Technische Universität Ilmenau

Mikro- und Nanostrukturtechnik - Modultafeln of TU Ilmenau

The module lists provide information on the degree programmes offered by the TU Ilmenau.

Please refer to the respective study and examination rules and regulations for the legally binding curricula (Annex Curriculum).

You can find all details on planned lectures and classes in the electronic university catalogue.

Information and guidance on the maintenance of module descriptions by the module officers are provided at Module maintenance.

Please send information on missing or incorrect module descriptions directly to modulkatalog@tu-ilmenau.de.

module properties Mikro- und Nanostrukturtechnik in degree program Master Micro- and Nanotechnologies 2008
module nameMikro- und Nanostrukturtechnik
module number5961
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2142 (Nanotechnology)
module leaderProf. Dr. Heiko Jacobs
credit points12
obligationobligatory module
requirements
certificate of the module Individual achievements or exams
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
learning outcome

Das Modul enthält ausgewählte Lehrangebote mit ingenieurwissenschaftlichem und mit naturwissenschaftlichem Fokus. Die Studierenden sind in der Lage ausgewählte mikro- und nanoelektronische sowie mikromechanische Systeme herzustellen. Die Studenten besitzen die Fachkompetenz um Technologieabläufe zur Herstellung von Halbleiterbauelementen zu planen und durchzuführen. Sie besitzen die Fachkompetenz Mikro- und Nanosysteme durch eine „top-down” sowie „bottom-up” Technologie zu realisieren.

The module contains the following subjects:
Nanotechnology
credit points4
obligationobligatory module
certificate of the module examination performance
term Wintersemester
Micro- and nanosensors
credit points4
obligationobligatory module
certificate of the moduleoral examination performance, 30 minutes
term Wintersemester
Micro- and nanosystem engineering
credit points4
obligationobligatory module
certificate of the moduleoral examination performance, 30 minutes
term Wintersemester
Integrated Optics and Microoptics
credit points4
obligationobligatory module
certificate of the moduleoral examination performance, 30 minutes
term Sommersemester
Micro Actuators
credit points4
obligationelective module
certificate of the modulewritten examination performance, 90 minutes
term Wintersemester