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Prof. Eberhard Manske

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Nano Fabrication Machine

The Nano Fabrication Machine 100 serves as an important experimental platform for basic research in the field of scale-spanning AFM tip-based and laser-based nanofabrication for sub10nm structuring on surfaces up to Ø100 mm. This platform enables the RTG to advance into new, trendsetting frontiers of nanofabrication with subnanometer reproducibility and uncertainty. New methods of nanostructuring will be developed and investigated at the machine. It will support the research work of the DFG Research Training Group Nano-Fab (GRK 2182/1) of 13 PhD students over three generations (9 years). The device is internationally unique and unparalleled and is based on many years of research by SFB 622 (2002-2013).

This project is funded by the European Regional Development Fund of the European Union and the German Research Foundation.