Technische Universität Ilmenau

Micro-and nanostructure technology - Modultafeln of TU Ilmenau

The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only). Information on place and time of the actual lectures is served in the Vorlesungsverzeichnis.

module properties Micro-and nanostructure technology in major Master Micro- and Nanotechnologies 2013
module nameMicro-and nanostructure technology
module number100553
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2142 (Nanotechnology Group)
module leaderProf. Dr. Heiko Jacobs
credit points15
Obligationobligatory
requirements

Mikro- und Halbleitertechnologie Optoelektronik

certificate of the module Individual achievements or exams
details of the certificate
Signup details for alternative examinations
learning outcome

Das Modul enthält ausgewählte Lehrangebote mit ingenieurwissenschaftlichem und mit naturwissenschaftlichem Fokus.
Die Studierenden sind in der Lage ausgewählte mikro- und nanoelektronische sowie mikromechanische Systeme herzustellen. Die Studenten besitzen die Fachkompetenz um Technologieabläufe zur Herstellung von Halbleiterbauelementen zu planen und durchzuführen. Sie besitzen die Fachkompetenz Mikro- und Nanosysteme durch eine „top-down“ sowie „bottom-up“ Technologie zu realisieren.

The module contains the following subjects:
Micro- and semiconductor technology 1
credit points5
Obligationobligatory elective
certificate of the subjectoral examination performance, 30 minutes
term Sommersemester
Nanotechnology
credit points5
Obligationobligatory elective
certificate of the subjectwritten examination performance, 120 minutes
term Wintersemester
Micro- and nanosensor technology
credit points5
Obligationobligatory elective
certificate of the subjectoral examination performance, 30 minutes
term Sommersemester
Micro- and nanosystems technology 2
credit points5
Obligationobligatory elective
certificate of the subjectoral examination performance, 30 minutes
term Wintersemester
Micro- and nanotechnology practical training
credit points4
Obligationobligatory
certificate of the subjectalternative pass-fail certificate
term ganzjährig
Construction and connection technology for MNT
credit points4
Obligationobligatory elective
certificate of the subjectoral examination performance, 30 minutes
term Sommersemester
Microsystem Technologies 1
credit points4
Obligationobligatory elective
certificate of the subjectwritten examination performance, 90 minutes
term Sommersemester
Integrated Optics and Microoptics
credit points3
Obligationobligatory elective
certificate of the subjectoral examination performance, 30 minutes
term Sommersemester
Design of Microsystems
credit points4
Obligationobligatory elective
certificate of the subjectoral examination performance, 30 minutes
term Wintersemester
Micro Actuators
credit points3
Obligationobligatory elective
certificate of the subjectwritten examination performance, 90 minutes
term Wintersemester