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Ansprechpartner

Prof. Eberhard Manske

Telefon +49 3677 69-1250

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Ihre Position

INHALTE

Publications of RTG Participants and associated Members

2020

2020

  • Belkner J, Hofmann M, Kirchner J, Manske E, 2020, "Demonstration of aberration-robust high-frequency modulated differential confocal microscopy with an oscillating pinhole", Proc. SPIE 11352, Optics and Photonics for Advanced Dimensional Metrology, 113520N (2020),
    doi.org/10.1117/12.2555558
  • Stauffenberg J, Durstewitz S, Hofmann M, Ivanov T, Holz M, Ehrhardt W, Riegel W-U, Zöllner J-P, Manske E, Rangelow I W (2020). “Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers”, Journal of sensors and sensor systems. -Göttingen: Copernicus Publ., ISSN: 2194-878X, ZDB-ID: 2733700-5, Bd. 9.2020, 1, Seite 71-78, doi.org/10.5194/jsss-9-71-2020
  • Reuter C, Holz M, Reum A, Fahrbach M, Peiner E, Brand U, Hofmann M, Rangelow I W (2020). „Applications of tactile microprobes for surface metrology”, SMSI 2020, Nürnberg Wunstorf: AMA Service GmbH, S. 87-88, doi.org/10.5162/SMSI2020/A6.2
  • Hebenstreit R, Theska R, Wedrich K, Strehle S (2020). „Conceptional design of a positioning device with subatomic resolution and reproducibility”, Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology. 2020, S. 305-306
  • Germanow P, Mehring P, Neumann H, Augustin S, Fröhlich F, Krapf G (2020). „Vergleich verschiedener Methoden zur experimentellen Bestimmung der Inhomogenität von Thermoelementen“, GMA/ITG-Fachtagung Sensoren und Messsysteme; 20 (Nürnberg) : 2019.06.25-26, Technisches Messen, Bd. 87.2020, 3, Seite 146-152
  • Behrens A, Bosch M, Fesser P, Hentschel M, Sinzinger S (2020). „ Fabrication and characterization of deformed microdisk cavities in silicon dioxide with high Q-factor”, Applied optics / Optical Society of America. - Washington, DC,  Bd. 59.2020, 26, Seite 7893-7899, doi.org/10.1364/AO.398108
  • Behzadirad M, Rishinaramangalam A K, Feezell D, Busani T, Reuter C, Reum A, Holz M, Gotszalk T, Mechold S, Hofmann M, Ahmad A, Ivanov T, Rangelow I W (2020). “Field emission scanning probe lithography with GaN nanowires on active cantilevers”, Journal of vacuum science and technology. Nanotechnology & microelectronics, ISSN: 2166-2746 , ZDB-ID: 797726-8, Bd. 38.2020, 3, Seite 032806-1-032806-6
  • Weidenfeller, L., Hofmann, M., Supreeti, S., Mechold, S., Holz, M., Reuter, C., Manske, E. & Rangelow, I. W. (2020). "Cryogenic etching for pattern transfer into silicon of Mix-and-Match structured resist layers", Microelectronic Engineering, 111325. doi.org/10.1016/j.mee.2020.111325
  • Dannberg O, Kühnel M, Fröhlich F, 2020, "Entwicklung einer Cantileverkalibriereinrichtung", tm-Technisches Messen, aop, doi.org/10.1515/teme-2020-0064
  • Fern F, Füßl R, Eichfelder G, Manske E, Kuehnel M, 2020, "Coordinate transformation and its un-certainty under consideration of a non orthogonal coordinate base", Accepted Manuscript online 8 July 2020, Published by IOP Publishing Ltd in Measurement Science and Technology doi.org/10.1088/1361-6501/aba3f5
  • Ortlepp I, Kühnel M, Hofmann M, Weidenfeller L, Kirchner J, Supreeti S, Mastylo R, Holz M, Michels T, Füßl R, Rangelow I.W, Fröhlich T, Dontsov D, Schäffel C, Manske E, 2020, "Tip- and laser-based nanofabrication up to 100 mm with sub-nanometre precision", Proc. SPIE 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS, 113240A (23 March 2020), doi.org/10.1117/12.2551044
  • Hofmann M, Weidenfeller L, Supreeti S, Mechold S, Holz M, Reuter C, Sinzinger S,  Manske E, Rangelow I.W.; “Mix-and-match lithography and cryogenic etching for NIL template fabrication”, Microelectronic Engineering, Volume 224, 111234 (2020) doi.org/10.1016/j.mee.2020.111234

  • Ortlepp I, Kühnel M, Hofmann, M, Weidenfeller, L, Kirchner, J, Supreeti, S, Mastylo, R, Holz, M, Michels T, Füßl, R, Rangelow,I, Fröhlich, T, Donstov, D, Schäffel C, Manske, E, “Tip- and Laser based nanofabrication up to 100 mm with sub-nanometer precision” in SPIE Advanced Lithography 2020, San Jose, USA (24th-27th February 2020) doi.org/10.1117/12.2551044

  • Fern F; Füßl R; Eichfelder G; Manske E; Kühnel M: "Coordinate transformation and its uncertainty under consideration of a non orthogonal coordinate base" In: Measurement Science and Technology, 2020 doi.org/10.1088/1361-6501/aba3f5

  • Nilsen M, Dannberg O, Fröhlich T, Strehle S: "Direct polymer microcantilever fabrication from free-standing dry film photoresists" In: J. Micromech. Microeng. 30 (2020) 095012 doi.org/10.1088/1361-6439/ab9e4c

  • Fischer D, Sinzinger S: "Evaluation of quadratic phase hologram calculation algorithms in the Fourier regime" Appl. Opt. 59, pp. 1501–1506 (2020). doi.org/10.1364/AO.381547

  • Kapp D, Weise C, Ruderman M, and Reger J: "Fractional-Order System Identification of Viscoelastic Behavior: A Frequency Domain Based Experimental Study", In Advanced Motion Control, 2020, DOI: 10.1109/AMC44022.2020.9244449

  • Weise C, Tavares R, Wulff K, Ruderman M, and Reger J: "A Fractional-Order Control Approach to Ramp Tracking with Memory-Efficient Implementation", In Advanced Motion Control, 2020, DOI: 10.1109/AMC44022.2020.9244309
  • Weise C, Wulff K, and Reger J: "Extended Fractional-Order Memory Reset Control for Integer-Order LTI Systems and Experimental Demonstration", In IFAC World Congress, Berlin, 2020.

2019

2019

  • J. Kirchner, R. Mastylo, U. Gerhardt, T. Sasiuk, L. Weidenfeller, M. Hofmann, M. Kühnel, S. Sinzinger, E. Manske: Fasergekoppelter konfokaler Sensor zur exakten Abstandsregelung für maskenlose Lithografieanwendungen, 20. GMA/ITG-Fachtagung Sensoren und Messsysteme, 2019
  • Johannes Kirchner, Laura Weidenfeller, Uwe Gerhardt, Rostyslav Mastylo, Michael Kühnel, Stefan Sinzinger, Eberhard Manske, "A combined laser scanning and DLW tool for measuring and fabrication tasks with NPMM," Proc. SPIE 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII, 1093017, 2019
  • Ralf Schienbein, Florian Fern, René Theska, Roland Füßl: On the development and qualification of multiaxial designs of nanofabrication machines with ultra precision tool rotations, euspen’s 19 th International Conference & Exhibition, Bilbao, ES, June 2019
  • Shraddha Supreeti, Johannes Kirchner, Martin Hofmann, Rostyslav Mastylo, Ivo W. Rangelow, Eberhard Manske, Martin Hoffmann, Stefan Sinzinger, "Integrated soft UV-nanoimprint lithography in a  Nanopositioning and Nanomeasuring Machine for accurate positioning of stamp to substrate", Proc. SPIE 10958, Novel patterning technologies for semiconductors, MEMS/NEMS, and MOEMS, 2019
  • Laura Weidenfeller, Johannes Kirchner, Martin Hofmann, Michael Kühnel, Carsten Reinhardt, Ivo Rangelow, Eberhard Manske, "Laser-microfabrication with accurate positioning and metrological traceability," Proc. SPIE 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII, 2019
  • Weidenfeller L, Manske E, et al, 2019, Micro- and nanofabrication technologies using the nanopo-sitioning and nanomeasuring machines, Proc. SPIE 11056, Optical Measurement Systems for In-dustrial Inspection XI, 1105637 (21 June 2019), doi: 10.1117/12.2528136
  • X. Cao and S. Sinzinger, "Opto-Mechatronic System for Control and Characterization of the Coherence Properties of Light Sources," 2019 IEEE International Conference on Mechatronics (ICM), Ilmenau, Germany, 2019, pp. 141-145.
  • Weidenfeller, L., Hofmann, M., Kirchner, J., Supreeti, S., Rangelow, I. W., Sinzinger, S., & Manske, E. (2019). Micro-and nanofabrication technologies using the nanopositioning and nanomeasuring machines. In Optical Measurement Systems for Industrial Inspection XI (Vol. 11056, p. 1105637). International Society for Optics and Photonics.
  • Fern F, Schienbein R, Füßl R, 2019, Neues Konzept für eine fünfachsige Nanomessmaschine, Messunsicherheit - Prüfprozesse 2019, Düsseldorf, VDI Verlag GmbH, S. 131-138
  • Fern F, Schienbein R, Füßl R, et al, 2019, In situ error measurement of serial rotational devices for the application in nano coordinate measuring machines, Technisches Messen 86, Supplement 1, pp. 77-81
  • Sasiuk T, Fröhlich T, Theska R, Darnieder M, 2019, Generation of a static torque in the range of 1 mNm to 1 Nm according to the Jokey-weight principle, Messunsicherheit - Prüfprozesse 2019, Düsseldorf, VDI Verlag GmbH, S. 111-120
  • Hofmann M, Mecholdt S, Mohr M, Holz M, Dallorto S, Manske E, Fecht H-J, and Rangelow I.W; "Nanoscale lift-off process using field emission scanning probe lithography”, JVSTB 37, 061803 (2019) doi.org/10.1116/1.5122272

2018

2018

  • Florian Fern, Roland Füßl, Ralf Schienbein and René Theska: Influence of additional rotational movements on the measurement uncertainty of nanomeasuring, nanopositioning and nanofabrication machines, Sensoren und Messsysteme, 26. – 27. Juni, Nürnberg, 2018
  • David Fischer, Stefan Sinzinger: Maskenlose Lithographie für die dreidimensionale Mikrostrukturierung, DGaO-Proceedings, 2018
  • S. Gorges, S. Hesse: Design and Modeling Approach for a Lifting and Actuating Unit for the Applica-tion in Nano-Precision Machines. American Society for Preci-sion Engineering – Annual Meeting, 2018, Las Vegas – USA
  • Martin Hofmann, Claudia Lenk, Tzvetan Ivanov, Ivo W. Rangelow, Alexander Reum, Ahmad Ahmad, Mathias Holz and Eberhard Manske: Field Emission from Diamond Nanotips for Scanning Probe Lithography, Journal of Vacuum Science & Technology B 36, 06JL02, 2018
  • Martin Hofmann, Cemal Aydogan, Claudia Lenk, Yana Krivoshapkina, Steve Lenk, Burkhard Volland, Marcus Kaestner, Burhanettin Erdem Alaca, Eberhard Manske, Ivo Rangelow, Selective Pattern Transfer of Nano-Scale Features Generated by FE-SPL in 10 nm Thick Resist Layers, American Journal of Nano Research and Applications. Vol. 6, No. 1, 2018
  • Ralf Schienbein, Florian Weigert, Florian Fern, René Theska, Roland Füßl: The implementation of ultra precision rotations to multiaxial nanofabrication machines: challenges and solution concepts, euspen’s 18 th  International Conference &Exhibition, Venice, IT, June 2018
  • Laura Weidenfeller, Ralf Schienbein, Johannes Kirchner, Carsten Reinhardt, Eberhard Manske, "Development of laser positioning system of high accuracy in the nanometer range," Proc. SPIE 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI, 2018
  • X. Cao, P. Feßer, D. Fischer, M. Hofmann, Y. Bourgin, S. Sinzinger: Der Lau-Effekt in der lithographischen Mikro-Nanostrukturierung, DGaO-Proceedings 2018
  • H. Speck, X. Cao, T. Meinecke, S. Sinzinger: Phase Retrieval mit Hilfe verstimmbarer Optiken für die Fourier Ptychographie, DGaO-Proceedings 2018

2017

2017

  • S. Gorges, B. Leistritz, S. Hesse, I. Ortlepp, G. Slotta, C. Schaeffel: Development of an integrated guiding and actuation element for high dynamic nanopositioning systems.  59th Ilmenau Scientific Colloquium, 2017, Ilmenau – Germany
  • Ralf Schienbein, René Theska: A contribution to the development of multiaxial nanopositioning machines, euspen’s 17 th International Conference &Exhibition, Hannover, DE, May 2017
  • R. Schienbein, R. Theska, F. Weigert: A contribution to the implementation of ultraprecision rotations for multiaxial naopositioning machines, 59 th  Ilmenau Scientific Colloquium, Technische Universität Ilmenau, 11 – 15 September 2017
  • Cao, X., Sinzinger, S.: Effects of illumination on image reconstruction via Fourier ptychography, Advanced Optical Technologies, 2017 , 6 , 467-474
  • Cao, Xinrui, Sinzinger, Stefan: Removal of optical aberrations caused by illumination system in Fourier ptychography. Ilmenau 2017
  • X. Cao, M. Bichra, T. Meinecke, B. Mitschunas, S. Sinzinger: Einfluss der optischen Aberrationen und des Bildrauschens auf den Fourier-Ptychografie-Algorithmus, DGaO-Proceedings 2017