Technische Universität Ilmenau

Micro- and nanosystems technology 2 - Modultafeln of TU Ilmenau

The module lists provide information on the degree programmes offered by the TU Ilmenau.

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module properties Micro- and nanosystems technology 2 in degree program Master Micro- and Nanotechnologies 2008
ATTENTION: not offered anymore
module number5627
examination number2100196
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2143 (Micro- and Nanoelectronic Systems)
module leaderProf. Dr. Martin Ziegler
term winter term only
languageDeutsch und Englisch
credit points4
on-campus program (h)34
self-study (h)86
obligationobligatory module
examoral examination performance, 30 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
previous knowledge and experience

Participation in the course "Micro and nano sensor technology"

learning outcome

Students acquire an overview on basic and background of micro- and nanosystem technology, devices and fabrication technology. They aquire knowledge to understand original literature, to design and use micro devices.


1. The course includes an introduction to the advanced micro- and nanotechnologies and their classification.

2. The course also includes and overview of the modern micro- and nano-systems technologies and their microsystem realization.

3. The exercice deepens the knowledge of technologies and applications of micro- and nano-systems technology by means of seminar presentations on the basis of literature review.

media of instruction and technical requirements for education and examination in case of online participation

Overhead projector, beamer, blackboard

literature / references

B. Heimann, W. Gerth, K. Popp: Mechatronik; Hanser Verlag München, 1998

S. E. Lyschevski: Nano- and micromechanical systems, CRC Press, 2005

Gerald Gerlach, Wolfram Dötzel, Einführung in die Mikrosystemtechnik, Hanser, München-Wien 2006

G. Gerlach, W. Dötzel, Introduction to Microsystem Technology, Wiley & Sons, 2008

W. Menz, J. Mohr, O. Paul, Mikrosystemtechnik für Ingenieure, Weinheim, Wiley-VCH, 3. Auflage (2005)

U. Mescheder, Mikrosystemtechnik, Wiesbaden, Teubner, 2. Auflage (2004)

M. Glück, MEMS in der Mikrosystemtechnik, Wiesbaden, Teubner (2005)

Friedemann Völklein, Praxiswissen Mikrosystemtechnik : Grundlagen, Technologien, Anwendungen. Wiesbaden, Vieweg (2006)

Friedemann Völklein, Einführung in die Mikrosystemtechnik : Grundlagen und Praxisbeispiele. Braunschweig, Vieweg (2000)

Werner Karl Schomburg, Introduction to Microsystem Design, Springer, Berlin-Heidelberg 2015

Nam-Trung Nguyen, Mikrofluidik, Teubner, Wiesbaden 2004

Nguyen/Wereley, Fundamentals and Applications of Microfluidics, Artech House, Boston-London 2002

evaluation of teaching


Freiwillige Evaluation: