Technische Universität Ilmenau

Micro and Nano Sensor Technology - Modultafeln of TU Ilmenau

The module lists provide information on the degree programmes offered by the TU Ilmenau.

Please refer to the respective study and examination rules and regulations for the legally binding curricula (Annex Curriculum).

You can find all details on planned lectures and classes in the electronic university catalogue.

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module properties module number 200523 - common information
module number200523
departmentDepartment of Electrical Engineering and Information Technology
ID of group2143 (Micro- and Nanoelectronic Systems)
module leaderProf. Dr. Martin Ziegler
languageEnglisch
term Sommersemester
previous knowledge and experience

Mathematics, Physics,Electrical Engineering, Electronics

learning outcome

After the lectures and the exercises, the students have learned and understand basic processes for acquiring non-electrical quantities, the construction and function of key sensors and their technology.

content

Introduction to sensor technology: transducer principles, sensor materials, manufacturing process; Inertial sensors: acceleration sensors, gyroscopes; Mechanical Sensors: Strain Gages, Piezoresistive Sensors; Magnetic sensors: Hall effect sensors, anisotropic magnetoresistive sensors, giant magnetoresistive based sensors; Temperature sensors: thermistors, thermocouples; Infrared sensors: photon detectors, thermal sensors and arrays; Atomic force microscopy sensors

media of instruction and technical requirements for education and examination in case of online participation

Overhead projector, beamer, blackboard

literature / references

Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka: Handbook of Silicon Based MEMS Materials and Technologies; William Andrew (2010)

Julien W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim: Microsensors MEMS and Smart Devices; Wiley (2001)

Kempe,Volker: Inertial MEMS: principles and practice; Cambridge University Press (2011)

Antonio Rogalski: Infrared Detectors; Taylor & Francis (2010)

Ricardo García: Amplitude Modulation Atomic Force Microscopy; Wiley-VCH (2010)

J.Niebuhr, G.Lindner: Physikalische Messtechnik mit Sensoren; Vulkan-Verlag GmbH (2011)

H.-R.Tränkler, E.Obermeier: Sensortechnik Handbuch für Praxis und Wissenschaft; Springer (1998)

Ulrich Hilleringmann: Silizium-Halbleitertechnologie: Grundlagen mikroelektronischer Integrationstechnik; Springer (2019)

evaluation of teaching
Details reference subject
module nameMicro and Nano Sensor Technology
examination number2100861
credit points5
SWS4 (2 V, 2 Ü, 0 P)
on-campus program (h)45
self-study (h)105
obligationobligatory module
examwritten examination performance, 90 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
Details in degree program Master Micro- and Nanotechnologies 2016, Master Micro- and Nanotechnologies 2021, Master Wirtschaftsingenieurwesen 2021 (ET)
module nameMicro and Nano Sensor Technology
examination number2100861
credit points5
on-campus program (h)45
self-study (h)105
obligationelective module
examwritten examination performance, 90 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
Details in degree program Bachelor Elektrotechnik und Informationstechnik 2013
module nameMicro and Nano Sensor Technology
examination number2100861
credit points5
on-campus program (h)45
self-study (h)105
obligationobligatory module
examwritten examination performance, 90 minutes
details of the certificate
alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants