Technische Universität Ilmenau

Microtechnology 2 - Modultafeln of TU Ilmenau

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module properties module number 101983 - common information
module number101983
departmentDepartment of Mechanical Engineering
ID of group2342 (Microsystems Technology)
module leaderProf. Dr. Steffen Strehle
languageEnglisch
term Sommersemester
previous knowledge and experience

Knowledge about basic microsystems and microsystems technology.

learning outcome

After the lectures and exercises the students are familiar with serveral fundamental microsystems and microtechnologies and can build on this knowledge.

The students are able to name modern methods of micro- and nanopatterning and to discuss their importance for the fabrication of selected microsystems partly based on mathematical models.

The students are familiar with the working principles of selected modern microsystems and are familiar with current research aspects. In addition, students are capable to develop own complex technological processes for the fabrication of advanced microsystems as well as selected microsystems.

They can critically analyze aspects of microsystem design, material selection, technological workflow, a perspective industrial realization as well as aspects of sustanability, partly based mathematical models.

Besides conventionally used microtechnologies and materials, students are capable to name novel attempts in the field and to evaluate their respective potential towards future applications.

 

content

1. Introduction in Microsystems Technologie: overview of microsystems, scaling, materials, basic microfabrication

2. Advanced microfabrication: nanoimprint lithography, thermal probe lithography, DUV/EUV-Lithography, plasma etching of complex materials, bottom-up material synthesis and patterning strategies

3. Bonding Techniques and Packaging

4. MEMS design & technology

5. Microsystems: Bio-MEMS design & technology

media of instruction and technical requirements for education and examination in case of online participation

Anschrieb (Tafel/elektronich) Folien, Videos, ...

Moodle

literature / references

Literature recommendations are given during the course of the lecture

evaluation of teaching
Details reference subject
module nameMicrotechnology 2
examination number2300606
credit points5
SWS4
on-campus program (h)45
self-study (h)105
obligationobligatory module
examwritten examination performance, 90 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
Details in degree program Master Micro- and Nanotechnologies 2016
module nameMicrotechnology 2
examination number2300606
credit points5
on-campus program (h)45
self-study (h)105
obligationobligatory module
examwritten examination performance, 90 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants