Technische Universität Ilmenau

Mikro- und Nanotechnologiepraktikum - Modultafeln of TU Ilmenau

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module properties Mikro- und Nanotechnologiepraktikum in degree program Master Micro- and Nanotechnologies 2008
module nameMikro- und Nanotechnologiepraktikum
module number5973
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2142 (Nanotechnology)
module leaderProf. Dr. Heiko Jacobs
credit points3
obligationobligatory module
requirements
certificate of the module Individual achievements or exams
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
learning outcomeDie Studierenden sind in der Lage ausgewählte mikro- und nanoelektronische sowie mikromechanische Bauelemente herzustellen. Die Studenten besitzen die Fachkompetenz um Technologieabläufe zur Herstellung von Halbleiterbauelementen zu planen und durchzuführen. Sie besitzen die Fachkompetenz Bauelemente zu charakterisieren und Fehlfunktionen zu identifizieren.
The module contains the following subjects:
Micro- and nanotechnology practical training
credit points3
obligationobligatory module
certificate of the modulealternative pass-fail certificate
term ganzjährig