Technische Universität Ilmenau

Micro and nano sensor technology - Modultafeln of TU Ilmenau

The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only).
Information on the room and time of planned courses can be found in the e-calendar of events. Courses and examinations that are not listed in the e-calendar of events are planned "by appointment". A list of the events concerned can be found here: courses, examinations.

subject properties Micro and nano sensor technology in major Master Micro- and Nanotechnologies 2016
subject number1455
examination number2100566
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2143 (Micro- and nanoelectronic Systems Group)
subject leaderProf. Dr. Martin Ziegler
term Wintersemester
credit points5
on-campus program (h)45
self-study (h)105
Obligationobligatory elective
examwritten examination performance, 90 minutes
details of the certificate
Signup details for alternative examinations
maximum number of participants
previous knowledge and experience

Mathematics, Physics, Electrical Engineering, Electronics

learning outcome

Learn and understand basic processes for acquiring non-electrical quantities, the construction and function of key sensors and their technology

  • Introduction to sensor technology: transducer principles, sensor materials, manufacturing process;
  • Inertial sensors: acceleration sensors, gyroscopes;
  • Mechanical Sensors: Strain Gages, Piezoresistive Sensors;
  • Magnetic sensors: Hall effect sensors, anisotropic magnetoresistive sensors, giant magnetoresistive based sensors;
  • Temperature sensors: thermistors, thermocouples;
  • Infrared sensors: photon detectors, thermal sensors and arrays;
  • Atomic force microscopy sensors
media of instruction

Overhead projector, beamer, blackboard

literature / references

Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka: Handbook of Silicon Based MEMS Materials and Technologies; William Andrew (2010)

Julien W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim: Microsensors MEMS and Smart Devices; Wiley (2001)

Kempe,Volker: Inertial MEMS: principles and practice; Cambridge University Press (2011)

Antonio Rogalski: Infrared Detectors; Taylor & Francis (2010)

Ricardo García: Amplitude Modulation Atomic Force Microscopy; Wiley-VCH (2010)

Ulrich Hilleringmann: Silizium-Halbleitertechnologie: Grundlagen mikroelektronischer Integrationstechnik; Springer (2019). Springer 1998 

evaluation of teaching


Freiwillige Evaluation: