Technische Universit├Ąt Ilmenau

Micro- and nanosensor technology - Modultafeln of TU Ilmenau

The Modultafeln have a pure informational character. The legally binding information can be found in the corresponding Studienplan and Modulhandbuch, which are served on the pages of the course offers. Please also pay attention to this legal advice (german only). Information on place and time of the actual lectures is served in the Vorlesungsverzeichnis.

subject properties Micro- and nanosensor technology in major Master Wirtschaftsingenieurwesen 2014 (ET)
subject number1455
examination number2100050
departmentDepartment of Electrical Engineering and Information Technology
ID of group 2143 (Micro- and nanoelectronic Systems Group)
subject leaderProf. Dr. Martin Ziegler
term Sommersemester
credit points5
on-campus program (h)45
self-study (h)105
Obligationobligatory elective
examoral examination performance, 30 minutes
details of the certificate
Signup details for alternative examinations
maximum number of participants
previous knowledge and experience

Prerequisites Mathematics, Physics, Electrical Engineering, Electronics

learning outcome

Knowledge and understanding of basic methods for detecting non-electrical quantities, the structure and function of important sensors and their technology.


- Introduction to sensors

- Transformer prinicples

- Sensor materials

- Manufactoring processes

- Teaching on temperature, pressure, acceleration sensors, piezoelectric sensors, magnetic sensors, optical sensors, infrared sensors, ultrasonic sensors, gas sensors, chemical sensors and biosensors

media of instruction

Overheadprojektor, Beamer, Tafel

literature / references

H. Schaumburg: Sensoren. Teubner, 1992

P. Hartmann: Sensoren - Prinzipien und Anwendungen. Hanser, 1991

H. Eigler: Mikrosensorik und Mikroelektronik. Expert, 2000

K.-W. Bonfis: Sensoren und Sensorsysteme. Expert, 1991

H.-R. Trünkler, E. Obermeier: Sensortechnik - Handbuch. Springer 1998 

evaluation of teaching


Freiwillige Evaluation: