Technische Universität Ilmenau

Micro- and Nano System Technology - Modultafeln of TU Ilmenau

The module lists provide information on the degree programmes offered by the TU Ilmenau.

Please refer to the respective study and examination rules and regulations for the legally binding curricula (Annex Curriculum).

You can find all details on planned lectures and classes in the electronic university catalogue.

Information and guidance on the maintenance of module descriptions by the module officers are provided at Module maintenance.

Please send information on missing or incorrect module descriptions directly to modulkatalog@tu-ilmenau.de.

module properties module number 200521 - common information
module number200521
departmentDepartment of Electrical Engineering and Information Technology
ID of group2143 (Micro- and Nanoelectronic Systems)
module leaderProf. Dr. Martin Ziegler
languageEnglisch
term Wintersemester
previous knowledge and experience

Participation in the course "Micro and nano sensor technology"

learning outcomeAfter the lectures and exercises, the students
have an overview on basics and background knowledge of micro- and nanosystem technology,
devices and fabrication technology. They are able to understand
original literature, to design and use micro devices.

content

Requirements of micro- and nanotechnology; material properties and choice of materials; physical and engineering backgrounds of microsystem technology; fabrication and functionality of miniature sensors or actuators based on selected examples

media of instruction and technical requirements for education and examination in case of online participation

Overhead projector, beamer, blackboardl

literature / references

B. Heimann, W. Gerth, K. Popp: Mechatronik; Hanser Verlag München, 1998;
S. E. Lyschevski: Nano- and micromechanical systems, CRC Press, 2005;
Gerald Gerlach, Wolfram Dötzel, Einführung in die Mikrosystemtechnik, Hanser, München-Wien 2006
G. Gerlach, W. Dötzel, Introduction to Microsystem Technology, Wiley & Sons, 2008
W. Menz, J. Mohr, O. Paul, Mikrosystemtechnik für Ingenieure, Weinheim, Wiley-VCH, 3. Auflage (2005) U. Mescheder, Mikrosystemtechnik, Wiesbaden, Teubner, 2. Auflage (2004)
M. Glück, MEMS in der Mikrosystemtechnik, Wiesbaden, Teubner (2005)
Friedemann Völklein, Praxiswissen Mikrosystemtechnik : Grundlagen, Technologien, Anwendungen. Wiesbaden, Vieweg (2006)
Friedemann Völklein, Einführung in die Mikrosystemtechnik : Grundlagen und Praxisbeispiele. Braunschweig, Vieweg (2000)
Werner Karl Schomburg, Introduction to Microsystem Design, Springer, Berlin-Heidelberg 2015
Nam-Trung Nguyen, Mikrofluidik, Teubner, Wiesbaden 2004
Nguyen/Wereley, Fundamentals and Applications of Microfluidics, Artech House, Boston-London 2002

evaluation of teaching
Details reference subject
module nameMicro- and Nano System Technology
examination number2100858
credit points5
SWS4 (2 V, 2 Ü, 0 P)
on-campus program (h)45
self-study (h)105
obligationobligatory module
examoral examination performance, 30 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
Details in degree program Bachelor Elektrotechnik und Informationstechnik 2021
module nameMicro- and Nano System Technology
examination number2100858
credit points5
on-campus program (h)45
self-study (h)105
obligationobligatory module
examoral examination performance, 30 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
Details in degree program Master Micro- and Nanotechnologies 2016, Master Wirtschaftsingenieurwesen 2021 (ET), Master Micro- and Nanotechnologies 2021
module nameMicro- and Nano System Technology
examination number2100858
credit points5
on-campus program (h)45
self-study (h)105
obligationelective module
examoral examination performance, 30 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants