction and technical requirements for education and examination in case of online participation

PowerPoint presentations, blackboard, lecture notes (complete set of slides as PDF)

literature / references
  • Y. Taur and T. H. Ning, Fundamentals of Modern VLSI Devices, Cambridge University Press 1998, 2009.
  • F. Schwierz, H. Wong, and J. J. Liou, Nanometer CMOS, Pan Stanford 2010.
  • R. Waser (ed.), Nanoelectronics and Information Technology, Wiley VCH 2012.
  • A. Chen et al. (eds.), Emerging Nanoelectronic Devices, Wiley 2015.
evaluation of teaching


Freiwillige Evaluation: