Technische Universität Ilmenau

Laboratory for Materials & Micro/Nanofabrication - Modultafeln of TU Ilmenau

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module properties module number 200543 - common information
module number200543
departmentDepartment of Electrical Engineering and Information Technology
ID of group2142 (Nanotechnology)
module leaderProf. Dr. Heiko Jacobs
languageEnglisch
term Sommersemester
previous knowledge and experience

Knowledge in Physics, Chemistry, Materials at the Bachelor level

learning outcome

After the module which is a combined laboratory course offered by Prof. Jacobs and Prof. Schaaf the students have practical experience on the technologies used for the production and characterization of modern materials, semiconductor devices, and sensors.

Modern educational platforms referred to as virtual laboratories may be used to provide practical insights into equipment and process steps that require a cleanroom environment or safety
precautions that prohibit the operation of the equipment, processes, or chemicals by the students.

Students have basic knowledge on materials commonly used in micro/nanotechnology and modern sensors. They know the basic properties, applications, and production of such materials.
The students also have knowledge of basics production methods including lithography, patterning, etching, and the production of thin films commonly used for the fabrication of semiconductor devices, integrated circuits, microsystems, and sensors.
They are able to directly realize appropriate materials and production methods in the lab by addressing specific tasks.

(1) Laboratory for Nanomaterials

The students are able to explain mechanical and functional properties of materials in the micro- and nanotechnology from their basic microscopic structure. They can explain changes in properties and can analyze them. They know methods to fabricate micro- and nanostructures and systems. They are able to select the appropriate material for a specific task in micro- and nanotechnologies.
The subject teaches specific knowledge, methodology and system competencies.

(2) Micro/Nanofabrication Laboratory

The participant gain experience in the fabrication of micro and nanotechnological structures and devices.
The students are familiar with the equipment and the process flow commonly used in the fabrication of micro and nanotechnological devices.
Learning results:
The participants have basic skills on the technological steps used in the manufacturing of modern micro/nanofabricated devices which integrate electronic and sensing elements in a small form factor integrated system.
The participant knows the equipment, measuring techniques, and principles of operation.
The lab course mimics the main steps of semiconductor processing as it is used in the industry today and provide an important link to the theory which was provided in the lectures.
The lab course provides an entry to the fabrication and processing of modern semiconductor devices which includes the fields of MEMS, NEMS, Sensors, Electronics, Photovoltaics, Bioelectronics, Nanoelectronics to name the most relevant today.

content

(1) Laboratory for Nanomaterials

Lab course on selected problems, where a choice is offered from a list of nanomaterials related topics:
Nanoparticles, nanowires, nanocomposites, Thin films, deposition technologies, transport phenomena in thin films, Elementary processes in film growth, Epitaxy / Super lattices, Diffusion, Electro migration, Special functional properties in thin films, Mesoscopic materials, Quantum phenomena, Fullerenes, Nanotubes, mechanical, electronic, optical properties for nanomaterials

(2) Micro/Nanofabrication Laboratory

Lab course on selected problems:
You will apply the technology to fabricate a micro mechanical pressure sensor based on a Si membrane integrated on a Si - chip.
You will study the influence of technological processing parameters on device properties.
The processing you will carry out includes: Wafer cleaning, Thermal Oxidation, Sputtering and Evaporation, Dry Etching, Spin Coating, and Electrical contact formation
Characterisation methods include: Optical Microscopy, Ellipsometric measurements, and Electrical characterisation/probe station.
You will also get a brief introduction to the operation of vacuum pumps and vacuum measurement equipment commonly used in the industry.

media of instruction and technical requirements for education and examination in case of online participation

Lab course, instruction manuals, textbooks

literature / references

Menz, W.; Mohr, J.; Paul, O.: Mikrosystemtechnik für Ingenieure. - 3., vollst. überarb. und erw. Aufl. -Weinheim: Wiley-VCH, 2005

evaluation of teaching
Details reference subject
module nameLaboratory for Materials & Micro/Nanofabrication
examination number210494
credit points5
SWS3 (0 V, 0 Ü, 3 P)
on-campus program (h)33.75
self-study (h)116.25
obligationobligatory module
examexamination performance with multiple performances
details of the certificateDas Modul Laboratory for Materials & Micro/Nanofabrication mit der Prüfungsnummer 210494 schließt mit folgenden Leistungen ab:
  • mündliche Prüfungsleistung über 30 Minuten mit einer Wichtung von 100% (Prüfungsnummer: 2100884)
  • Studienleistung mit einer Wichtung von 0% (Prüfungsnummer: 2100885)


Details zum Abschluss Teilleistung 2:

Lab attestations and lab reports

alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants
Details in degree program Master Micro- and Nanotechnologies 2021
module nameLaboratory for Materials & Micro/Nanofabrication
examination number210494
credit points5
on-campus program (h)34
self-study (h)116
obligationobligatory module
examexamination performance with multiple performances
details of the certificateDas Modul Laboratory for Materials & Micro/Nanofabrication mit der Prüfungsnummer 210494 schließt mit folgenden Leistungen ab:
  • mündliche Prüfungsleistung über 30 Minuten mit einer Wichtung von 100% (Prüfungsnummer: 2100884)
  • Studienleistung mit einer Wichtung von 0% (Prüfungsnummer: 2100885)


Details zum Abschluss Teilleistung 2:

Lab attestations and lab reports

alternative examination performance due to COVID-19 regulations incl. technical requirements
signup details for alternative examinations
maximum number of participants